Functional Design of Semiconductin Thin Films Prepared by Modulation Sputtering Method and Its Application to Chemical Sensor for Odor and Taste

调制溅射法制备半导体薄膜的功能设计及其在气味和味道化学传感器中的应用

• 批准号: 09450041
• 负责人: NANTO Hidehito
• 金额: $ 6.59万
• 依托单位: Kanazawa Institute of Technology
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 1997
• 资助国家: 日本
• 起止时间: 1997 至 1999
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-09450041/
• 关键词: Intelligent sensor; Sputtering method; Thin films; Chemical sensor; Gas sensor; Oxide semiconductors; インテリジェント センサ

In order to develop an intelligent chemical sensor for odor and taste, we prepared semiconducting thin films and polymer films using modulation sputtering method, evaporation method, dipping method, spin coated method and plasma-polymerization method. Using these functional thin films, we prepared the chemical sensors such as the odor and taste. The following results were obtained ;It was found that the gas sensors using ZnO and ZnO-SiOィイD22ィエD2 thin film are useful for freshness detection of beverages and fishes.(1) It was found that the modulation magnetron sputtering method is useful for preparation of the semiconducting thin films as the molecular recognition film for the chemical sensors which can detect the "kansi".(2) We developed the method for the functional design of the gas sensor using polymer-film coated quartz resonator for environmental monitoring.(3) It was found that the taste sensor utilizing surface plasmon resonance(SPR) is useful for monitoring of the fermentation process of Japanese sake.

为了开发一种用于气味和味道的智能化学传感器，我们使用调制溅射方法，蒸发方法，浸入方法，自旋涂层方法和等离子聚合方法制备了半导体薄膜和聚合物膜。使用这些功能性薄膜，我们准备了化学传感器，例如气味和味道。获得了以下结果；发现使用ZnO和ZnO-SIOI D22薄膜的气体传感器可用于新鲜检测血液和鱼类。（1）发现调节磁性溅射方法可用于制备半导体薄膜的分子识别膜，作为分子识别膜，用于使用“ kansi”（kansi kansi faction the kansi faction the kansi faction the kansi faction the kansi faction faction the kansi faction faction faction nestion factect''（2）。 （3）发现，味觉传感器利用表面塑料共振（SPR）可用于监测日本清酒的发酵过程有用。

项目成果

H. Nanto et al: "Novel Gas Sensor Using Polymer-film-coated Quartz Resonator for Environmental Sensing"Materials Science and Engineering C. (印刷中). (2000)

H. Nanto 等人：“使用聚合物薄膜涂层石英谐振器进行环境传感的新型气体传感器”材料科学与工程 C.（出版中）。

H.Nanto, E.Kusano, A.Kinbara et al.: "Smart Chemical Sensor Using ZnO Semiconducting Thin Films for Freshness Detection of Food and Beverages" Proceedings of SPIE. 3328(印刷中). (1998)

H.Nanto、E.Kusano、A.Kinbara 等人：“使用 ZnO 半导体薄膜进行食品和饮料新鲜度检测的智能化学传感器”SPIE 会议记录 3328（出版中）。

H.Nanto et al.: "Identification of Harmful Gases Using QCM Gas Sensors in Conjunction with Principal Component Analysis"Proceedings of the 3rd International Conference on Engineering Design and Automation. 313-320 (1999)

H.Nanto 等人：“使用 QCM 气体传感器结合主成分分析识别有害气体”第三届工程设计与自动化国际会议论文集。

近藤浩一, 南戸秀仁 他: "合成樹脂膜を塗布した水晶振動子式ニオイセンサによる酒の種類判別" 電気学会論文誌E. 117E・9. 443-448 (1997)

Koichi Kondo、Hidehito Minamito 等人：“使用涂有合成树脂膜的石英晶体气味传感器来区分酒的类型”IEEJ Transactions E. 117E·9 (1997)。

H.Nanto et.al.: "Novel Gas Senson Using Polymer-film-coated Quantz Resonation for Envinonmental Sensing"Materials Science and Engineering C. 印刷中 (2000)

H.Nanto 等人：“Novel Gas Senson using Polymer-film-coated Quantz Resonation for Environmental Sensing”Materials Science and Engineering C. 出版 (2000)