Advanced atomic force microscopy using the FIRAT probe

使用 FIRAT 探针的先进原子力显微镜

• 批准号: 0725618
• 负责人: Levent Degertekin
• 金额: $ 29.98万
• 依托单位: Georgia Tech Research Corporation
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2007
• 资助国家: 美国
• 起止时间: 2007-09-01 至 2011-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0725618&HistoricalAwards=false
• 关键词: Advanced; atomic; force; microscopy; using

OBJECTIVE AND APPROACHThe objective of this research is to develop novel probes and imaging methods for atomic force microscopy to enable high speed tapping mode imaging and quantitative material characterization at the nanoscale. The approach is to take advantage of recent developments in microfabrication and microscale optical sensing technologies to implement high performance probe structures. These probes use integrated electrostatic actuation and optical interferometric detection for improved speed and detection sensitivity, eliminating several bottlenecks in high speed imaging at nanoscale. TECHNICAL MERITTo achieve probes large actuation range (2-5um) that is adequate for a variety of target applications while maintaining the interferometric detection sensitivity, novel diffraction based optical structures will be investigated. Practical probe designs suitable for batch fabrication and with proper dynamics and noise -- imaging bandwidths in the 50-100kHz, and thermal noise levels in the nN range ? will be developed. Finally, control systems and methods using the unique capabilities of these probes will be designed and implemented.BROADER IMPACTThis research can move the atomic force microscope from research labs to industrial platforms such as inline semiconductor device metrology to build faster computers, as well as broadening its use in basic science applications. Through dissemination of devices and know-how, a rapid impact in nanotechnology and nanoscience is targeted. In addition to involvement of teachers from K-12 institutions, and undergraduate students in the research project, the long term objective is to provide each high school with an easily operated, fast atomic force microscope, opening a real window for students to explore the nanoscale phenomena.

目的和方法这项研究的目的是开发用于原子力显微镜的新型探针和成像方法，以实现纳米级的高速敲击模式成像和定量材料表征。这种方法是利用微观加工和微观分解的最新发展，以实施高性能探针结构。这些探针使用集成的静电致动和光学干涉测量检测来提高速度和检测灵敏度，从而消除了纳米级高速成像中的几个瓶颈。技术Meritto实现探针较大的驱动范围（2-5UM），这足以适用于各种目标应用，同时保持干涉测量敏感性，将研究基于新型的基于衍射的光学结构。实用的探针设计适用于批处理制造，具有适当的动态和噪声 - 成像在50-100kHz中的带宽以及NN范围内的热噪声水平？将开发。最后，将设计和实施使用这些探针的独特功能的控制系统和方法。Broader的影响可以将原子力显微镜从研究实验室转移到工业平台，例如内联半导体设备计量学，以构建更快的计算机，并在基础科学应用中扩大其使用。通过传播设备和知识，纳米技术和纳米科学的快速影响是针对的。除了来自K-12机构的教师参与研究项目外，长期目标是为每所高中提供易于操作的，快速的原子力显微镜，为学生打开一个真正的窗口，让学生探索纳米级现象。