Photosensitivity Mechanism of Chemically Modified Gel Films and Their Application to the Fabrication of Micro-Devices

化学修饰凝胶薄膜的光敏机理及其在微器件制备中的应用

基本信息

批准号：
11650866
负责人：
TOHGE Noboru
金额：
$ 2.3万
依托单位：
Kinki University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (C)
财政年份：
1999
资助国家：
日本
起止时间：
1999 至 2000
项目状态：
已结题

项目摘要

The current research project has been carried out to study the mechanism of photosensitivity of chemically modified gel films and apply them to the fabrication of microdevices. The following results have been obtained.1) Preparation and patterning conditions of a variety of photosensitive gel films such as Nb_2O_5, ZrO_2-SiO_2, PZT and PLZT, which are essential materials for optical and electronic devices, have been established and the resultant oxide films have been characterized.2) Chemical modification of Si-alkoxides with phenanthroline or the use of tri-functional alkoxides with a methacryl group has been found to give photosensitive SiO_2 gel films.3) The preparation process has been examined to fabricate Bragg diffraction gratings using photosensitive ZrO_2, PZT and PLZT gel films by the phase mask and two-beam-interference methods and the gratings obtained have been characterized in terms of preparation conditions.4) Double exposure of gel films to two-beam-interference fringes gave two-dimensional gratings of lattice and island types depending on the irradiation energy of laser.5) Simultaneous chemical modification of Ti-alkoxide with β-diketone and methacrylic acid brought about an increase in both photosensitivity and resolution of the resultant gel films.6) Molecular orbital calculation of electronic state of metal-alkoxides chemically modified with various β-diketones gave optical absorption spectra, which were in good agreement with the experimental ones.7) Double layer type of photocatalyst where patterned TiO_2 film is deposited on a SnO_2-coated glass substrate has been proposed and this new type of photocatalyst has been shown to be highly active for the acquisition of hydrogen from methanol, as well as the decomposition of harmful organic compounds.

当前的研究项目已经进行了研究光敏凝胶膜的机理，并将其应用于微发行条的制造。 1）已经建立了各种光敏凝胶膜的制备和模式条件，例如NB_2O_5，ZRO_2-SIO_2，PZT和PLZT，它们是光学和电子设备的必不可少的材料，它们已建立了光学和电子设备的必不可少的材料。已经发现，甲基酰基群可以给予光敏的SIO_2凝胶膜。3）已经检查了制备过程，使用光敏Zro_2，PZT和PLZT凝胶膜通过相位掩码和两束式介入方法进行制造Bragg衍射光栅，并通过准备好的exporation Formession。晶格和岛屿类型的二维光栅取决于激光的辐射能。5）同时对Ti-Alkoxide用β-二酮酮和甲基丙烯酸同时修饰化学修饰，从而使所得凝胶膜的光敏性和分辨率提高。已经提出了在SNO_2涂层的玻璃底物上沉积图案化的TiO_2膜的双层光催化剂的双层类型的光催化剂，并且已经提出了这种新型的光催化剂，并且已经证明已表明这种新型的光催化剂高度活跃，可用于从甲醇中获取氢以及有害的有机体的分解。