Preparation of Functional Thin Films and Fine-Patterning by the Photo-Assisted Process

光辅助工艺制备功能薄膜和精细图案

基本信息

批准号：
09650930
负责人：
TOHGE Noboru
金额：
$ 2.18万
依托单位：
Kinki University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (C)
财政年份：
1997
资助国家：
日本
起止时间：
1997 至 1998
项目状态：
已结题

项目摘要

The present study has been carried out for the purpose of preparing functional thin films and establishing fine-patterning process by the novel photo-assisted process, with the following result :1)Al_2O_3 gel films modified with benzoylacetone are the most stable in an ambient atmosphere and has the highest photosensitivity among the modified A1_2O_3 gel films ; Benzophenone has been found to act as a sensitizer for these gel films.2)ESCA spectra have shown that the UV-irradiation of modified ZrO_2 gel films changes the bonding situation of carbon atom and decreases the carbon content in the gel films.3)Gel films in the Al_2O_3-SiO_2 system prepared from TEOS and modified Al-alkoxide show the photosensitive for the Al_2O_3 content of more than 30 mol%.4)Photosensitive PLZT gel films over 1 mum in thickness are obtainable by the repetition of coating and drying and can be patterned by the UV-irradiation and laching process.5)Selective coloration has been realized by the coating of SiO_2 gel films containing dye on ZrO_2 gel films irradiated through a mask, followed by rinse with water.6)Fabrication process of diffraction gratings has been developed using photosensitive gel films and the characteristics of the obtained gratings has been evaluated in terms of fabrication conditions.7)Hydrolysis of TEOS have been controlled with UV-irradiation in the presence of photo-acid generator and the possibility of fine-patterning has been found for SiO_2 gel films containing photo-acid generator.

本研究的目的是为了准备功能性薄膜并通过新型照片辅助过程来建立良好的过程，并以下结果：1）Al_2o_3用苯甲酰酮修饰的凝胶膜是环境中最稳定的，在环境中是最稳定的，并且在修改的A1_2O_2O_3凝胶胶片中具有最高的光感感；已经发现苯苯甲酮可以作为这些凝胶膜的敏化剂。2）ESCA光谱表明，经过修改的Zro_2凝胶胶片的UV-Irradiation改变了碳原子的粘结状况，并减少凝胶膜中的碳含量，并减少了Al_2O_3-Sio_2 System for the的胶片中的胶片3）超过30 mol％.4）可以通过重复涂层和干燥来获得光敏的PLZT凝胶膜，可以通过uv-irradiatiation和laching过程进行图案来获得。5）选择性色素已通过在Zro_2胶片上包含在Zro_2胶片上的SIO_2凝胶膜来实现。衍射光栅是使用光敏凝胶膜开发的，并且已根据制造条件进行了评估。7）TEOS水解的水解在光子生成器的存在下已通过UV-IRRADIATION进行了控制，并且在含有微型胶片的可能性中，Sio_2 Gel Films含有照相生成器。