CAREER: Thermally Actuated Nanomechanical Resonators and Self-Sustained Oscillators

职业：热驱动纳米机械谐振器和自持振荡器

• 批准号: 1314259
• 负责人: Siavash Pourkamali Anaraki
• 金额: $ 26.11万
• 依托单位: University of Texas at Dallas
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2012
• 资助国家: 美国
• 起止时间: 2012-11-19 至 2017-02-28
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1314259&HistoricalAwards=false
• 关键词: CAREER; Thermally; Actuated; Nanomechanical; Resonators

Objective: The objective of this project is to develop an integrated research and educational program on high frequency thermally actuated nano-electromechanical resonant devices and systems. This includes experimental demonstration and characterization of VHF and UHF thermal-piezoresistive resonators and self-sustained oscillators and developing solutions to major technological barriers such as nanoscale batch fabrication, and temperature and process compensation of such devices.Intellectual Merit: Micro/nanomechanical resonant devices hold the promise of unprecedented opportunities in sensory and electronic frequency referencing/filtering applications. Almost all the existing research on high frequency electromechanical resonators has been focused on piezoelectric and electrostatic transduction mechanisms. Thermal actuation, despite having several advantages, has generally been considered a slow mechanism only suitable for low-frequency applications. However, recent theoretical analysis and preliminary results have demonstrated not only the viability, but also superiority and uniqueness of thermal actuation for high frequency applications. Broader Impact: At the fundamental level this effort could open-up a number of new unexplored research avenues in nanoscience and technology. At the practical level, the developed technologies can provide new opportunities in wireless communications and sensory applications.This project will contribute to training of the next generation of M/NEMS experts by involving and educating graduate and undergraduate researchers. Major educational activities that will be integrated along with the research activities include graduate/undergraduate lab module developments, K-12 outreach through nano boot-camps and teacher workshops, and dissemination of results to the technical community and general public. Special efforts will be undertaken to encourage participation of students from underrepresented groups.

目的：该项目的目的是针对高频热驱动的纳米机电谐振设备和系统制定一项综合研究和教育计划。这包括对VHF和UHF热 - 齐索主义共振器以及自我维持的振荡器的实验演示和表征，并为纳米级批处理等主要技术障碍以及此类设备的温度和过程补偿开发解决方案。智力优点：微型/纳米机电的频率/纳米机器循环设备的频率频繁的频率和无频率的应用程序。关于高频机电谐振器的几乎所有现有研究都集中在压电和静电转导机制上。尽管有几个优势，但热驱动通常被认为是一种仅适用于低频应用的缓慢机制。但是，最近的理论分析和初步结果不仅证明了对高频应用的可行性，而且还表明了热驱动的优势和独特性。更广泛的影响：在基本水平上，这项工作可以为纳米科学和技术中的许多新的未开发的研究途径开放。在实用层面上，开发的技术可以在无线通信和感官应用方面提供新的机会。该项目将通过参与和教育研究生和本科研究人员，为下一代M/NEMS专家培训。将与研究活动一起整合的主要教育活动包括研究生/本科实验室模块发展，通过纳米靴子和教师研讨会的K-12宣传以及向技术社区和公众传播结果。将采取特殊努力，以鼓励来自代表性不足的团体的学生参与。