Functional Design of Plasma-Polymerized Organic Thin Films and Its Application to an Electronic Nose

等离子体聚合有机薄膜的功能设计及其在电子鼻中的应用

基本信息

批准号：
12450039
负责人：
NANTO Hidehito
金额：
$ 6.46万
依托单位：
Kanazawa Institute of Technology
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (B)
财政年份：
2000
资助国家：
日本
起止时间：
2000 至 2002
项目状态：
已结题

项目摘要

In order to develop a novel artificial electronic nose (e-NOSE) system, first of all, we tried to do the functional design of chemical sensors such as quartz crystal microbalance (QCM) sensor, surface plasmon resonance (SPR) sensor and metal oxide semiconductor (MOS) sensor. Then, we also tried to prepare such chemical sensors based on the thin film fabrication technologies of organic and inorganic materials using plasma, which can use as sensing membrane of e-NOSE. Furthermore, we examined the application of fabricated chemical sensors. The following results are obtained :(1) It was found that the QCM odor sensor response for various gases strongly depended on the functional group of molecular recognition membrane. This is very important to prepare the QCM odor sensor with excellent selectivity.(2) We developed a unique fabrication technique using plasma chemical vapor deposition which can polymerize the organic thin film as molecular recognition membrane for QCM and SPR chemical sensors.(3) We developed a novel SPR odor sensor with molecular recognition membrane, which can use as one of useful sensor for e-Nose system.(4) It was found that the magnetron sputtering technique is very useful for MOS thin film gas sensors having high sensitivity for many gases and for integration of MOS gas sensor array.(5) It was found that quality of Japanese sake and vinegar can be estimated using developed QCM, SPR and MOS chemical sensors.In order to develop intelligent e-NOSE system which can characterize the chemical component of gas mixture and many kinds of smell we are now working on QCM, SPR and MOS sensor in conjunction with pattern recognition analysis.

首先，为了开发一种新型的人造电子鼻子（E-NOSE）系统，我们试图对化学传感器（例如石英晶体微量平衡（QCM）传感器），表面等离子体谐振（SPR）传感器（SPR）传感器和金属氧化物氧化物半加仑器（MOS）传感器进行化学传感器的功能设计。然后，我们还尝试使用血浆来制备基于有机和无机材料的薄膜制造技术，它们可以用作电子鼻子的传感膜。此外，我们检查了制造的化学传感器的应用。获得以下结果：（1）发现各种气体的QCM气味传感器响应强烈取决于分子识别膜的功能群。这对于以极好的选择性准备QCM气味传感器非常重要。（2）我们使用血浆化学蒸气沉积开发了一种独特的制造技术，可以将有机薄膜作为QCM和SPR化学传感器的分子识别膜聚合。 sputtering technique is very useful for MOS thin film gas sensors having high sensitivity for many gases and for integration of MOS gas sensor array.(5) It was found that quality of Japanese sake and vinegar can be estimated using developed QCM, SPR and MOS chemical sensors.In order to develop intelligent e-NOSE system which can characterize the chemical component of gas mixture and many kinds of smell we are now working on QCM, SPR and MOS sensor in conjunction with pattern识别分析。