Preparation of Ferroelectric Films by the Sol-Gel Method

溶胶-凝胶法制备铁电薄膜

• 批准号: 62550570
• 负责人: TOHGE Noboru
• 金额: $ 1.22万
• 依托单位: University of Osaka Prefecture
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for General Scientific Research (C)
• 财政年份: 1987
• 资助国家: 日本
• 起止时间: 1987 至 1988
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-62550570/
• 关键词: Ferroelectric Films; Sol-Gel Method; Metal Alkoxide; Chelating Agent; PbTiO_3-PbZrO_3系; ゾルーゲル法; PbTiO_3ーPbZrO_3系; キレート化剤; ペロブスカイト相

The sol-gel method which starts from metal-aldoxides is a promising process to prepare various oxide films. The present study has been carried out to establish the sol-gel process to form ferroelectric films in the system PbTiO_3-PbZrO_3. One of the problems encountered in the process is that these alkoxides of Ti and Zr is easily hydrohyzable. The stabilization of the alkoxides has been examined and then the PbTiO_3-PbZrO_3 films has been prepared from the stabilized alkoxides. The following results have been obtained through the present study: (1) ZrO_2 or B_2O_3-containing multicomponent films have been prepared from very hydrolyzable Zr- or B-alkoxides by carrying out the coating in a dry atmosphere. (2) Metal alkoxides of Al, Ti, or Zr have been found to be stabilized with chelating agents such as betha-diketones. Very homogeneous Al_2O_3, TiO_2, or ZrO_2 films have been obtained from the stabilized alkoxides of corresponding metals. (3) Ferroelectric films in the system PbTiO_3-PbZrO_3 have been prepared from Ti(O-nBu)_4 and Zr(O-nBu)_4 stabilized with acetyleacetone. The films obtained are amorphous below 400 c and crystallized by the heat-treatment at 500 c. The crystallinity of the films is increased with increasing heat-treatment temperature, accompanying the increase in dielectric constant. The dielectric constant of the films in the system PbTiO_3-PbZr/_3 decreases as the content of PbZrO_3 is increased.

以金属醛氧化物为原料的溶胶-凝胶法是制备各种氧化物薄膜的一种有前景的方法。本研究建立了在PbTiO_3-PbZrO_3体系中形成铁电薄膜的溶胶-凝胶工艺。该方法中遇到的问题之一是Ti和Zr的这些醇盐很容易水解。对醇盐的稳定性进行了考察，并用稳定的醇盐制备了PbTiO_3-PbZrO_3薄膜。通过本研究获得了以下结果：(1)通过在干燥气氛中进行涂覆，由易水解的Zr-或B-醇盐制备了含ZrO_2或B_2O_3的多组分薄膜。 (2) 已发现 Al、Ti 或 Zr 的金属醇盐可以用螯合剂（如β-二酮）稳定。由相应金属的稳定醇盐获得了非常均匀的Al_2O_3、TiO_2或ZrO_2薄膜。 (3)以乙酰丙酮稳定的Ti(O-nBu)_4和Zr(O-nBu)_4为原料制备了PbTiO_3-PbZrO_3体系中的铁电薄膜。所得薄膜在400℃以下为非晶态，并通过500℃热处理而结晶。随着热处理温度的升高，薄膜的结晶度增加，介电常数也随之增加。 PbTiO_3-PbZr/_3体系中薄膜的介电常数随着PbZrO_3含量的增加而降低。

项目成果

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Toge、Atsunori Matsuda、Tsutomu Minami：日本化学会杂志 1987 年。1952-1957 年（1987 年）。

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