Effect of residual stress in thin film on strength properties of CVD-coated material.

薄膜中残余应力对CVD涂层材料强度性能的影响。

• 批准号: 03650063
• 负责人: MIYOSHI Yoshio
• 金额: $ 1.41万
• 依托单位: Osaka University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for General Scientific Research (C)
• 财政年份: 1991
• 资助国家: 日本
• 起止时间: 1991 至 1993
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-03650063/
• 关键词: CVD method; TiC coating film; X-ray stress measurements; Binding strength; Compressive residual stress; Thermal shock; Fatigue strength; Fretting fatigue strength; 膜硬度; はく離; フレッチング疲労; 残留応力; 摩耗特性; 転がり疲労; X線残留応力; 表面弾性波; ピッチング; CVD被覆材; 膜内残留

In the present research, residual stresses wityin thermal CVD-coated TiC film were measured by X-ray stress measurements. The effect of those stresses and the influence of the film- and substrate thickness factors were experimentally investigated. The effect of residual stress and thermal shock on the binding strength of film was also examined.Further, the effectiveness of coating film for the rolling contact and fretting fatigue strength was discussed.The results obtained are summarized as follows ;1. It is possible to measure residual stress of CVD-coated TiC film by using MnK plpha and (400) diffraction plane.2. Compressive residual stress in TiC film increases by several GPa. The increase is proportional to the substrate and film thicknesses.3. The binding strength of TiC film increases porportionally with film's the compressive residual stress and half-value breadth of deffraction profile. The binding strength can be non-destructively estimated by X-ray residual stress and halfvalue breadth.4. The binding strength and compressive residual stress of TiC film decrease with increasing number of cycles in thermal shock. The peeling strength of film decreases with increasing testing temperature in thermal shock.5. In rolling contact fatigue, the compressive residual stress within TiC film decreases as number of cycles increase. Therefore, TiC film is without effect for the improvement of rolling contact fatigue strength.6. A conventional fatigue strength of TiC-coated materials is relatively low compared to the non-coated ones.7. TiC cating film is particulary effective for the improvement of fretting fatigue strength.

在本研究中，通过 X 射线应力测量来测量热 CVD 涂层 TiC 薄膜中的残余应力。通过实验研究了这些应力的影响以及薄膜和基底厚度因素的影响。还考察了残余应力和热冲击对薄膜结合强度的影响。进一步讨论了涂层薄膜对滚动接触和微动疲劳强度的有效性。所得结果总结如下： 1．利用MnK plpha和(400)衍射面可以测量CVD涂层TiC薄膜的残余应力。2． TiC 膜中的残余压缩应力增加数GPa。增加量与基材和薄膜厚度成正比。 3． TiC薄膜的结合强度随着薄膜的残余压缩应力和衍射轮廓的半值宽度成比例地增加。通过X射线残余应力和半值宽度可以无损地估计结合强度。4． TiC薄膜的结合强度和残余压缩应力随着热冲击循环次数的增加而降低。热冲击试验中，薄膜的剥离强度随着试验温度的升高而降低。 5．在滚动接触疲劳中，TiC 膜内的压缩残余应力随着循环次数的增加而减小。因此，TiC膜对于提高滚动接触疲劳强度没有作用。6．与非涂层材料相比，TiC涂层材料的常规疲劳强度较低。​​7． TiC阳离子膜对于提高微动疲劳强度特别有效。

项目成果

Yoshio MIYOSHI,Keiji OGURA,Issei NAKAYAMA and Takaaki YAMANO: "RESIDUAL STRESS AND PEELING STRENGTH OF TiC FILM IN CVD" Proceeding of the 3rd International Conference on Residual Stresses. (1992)

Yoshio MIYOSHI、Keiji OGURA、Issei NAKAYAMA 和 Takaaki YAMANO：“CVD 中 TiC 薄膜的残余应力和剥离强度”第三届残余应力国际会议论文集。

三好,小倉,木田,坂口,伊丹: "CVD被覆したTiC膜の特性に対する繰返し熱衝撃の影響" 日本材料学会;第29回X線材料強度に関するシンポジウム講演論文集. 50-57 (1993)

Miyoshi、Ogura、Kida、Sakaguchi、Itami：“反复热冲击对 CVD 涂层 TiC 薄膜性能的影响”，日本材料学会；第 29 届 X 射线材料强度研讨会论文集（1993 年）。

Y.MIYOSHI, K.OGURA, K.KIDA and T.SHIRASAKI: "Evaluation of Rolling Contact Fatigue Damage in TiC Film Coated Steel" JSMS, Proc. 29th Sympo. X-Ray Stud. Mech. Behav. Mates.152-157 (1993)

Y.MIYOSHI、K.OGURA、K.KIDA 和 T.SHIRASAKI：“TiC 薄膜涂层钢中滚动接触疲劳损伤的评估”JSMS，Proc。

Y.MIYOSHI, K.OGURA and K.KIDA: "Applications of Scanning Acoustic Microscope to Evaluation of Thin Film Properties" JSMS, Proc. 30th Sympo. X-Ray Stud. Mech. Behav. Mates.47-54 (1993)

Y.MIYOSHI、K.OGURA 和 K.KIDA：“扫描声学显微镜在薄膜特性评估中的应用”JSMS，Proc。

三好・小倉・木田・坂口・伊丹: "CVD被覆したTiC膜の特性に対する繰返し熱衝撃の影響" 日本材料学会;第29回X線材料強度に関するシンポジウム講演論文集. 50-57 (1993)

Miyoshi、Ogura、Kida、Sakaguchi、Itami：“循环热冲击对 CVD 涂层 TiC 薄膜性能的影响”，日本材料学会；第 29 届 X 射线材料强度研讨会论文集（1993 年）。