CAREER: Quantitative Ultrasonic Atomic Force Microscopy of Thin Films and Subsurface Interfaces

职业：薄膜和地下界面的定量超声原子力显微镜

• 批准号: 0348582
• 负责人: Levent Degertekin
• 金额: $ 40万
• 依托单位: Georgia Tech Research Corporation
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2004
• 资助国家: 美国
• 起止时间: 2004-05-01 至 2010-04-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0348582&HistoricalAwards=false
• 关键词: CAREER; Quantitative; Ultrasonic; Atomic; Force

The atomic force microscope (AFM) has become an indispensable tool for nanoscience and nanotechnology providing excellent lateral and vertical surface topography resolution non-destructively using soft cantilevers with sharp tips. To probe the mechanical properties of solid surfaces and obtain information about subsurface interfaces and defects, however, the AFM cantilever needs to be stiffer. One can increase the effective stiffness of the AFM by vibrating the AFM cantilever at ultrasonic frequencies surfaces while maintaining the outstanding lateral resolution with low DC or tapping contact force. This research proposal aims to investigate the potential of ultrasonic AFM techniques for non-destructive, quantitative measurements of thin film material properties and interfaces, and more specifically, for in-situ imaging of subsurface defects in electronic interconnect structures and other nanoscale devices. The proposed innovative research plan has the following specific aims: (a) Development of theoretical models of the interactions of the AFM cantilever tip and patterned surfaces and subsurface defects at ultrasonic frequencies, (b) Development of measurement methods combining tapping mode imaging with ultrasonic AFM to have repeatable, intermittent contact force with the samples for quantitative, in-situ measurements, and an ultrasonic AFM to apply shear stresses to the sample surface at the nanoscale for enhanced sensitivity to interface defects. Furthermore, these techniques will be applied in fluidic environments for biological and chemical applications using acoustic radiation pressure actuation of AFM cantilevers. The educational development plan is focused on long-term contributions to the partnership programs between the local K-12 education institutions and Georgia Tech through mentoring of participating graduate and undergraduate students, supporting high school student science projects, and K-12 educators. Undergraduate research assistants selected from minorities and underrepresented groups will be involved in the research project as well as graduate students from different disciplines. In addition to hands on training of students in the nanotechnology area, a graduate level course on Scanning Probe Microscopy will be developed in collaboration with other faculty members at Georgia Tech.

原子力显微镜（AFM）已成为纳米科学和纳米技术的必不可少的工具，它使用具有锋利尖端的软悬臂可使用柔软的悬臂，从而提供出色的横向和垂直表面形态。为了探测固体表面的机械性能并获取有关地下界面和缺陷的信息，但是，AFM Cantilever需要更硬。一个人可以通过在超声频率表面振动AFM悬臂来增加AFM的有效刚度，同时以低直流或敲击接触力保持出色的横向分辨率。这项研究建议旨在研究超声型AFM技术对薄膜材料特性和界面的无损，定量测量的潜力，更具体地说，是电子互连结构和其他纳米级设备中地下缺陷的原位成像。拟议的创新研究计划具有以下特定目的：（a）在超声频率下的AFM悬臂尖端和图案表面和地下缺陷的相互作用的理论模型开发，（b）开发结合超声AFM AFM Image Image的测量方法具有可重复的，间歇性的接触力与样品进行定量，原位测量和超声波AFM，以在纳米级处的样品表面施加剪切应力，以增强对界面缺陷的敏感性。此外，这些技术将在流体环境中使用AFM悬臂的声压力致动，用于生物和化学应用。教育发展计划的重点是通过指导参与研究生和本科生的指导，支持高中学生科学项目以及K-12教育者，将当地K-12教育机构与佐治亚理工学院之间的合作计划做出长期贡献。从少数民族和代表性不足的群体中选出的本科研究助理将参与研究项目，以及来自不同学科的研究生。除了动手培训纳米技术领域的学生外，还将与佐治亚理工学院的其他教职员工合作开发有关扫描探针显微镜的研究生级课程。