Development of SPM operational in a plasma environmental and its application to the nano-scopic structural study of solid-plasma interface

等离子体环境下SPM的发展及其在固体-等离子体界面纳米结构研究中的应用

• 批准号: 10450231
• 负责人: TERASHIMA Kazuo
• 金额: $ 8.7万
• 依托单位: The University of Tokyo
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 1998
• 资助国家: 日本
• 起止时间: 1998 至 1999
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-10450231/
• 关键词: cold glow plasma; SPM (scanning probe microscopy); plasma-solid interface; plasma etching; nano-scopic structure; ナノスコピック構造; プラズマ環境; 固体-プラズマ界面; HOPG

In this project, we developed a scanning tunneling microscope/spectroscopy operational under a cold glow plasma environment. The first in-situ observation of plasma-solid surface reaction on a nanometer scale level was succeeded. This was achieved by employing a special scanning funneling microscopy (STM) which can be operated under a plasma environment. This STM system and a radio-frequency (r. f.) (430 MHz) plasma generation system were housed in a vacuum chamber with a rotary pump. The plasma generated in this study was diagnosed that an electron temperature was 4 eV and an electron density was 2 x 10ィイD19ィエD1 cmィイD1-3ィエD1 by a double probe method, respectively. To prevent noise current from the plasma, a probing tip was coated with epoxy grease and insulated glass, and an apex of the probing tip was sharpened by focused ion beam (FIB). The STM had an enough stability and reproducibility to measure a region of 10 μm x 10 μmィイD12ィエD1 for no less than 5 hours under a plasma environment. Using this apparatus, sequential in-situ STM images of highly oriented pyrolytic graphite (HOPG) were obtained under an r. f. low-pressure (1 Torr) air glow plasma. These images show the projection of which the height is 50 nm has been etched by the plasma and disappeared.

在这个项目中，我们开发了一种在冷辉光等离子体环境下运行的扫描隧道显微镜/光谱仪，这是通过采用特殊的扫描漏斗显微镜实现的，首次在纳米级水平上原位观察了等离子体-固体表面反应。 (STM)，可以在等离子体环境下运行。该 STM 系统和射频 (r.f.) (430 MHz) 等离子体生成系统安装在带有旋转泵的真空室中。通过双探针法分别诊断出电子温度为4 eV，电子密度为2×10 cm D1-3 cm，为了防止来自等离子体的噪声电流，探针尖端涂有环氧油脂和绝缘玻璃，探针尖端通过聚焦离子束 (FIB) 进行锐化，STM 具有足够的稳定性和重复性来测量区域。在等离子体环境下，在 10 μm x 10 μm D12 下持续不少于 5 小时，在 f.1 的低压（1 Torr）空气辉光等离子体下获得了高取向热解石墨 (HOPG) 的连续原位 STM 图像。这些图像显示高度为50 nm的投影已被等离子体蚀刻并消失。

项目成果

K. Terashima, et al.: "Scanning tunneling microscopy operating under a plasma environment"Thin Solid Films. 345. 146-150 (1999)

K. Terashima 等人：“在等离子体环境下运行的扫描隧道显微镜”固体薄膜。

K.Terashima: "Scanning tuneling microscopy operating under a plama environment" Thin Solid Films. (印刷中). (1999)

K.Terashima：“在等离子体环境下运行的扫描调谐显微镜”薄固体薄膜（正在出版）。

N.Yamaguchi: "Scanning tunreling microscopy of YBCO clusters deposited by plasma flash method" J.Mater.Sci.Lett.17. 2067-2069 (1998)

N.Yamaguchi：“通过等离子体闪光法沉积的 YBCO 簇的扫描隧道显微镜”J.Mater.Sci.Lett.17。

寺嶋和夫,伊藤剛仁: "マイクロからナノ領域のプラズマ生成とその材料科学への応用"プラズマ・核融合学会誌. (印刷中). (2000)

Kazuo Terashima、Takehito Ito：“微纳米范围内的等离子体生成及其在材料科学中的应用”日本等离子体与核聚变学会杂志（2000 年）。

寺嶋和夫、伊藤剛仁: "マイクロからナノ領域のプラズマ生成とその材料科学への応用"プラズマ・核融合学会誌. (印刷中). (2000)

Kazuo Terashima、Takehito Ito：“微米到纳米范围内的等离子体生成及其在材料科学中的应用”日本等离子体与融合科学学会杂志（2000 年出版）。