Development of a Synthesis Method for Tailored-Particles using the Coulomb Crystal Formation Process in Reactive Plasmas

利用反应等离子体中的库仑晶体形成过程开发定制颗粒的合成方法

基本信息

批准号：
07558065
负责人：
TACHIBANA Kunihide
金额：
$ 4.61万
依托单位：
KYOTO UNIVERSITY
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (B)
财政年份：
1995
资助国家：
日本
起止时间：
1995 至 1996
项目状态：
已结题

项目摘要

A series of study for establishing a method to synthesize tailored particles and collect them efficiently has been carried out by utilizing the phenomenon of Coulomb solidification of negatively charged particles in a plasma. Firstly, for the study of the production and growth processes of particles, the source hydrocarbon gases, the operating pressure, and the RF input power have been systematically changed. The charged density on a particle and the force between the particles have been estimated from the measured plasma parameters by microwave interferometer etc. The number density and the growth rate of trapped particles have also been monitored by the Mie-scattering ellipsometry (MSE) technique which has been developed by ourselves. From the video monitoring, the alignment of randomly distributed particles into a body centered cubic structure, and then into a closely packed hexagonal lattice structure has been observed. Based on these data the solidification condition has been argued using the estimated Coulomb coupling parameter.The particles grown under such a condition have been proved to be almost perfectly spherical and the size dispersion is very small by the MSE analysis, which is consistent with the SEM observation. The synthesis of tailored particles with layred structure is being studied e.g.by switching the source gas from methane to silane as well as the method of the theoretical formulation of the MSR data for particles with the layred structure.

一系列用于建立合成定制颗粒并有效收集它们的方法的研究是通过利用等离子体中带负电荷颗粒的库仑固化现象进行的。首先，为了研究颗粒的生产和生长过程，源碳氢化合物气体，工作压力和RF输入功率已被系统地改变。通过微波干涉仪等从测得的等离子体参数估算了粒子上的电荷密度以及颗粒之间的力。数量密度密度和捕获颗粒的生长速率也通过MIE散射椭圆（MSE）技术进行了监测。从视频监测中，已经观察到将随机分布的颗粒对齐到人体中心的立方结构中，然后观察到紧密填充的六角形晶格结构。基于这些数据，使用估计的库仑耦合参数进行了凝固条件。在这种情况下生长的颗粒已被证明几乎完全是球形的，并且通过MSE分析，尺寸分散体非常小，这与半观测一致。正在研究量身定制的颗粒与铺设结构的合成，例如通过将源气体从甲烷切换到硅烷以及具有铺设结构的颗粒的MSR数据的理论配方方法。