U.S.-Turkey Cooperative Research: Optical Metrology of MEMS

美国-土耳其合作研究：MEMS光学计量

• 批准号: 0423403
• 负责人: Levent Degertekin
• 金额: --
• 依托单位: Georgia Tech Research Corporation
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2004
• 资助国家: 美国
• 起止时间: 2004-09-01 至 2008-02-29
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0423403&HistoricalAwards=false
• 关键词: U.S.; Turkey; Cooperative; Research; Optical

0423403 KurfessDescription: This project supports a cooperative project by Dr. Thomas Kurfess and Dr. Dr. F. Levent Degertekin, School of Mechanical Engineering, Georgia Tech and Dr. Hakan Urey, Department of Electrical & Electronics Engineering, Koc University, Istanbul, Turkey. The project will address several issues in parallel optical metrology of dynamic MEMS (micro-electro-mechanical systems) devices using phase-sensitive diffraction grating microinterferometer arrays. For accurate measurement of MEMS device vibration profiles, the interferometer arrays need to be calibrated and the electrostatically actuated deformable gratings need to be characterized. In addition, an optical system approach is essential for uniform illumination of the interferometer array and efficient light collection from the MEMS devices under test. The Georgia Tech team will fabricate and provide a model for various dynamic MEMS devices and deformable diffraction gratings for microinterferometer arrays. These devices will be evaluated in terms of dynamic response and optical performance by Koc University. Based on these results, a more accurate model of the deformable gratings will be developed. A model for the optical system to deliver uniform light from a single laser source to an array of interferometers will be jointly developed and implemented. Furthermore, the thermal response of the deformable diffraction grating structures will be investigated with the help of a model to investigate the use of these structures for uncooled IR imaging arrays. A graduate student from Koc University will fabricate and evaluate several test structures for this purpose using the facilities at Georgia Tech. Scope and broader impacts: The proposed research will help improve the manufacturing processes of the emerging U.S. MEMS industry, which suffers from low yield and repeatability. The collaboration involves U.S. and Turkish scientists with complementary expertise and capabilities in optical MEMS design, fabrication, and characterization and opens up possibilities for joint studies in imaging arrays and optical MEMS. A graduate student from Koc University, a recently founded institution with excellent promise of contributing to scientific collaboration between Turkey and the United States, will participate in the project and will work with scientists and fellow graduate students at Georgia Tech. This project is funded jointly by OISE and the Division of Manufacturing and Industrial Innovation.

0423403 Kurfess描述：该项目支持佐治亚理工学院机械工程学院 Thomas Kurfess 博士和 F. Levent Degertekin 博士以及土耳其伊斯坦布尔科克大学电气与电子工程系 Hakan Urey 博士的合作项目。 该项目将使用相敏衍射光栅微干涉仪阵列解决动态 MEMS（微机电系统）设备的并行光学计量中的几个问题。为了精确测量 MEMS 器件振动轮廓，需要校准干涉仪阵列，并且需要表征静电驱动的可变形光栅。 此外，光学系统方法对于干涉仪阵列的均匀照明和从被测 MEMS 设备进行有效的光收集至关重要。佐治亚理工学院团队将为各种动态 MEMS 器件和微干涉仪阵列的可变形衍射光栅制造并提供模型。科克大学将评估这些设备的动态响应和光学性能。基于这些结果，将开发出更准确的可变形光栅模型。将联合开发和实施从单个激光源向干涉仪阵列传输均匀光的光学系统模型。此外，将借助模型研究可变形衍射光栅结构的热响应，以研究这些结构在非冷却红外成像阵列中的使用。 科克大学的一名研究生将利用佐治亚理工学院的设施为此目的构建和评估多个测试结构。范围和更广泛的影响：拟议的研究将有助于改善新兴的美国 MEMS 行业的制造工艺，该行业的产量和可重复性较低。此次合作涉及美国和土耳其科学家，他们在光学 MEMS 设计、制造和表征方面具有互补的专业知识和能力，并为成像阵列和光学 MEMS 领域的联合研究开辟了可能性。 科克大学是一所最近成立的机构，有望为土耳其和美国之间的科学合作做出贡献，该大学的一名研究生将参加该项目，并与佐治亚理工学院的科学家和研究生同学一起工作。 该项目由 OISE 和制造与工业创新司联合资助。