Development of a Hybrid Nano-Electro-Mechanical Sensor Technology for Nanoscale Aerosol Mass and Momemtumprobing

用于纳米级气溶胶质量和动量探测的混合纳米机电传感器技术的开发

• 批准号: 0800961
• 负责人: Siavash Pourkamali Anaraki
• 金额: $ 24.03万
• 依托单位: University of Denver
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2008
• 资助国家: 美国
• 起止时间: 2008-08-01 至 2012-07-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0800961&HistoricalAwards=false
• 关键词: Development; Hybrid; Nano; Electro; Mechanical

The objective of this proposal is to develop Micro/Nano-Electro-Mechanical (MEMS/NEMS) resonant sensor arrays enabling measurement of mass and size of individual nanoscale aerosol particles. The sensors will be tested in the laboratory with monodisperse aerosol under conditions similar to those what will occur in the instruments for which they are designed. Intellectual Merit: The proposed silicon-based resonant sensors are extremely mass sensitive due to their small size and high quality factors. The resonance frequencies of the devices change as they are loaded with aerosol particles. On the other hand, the deflection of the elastic structures is used to measure the kinetic energy of particles striking the resonant sensors. Combining the mass and energy measurements for individual particles permits the collision velocity to be determined which leads to the determination of particle size in situations where the velocity is size dependent.Broader Impact: This project is expected to lead to an active and comprehensive research program that fuels several under-development undergraduate and graduate level courses on micro/nano-electromechanical systems and combines them with extensive laboratory experiments and demos. It also allows the PIs to actively contribute in high school outreach programs conducted by the University of Denver as well as employ and educate several undergraduate and graduate students (preferably from underrepresented minorities) to participate in the research activities.

该提案的目的是开发微/纳米电力机械（MEMS/NEMS）谐振传感器阵列，以测量质量和单个纳米级气溶胶颗粒的质量和大小。传感器将在实验室中用单分散气溶胶在类似于其设计仪器中发生的情况下进行测试。智力优点：拟议的基于硅的共振传感器由于其尺寸小和高质量的因素而非常敏感。设备的共振频率在装有气溶胶颗粒时会发生变化。另一方面，弹性结构的挠度用于测量触动谐振传感器的颗粒的动能。 Combining the mass and energy measurements for individual particles permits the collision velocity to be determined which leads to the determination of particle size in situations where the velocity is size dependent.Broader Impact: This project is expected to lead to an active and comprehensive research program that fuels several under-development undergraduate and graduate level courses on micro/nano-electromechanical systems and combines them with extensive laboratory experiments and演示。它还允许PI在丹佛大学开展的高中外展计划中积极贡献，并雇用并教育几位本科生和研究生（最好来自代表性不足的少数群体）参加研究活动。