Fabricatio of Photonic Devices Using Photosensitive Gel Films and Their Properties

光敏凝胶薄膜光子器件的制备及其性能

基本信息

批准号：
12555179
负责人：
TOHGE Noboru
金额：
$ 3.58万
依托单位：
Kinki University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (B)
财政年份：
2000
资助国家：
日本
起止时间：
2000 至 2001
项目状态：
已结题

项目摘要

1)Fabrication of PZT Films on ITO-Coated Substrate by the Chemical Modification Method : PZT films were fabricated on ITO-coated silica glass stubstrates by the chemical modification method and their electrical properties were studied. The properties of the PZT films fabricated were found depend on the oxygen partial pressure when ITO films had been prepared by RF magnetron sputtering.2)Preparation of Photosensitive Gel Films Containing Eu^<3+> : Luminescent patterns could be fabricated by UV-irradiation and leaching for the photosensitive gel films containing Eu^<3+>. Correlation between luminescent properties and using matrix were also discussed.3)Fabrication of Two-Dimensional Gratings and Their Antireflection Effects : Two-dimensional (2D) surface-relief gratings have been fabricated by the two-beam interference method on photosensitive gel films. The formation of 2D-grating of island type on a silica glass substrate substantially reduced the reflection at its surface in a waveleng … More th range of 1.3 to 2.6 mm.4)Effects of Methacrylic Acid on the Photosensitivity of Chemically Modified Gel Films : It has been found that the photosensitive gel films obtained from Zr-alkoxide modified with β-diketone and methacrylic acid can be thicker than the gel films without methacrylic acid.5)Preparation of Photosensitive ZrO_2 Gel Films Using Hydroxyl-sustituted Aromatic Ketones : In order to develop new photosensitive gel films, ZrO_2 gel films were prepared from zirconlum butoxide chemically modified with hydroxyl-substituted aromatic ketones by the sol-gel method. The gel film obtained absorbed light at around 400 nm. For the gel films, line and circle patterns could be fabricated by He-Cd laser beam irradiation.6)Selective Coloration of Photosensitive ZrO_2 Gel Films : A selective coloration process has been newly developed utilizing photosensitive gel films. The dye-containing SiO_2 gel film on the unirradiated part of the ZrO_2 gel film remained, while that on the irradiated part was removed upon rinsing.7)Optical Absorption and Electronic State of Chemically Modified Ti-Alkoxides : Electronic state of titanium alkoxides stabilized with β-diketones which had various substituents was calculated by the DV-X α cluster method. The origin of the optical absorption and the mechanism of the decomposition reaction of alkoxides with irradiation of light were discussed. Less

1)采用化学改性法在ITO涂覆的基底上制备PZT薄膜:采用化学改性的方法在ITO涂覆的石英玻璃基片上制备PZT薄膜并研究其电性能。 2)含Eu^<3+>光敏凝胶薄膜的制备：含Eu^3+的光敏凝胶薄膜可以通过紫外照射和浸出来制备发光图案，并讨论了发光特性与使用基质之间的相关性。3)二维光栅的制作及其减反射效果：二维。二维（2D）表面浮雕光栅已通过双光束干涉方法在光敏凝胶薄膜上形成岛型二维光栅。石英玻璃基板大大降低了其表面在1.3至2.6毫米波长范围内的反射。4)甲基丙烯酸对化学改性凝胶薄膜光敏性的影响：已经发现，由Zr获得的光敏凝胶薄膜-用β-二酮和甲基丙烯酸改性的醇盐可以比不含甲基丙烯酸的凝胶膜更厚。5）制备羟基取代芳香酮制备光敏ZrO_2凝胶膜：为了开发新型光敏凝胶膜，以溶胶-凝胶法获得的羟基取代芳香酮化学修饰的丁醇锆制备了ZrO_2凝胶膜，该凝胶膜吸收光。对于凝胶膜，可以使用 He-Cd 激光束在 400 nm 左右制作线形和圆形图案。 6)光敏ZrO_2凝胶膜的选择性着色：利用光敏凝胶膜，新开发了一种选择性着色工艺，在ZrO_2凝胶膜的未照射部分保留了含染料的SiO_2凝胶膜，而在照射部分则保留了含染料的SiO_2凝胶膜。 7) 化学改性钛醇盐的光学吸收和电子态 : 钛醇盐的电子态采用DV-X α簇法计算了具有不同取代基的β-二酮的光吸收起源以及醇盐在光照射下的分解反应机理。