In-Line Optical Measurement of MicroElectroMechanical Systems (MEMS) Devices During Production

生产过程中微机电系统 (MEMS) 器件的在线光学测量

• 批准号: 0200331
• 负责人: Levent Degertekin
• 金额: --
• 依托单位: Georgia Tech Research Corporation
• 依托单位国家: 美国
• 项目类别: Continuing Grant
• 财政年份: 2002
• 资助国家: 美国
• 起止时间: 2002-07-01 至 2006-12-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0200331&HistoricalAwards=false
• 关键词: Line; Optical; Measurement; MicroElectroMechanical; Systems

This grant provides for the development of a metrology tool to enhance quality assurance of micro-electro-mechanical systems (MEMS). The micro-interferometers developed will enable the high-speed geometric measurement of micro-geometries providing feedback as to the conformance of the micro-part geometry to target specifications. The sensors to be developed in this research are based on diffraction grating interferometry making them extremely accurate, reliable and fast. As the sensors are fabricated using MEMS technology, they can be inexpensively fabricated in the form of an array. Furthermore, electrostatic drives will be integrated into the sensor arrays along with electronics and logic for tuning individual sensors in the array. This will permit the generation of self-tuning, parallel sensors increasing the speed at which a group of MEMS parts can be measured with sub-nanometer resolution. Inspection results will be generated for several known geometries to validate the sensors. The micro-interferometer arrays, which provide three-dimensional information, will also be compared to current two-dimensional metrology systems used in IC fabrication as another means of determining their capabilities.If successful, the proposed work will enable the measurement of micro-components that are critical in micro-electro-mechanical systems (MEMS). To date, measurement of such devices has been slow and inaccurate at best. The new metrology capabilities will enable both an increased understanding of the quality level of such systems that will, in turn, permit the monitoring and enhancement of the processes that are used in fabricating such systems. Furthermore, the speed at which measurement can be taken with the proposed sensors will enable dynamic measurement of moving MEMS devices. This will permit the validation of not only the static geometry of the devices, but also the validation of the dynamic behavior of these devices.

该赠款提供了开发计量工具，以增强微机械系统（MEMS）的质量保证。开发的微型干预仪将实现对微地形的高速几何测量，从而提供了有关微零件几何形状与目标规范的一致性的反馈。这项研究中要开发的传感器基于衍射光栅干涉法，使其非常准确，可靠和快速。由于传感器是使用MEMS技术制造的，因此它们可以以阵列的形式廉价地制造。此外，静电驱动器将集成到传感器阵列中，以及电子和逻辑，用于调整阵列中的单个传感器。这将允许生成自调整的平行传感器，从而提高可以通过亚纳米分辨率测量一组MEMS零件的速度。将对几种已知几何形状产生检查结果，以验证传感器。提供三维信息的微型施工阵列也将与IC制造中用于确定其能力的另一种方法的当前二维计量系统进行比较。如果成功，建议的工作将使您能够测量微型机电系统至关重要的微型组件（MEMS）。迄今为止，此类设备的测量充其量是缓慢和不准确的。新的计量功能将使对此类系统的质量水平的越来越多地了解，这反过来又可以监视和增强制造此类系统的过程。此外，可以使用所提出的传感器进行测量的速度将实现移动MEMS设备的动态测量。这将不仅允许验证设备的静态几何形状，还允许验证这些设备的动态行为。