Preparation of Functional Thin Films and Fine-Patterning by the Photo-Assisted Process

光辅助工艺制备功能薄膜和精细图案

基本信息

批准号：
09650930
负责人：
TOHGE Noboru
金额：
$ 2.18万
依托单位：
Kinki University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (C)
财政年份：
1997
资助国家：
日本
起止时间：
1997 至 1998
项目状态：
已结题

项目摘要

The present study has been carried out for the purpose of preparing functional thin films and establishing fine-patterning process by the novel photo-assisted process, with the following result :1)Al_2O_3 gel films modified with benzoylacetone are the most stable in an ambient atmosphere and has the highest photosensitivity among the modified A1_2O_3 gel films ; Benzophenone has been found to act as a sensitizer for these gel films.2)ESCA spectra have shown that the UV-irradiation of modified ZrO_2 gel films changes the bonding situation of carbon atom and decreases the carbon content in the gel films.3)Gel films in the Al_2O_3-SiO_2 system prepared from TEOS and modified Al-alkoxide show the photosensitive for the Al_2O_3 content of more than 30 mol%.4)Photosensitive PLZT gel films over 1 mum in thickness are obtainable by the repetition of coating and drying and can be patterned by the UV-irradiation and laching process.5)Selective coloration has been realized by the coating of SiO_2 gel films containing dye on ZrO_2 gel films irradiated through a mask, followed by rinse with water.6)Fabrication process of diffraction gratings has been developed using photosensitive gel films and the characteristics of the obtained gratings has been evaluated in terms of fabrication conditions.7)Hydrolysis of TEOS have been controlled with UV-irradiation in the presence of photo-acid generator and the possibility of fine-patterning has been found for SiO_2 gel films containing photo-acid generator.

本研究旨在通过新型光辅助工艺制备功能薄膜并建立精细图案化工艺，结果如下：1）苯甲酰丙酮修饰的Al_2O_3凝胶薄膜在环境气氛中最稳定。在改性A1_2O_3凝胶膜中具有最高的光敏性；研究发现二苯甲酮可以作为这些凝胶膜的敏化剂。2)ESCA光谱表明，紫外照射改性ZrO_2凝胶膜改变了碳原子的键合情况，降低了凝胶膜中的碳含量。3)凝胶TEOS与改性醇盐制备的Al_2O_3-SiO_2体系薄膜对Al_2O_3含量大于30 mol%表现出光敏性。4)光敏性通过重复涂布和干燥可得到厚度超过1μm的PLZT凝胶膜，并可通过紫外光照射和淋洗工艺进行图案化。5)在ZrO_2凝胶膜上涂覆含有染料的SiO_2凝胶膜，实现了选择性着色。通过掩模进行照射，然后用水冲洗。6）利用光敏凝胶薄膜开发了衍射光栅的制造工艺，并在制造方面评估了所得光栅的特性7)在光酸产生剂存在下,通过紫外照射控制了TEOS的水解,并发现含有光酸产生剂的SiO_2凝胶薄膜具有精细图案化的可能性。