Application of microplasma to materials device process

微等离子体在材料器件工艺中的应用

基本信息

批准号：
15075202
负责人：
TERASHIMA Kazuo
金额：
$ 53.38万
依托单位：
The University of Tokyo
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research on Priority Areas
财政年份：
2003
资助国家：
日本
起止时间：
2003 至 2007
项目状态：
已结题

项目摘要

Based on the unique characteristics of microplasmas, such as an extraordinary locality and high density, development of various new application technologies are in progress. These include, e.g., novel materials processing, biomaterials treatment, chemical analysis, light sources of ultra-short wavelengths.In our group, in order to establish microplasma materials device processing, these studies have been performed as follows:(A) Development of high-rate materials device processing with using supercritical fluid (SCF) plasma: We developed supercritical fluid plasma devices and diagnosed the plasma properties. Applications of it to deposition of carbon and copper thin films were performed. These achievements make the non-equilibrium with high density and high-synthesis preparation of carbon nano-materials near the critical point.(B) Synthesis of novel materials by various microplasmas: We developed various types of microplasmas, such as atmospheric and in liquid plasma devices. Plasma diagnoses were performed to observe the super-non-equilibrium. Novel carbon-nano-materials were also found.(C) Fabrication of integrated plasma materials processing devices (plasma chip and plasma panel): We developed integrated plasma materials processing devices such as plasma chip and plasma panel, and diagnosed their plasma properties.

基于微等离子体独特的局域性、高密度等特性，各种新的应用技术的开发正在进行中。其中包括新型材料加工、生物材料处理、化学分析、超短波长光源等。本课题组为了建立微等离子体材料加工装置，进行了如下研究：使用超临界流体 (SCF) 等离子体进行速率材料器件加工：我们开发了超临界流体等离子体器件并诊断了等离子体特性。并将其应用于碳和铜薄膜的沉积。这些成果使得非平衡高密度、高合成碳纳米材料的制备已接近临界点。（二）各种微等离子体合成新型材料：我们开发了大气、液体等离子体等多种类型的微等离子体。设备。进行血浆诊断以观察超非平衡。还发现了新型碳纳米材料。（三）集成等离子体材料处理装置（等离子体芯片和等离子体面板）的制备：开发了集成等离子体材料处理装置，例如等离子体芯片和等离子体面板，并诊断了其等离子体特性。

项目成果

期刊论文数量（196）

专著数量（0）

科研奖励数量（0）

会议论文数量（0）

专利数量（0）

Development of cross-flow micro-nebulizer for atmospheric pressure microplasma deposition and its application to prepare nano-carbon materials from alcohol

常压微等离子体沉积错流微雾化器的研制及其在乙醇制备纳米碳材料中的应用

DOI：
发表时间：
2006
期刊：
Transactions of the Material Research Society of Japan (掲載決定印刷中)
影响因子：
0
作者：
萩原嘉伸;渡邉裕;林偉民;劉慶;大森整;村田泰彦;清水禎樹他
通讯作者：
清水禎樹他

Development of wire spraying for direct micro-patterning via an atmospheric- pressure UHF inductively coupled microplasma iet

通过常压 UHF 感应耦合微等离子体网络直接微图案化的线材喷涂的开发

DOI：
发表时间：
2006
期刊：
Surf. Coat. Technol. 200
影响因子：
0
作者：
T. Yokoyama;Y. Shimizu
通讯作者：
Y. Shimizu

Carbon nanotube and nanopolyhedron syntheses by a dischargeunder a sunercritical fluid environment

太阳临界流体环境下放电合成碳纳米管和纳米多面体

DOI：
发表时间：
2004
期刊：
J. Mater. Chem. 14
影响因子：
0
作者：
矢澤美穂;千葉亮;鷹野芳樹;開康一;山本浩史;高橋利宏;中村敏和;N. Shirai;C. Y. Li;S. Kawata;O. Sakai;T. Shirafuji;T. Sakurai;T. Ito
通讯作者：
T. Ito

Fabrication of spherical carbon via UHF inductively coupled microplasma CVD

通过 UHF 感应耦合微等离子体 CVD 制造球形碳