Photosensitivity Mechanism of Chemically Modified Gel Films and Their Application to the Fabrication of Micro-Devices

化学修饰凝胶薄膜的光敏机理及其在微器件制备中的应用

基本信息

批准号：
11650866
负责人：
TOHGE Noboru
金额：
$ 2.3万
依托单位：
Kinki University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (C)
财政年份：
1999
资助国家：
日本
起止时间：
1999 至 2000
项目状态：
已结题

项目摘要

The current research project has been carried out to study the mechanism of photosensitivity of chemically modified gel films and apply them to the fabrication of microdevices. The following results have been obtained.1) Preparation and patterning conditions of a variety of photosensitive gel films such as Nb_2O_5, ZrO_2-SiO_2, PZT and PLZT, which are essential materials for optical and electronic devices, have been established and the resultant oxide films have been characterized.2) Chemical modification of Si-alkoxides with phenanthroline or the use of tri-functional alkoxides with a methacryl group has been found to give photosensitive SiO_2 gel films.3) The preparation process has been examined to fabricate Bragg diffraction gratings using photosensitive ZrO_2, PZT and PLZT gel films by the phase mask and two-beam-interference methods and the gratings obtained have been characterized in terms of preparation conditions.4) Double exposure of gel films to two-beam-interference fringes gave two-dimensional gratings of lattice and island types depending on the irradiation energy of laser.5) Simultaneous chemical modification of Ti-alkoxide with β-diketone and methacrylic acid brought about an increase in both photosensitivity and resolution of the resultant gel films.6) Molecular orbital calculation of electronic state of metal-alkoxides chemically modified with various β-diketones gave optical absorption spectra, which were in good agreement with the experimental ones.7) Double layer type of photocatalyst where patterned TiO_2 film is deposited on a SnO_2-coated glass substrate has been proposed and this new type of photocatalyst has been shown to be highly active for the acquisition of hydrogen from methanol, as well as the decomposition of harmful organic compounds.

本课题主要研究化学改性凝胶薄膜的光敏性机理并将其应用于微器件的制备，取得了以下成果：1)各种光敏凝胶薄膜的制备及图案化条件。已经建立了光学和电子器件的重要材料Nb_2O_5、ZrO_2-SiO_2、PZT和PLZT，并对所得氧化物薄膜进行了表征。2）化学改性已发现硅醇盐与菲咯啉的结合或使用带有甲基丙烯酰基的三官能醇盐可得到光敏SiO_2凝胶薄膜。 3)研究了利用光敏ZrO_2、PZT和PLZT凝胶薄膜制作布拉格衍射光栅的制备过程。通过相位掩模和双光束干涉方法对所得光栅进行了制备条件的表征。4）凝胶薄膜的双重曝光根据激光的照射能量，双光束干涉可以产生晶格型和岛型的二维光栅。 5）用β-二酮和甲基丙烯酸同时化学修饰钛醇盐，可以提高光敏度和分辨率。 6）用各种β-二酮化学修饰的金属醇盐的电子态的分子轨道计算给出了光学吸收光谱， 7)提出了在SnO_2涂层玻璃基板上沉积图案化TiO_2薄膜的双层型光催化剂，这种新型光催化剂已被证明对于获得高活性的光催化剂具有较高的活性。甲醇中的氢气，以及有害有机化合物的分解。