Development of a Synthesis Method for Tailored-Particles using the Coulomb Crystal Formation Process in Reactive Plasmas

利用反应等离子体中的库仑晶体形成过程开发定制颗粒的合成方法

基本信息

批准号：
07558065
负责人：
TACHIBANA Kunihide
金额：
$ 4.61万
依托单位：
KYOTO UNIVERSITY
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (B)
财政年份：
1995
资助国家：
日本
起止时间：
1995 至 1996
项目状态：
已结题

项目摘要

A series of study for establishing a method to synthesize tailored particles and collect them efficiently has been carried out by utilizing the phenomenon of Coulomb solidification of negatively charged particles in a plasma. Firstly, for the study of the production and growth processes of particles, the source hydrocarbon gases, the operating pressure, and the RF input power have been systematically changed. The charged density on a particle and the force between the particles have been estimated from the measured plasma parameters by microwave interferometer etc. The number density and the growth rate of trapped particles have also been monitored by the Mie-scattering ellipsometry (MSE) technique which has been developed by ourselves. From the video monitoring, the alignment of randomly distributed particles into a body centered cubic structure, and then into a closely packed hexagonal lattice structure has been observed. Based on these data the solidification condition has been argued using the estimated Coulomb coupling parameter.The particles grown under such a condition have been proved to be almost perfectly spherical and the size dispersion is very small by the MSE analysis, which is consistent with the SEM observation. The synthesis of tailored particles with layred structure is being studied e.g.by switching the source gas from methane to silane as well as the method of the theoretical formulation of the MSR data for particles with the layred structure.

利用等离子体中带负电粒子的库仑凝固现象，进行了一系列研究，建立合成定制粒子并有效收集它们的方法。首先，为了研究颗粒的产生和生长过程，源碳氢化合物气体、操作压力和射频输入功率都被系统地改变。通过微波干涉仪等测量等离子体参数，可以估计颗粒上的电荷密度和颗粒之间的力。还可以通过米氏散射椭圆光度术（MSE）技术监测捕获颗粒的数量密度和生长速率，该技术是我们自己开发的。从视频监控中，观察到随机分布的粒子排列成体心立方结构，然后排列成紧密堆积的六方晶格结构。基于这些数据，使用估计的库仑耦合参数论证了凝固条件。通过MSE分析证明，在这种条件下生长的颗粒几乎是完美的球形，并且尺寸分散非常小，这与SEM一致观察。目前正在研究具有层状结构的定制颗粒的合成，例如通过将源气体从甲烷切换为硅烷，以及具有层状结构的颗粒的MSR数据的理论公式化方法。