SGER: DESIGN AND OPTIMIZATION OF HIGH FREQUENCY SILICON CAPACITIVE RESONATORS FOR HIGH-Q OPERATION IN LIQUID MEDIA

SGER：用于液体介质中高 Q 操作的高频硅电容谐振器的设计和优化

• 批准号: 0839951
• 负责人: Siavash Pourkamali Anaraki
• 金额: --
• 依托单位: University of Denver
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2008
• 资助国家: 美国
• 起止时间: 2008-08-01 至 2010-01-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0839951&HistoricalAwards=false
• 关键词: SGER; DESIGN; OPTIMIZATION; FREQUENCY; SILICON

DESIGN AND OPTIMIZATION OF HIGH FREQUENCY SILICON CAPACITIVERESONATORS FOR HIGH-Q OPERATION IN LIQUID MEDIAABSTRACT1. ObjectivesThis proposal is aimed at the design, fabrication, and characterization of bulk-mode capacitivesilicon resonators capable of high-Q operation in liquid for high-resolution label-free biochemicaldetection and analysis. The goal is to demonstrate quality factors as high as 1000 in DI water forresonators in the 10-200MHz frequency range.2. Intellectual Merit:Despite recent developments in the silicon resonator technologies and speculations on thesuitability of such devices as high-precision mass sensors, no viable design or architecture forpractical sensory applications has been demonstrated for such devices. In particular, operation ofcapacitive micro-resonators in liquid with an acceptably high quality factor remains an openproblem. This effort will develop and demonstrate new design concepts and fabricationapproaches for minimization of viscous damping caused by the surrounding liquid. The proposedpartially encapsulated resonators will be designed, fabricated and characterized in aqueous liquidmedia.3. Broader ImpactSuccessful development of the proposed resonators will pave the way towards implementation ofhighly sensitive label-free biochemical sensor arrays with numerous applications in biology,medicine and health sciences.The expected outcomes of the proposed activities will fuel the PI?s ongoing lecture and lab coursedevelopment activities under the NSF NUE grant. The PI will have research assistantshipopenings for undergraduate students under this project. The financial support for theundergraduate students will be provided by the University of Denver through the Partners inScholarship (PINS) program. In selection of the undergraduate research assistants priority will begiven to students from the minority and under-represented groups

高频硅电容剂的设计和优化用于液体MediaAbsTract1中的高Q操作。 Objectivesthis提案针对能够在液体中高Q运行的散装模式谐振器的设计，制造和表征，用于高分辨率无标记的无标记生化探测和分析。目的是在10-200MHz频率范围内证明在DI水有汇原的质量因素高达1000。2。智力优点：尽管硅谐振技术的最新发展和对高精度质量传感器等设备的居民的猜测，但对于此类设备，尚无可行的设计或架构可行的设计或架构。尤其是，具有可接受的高质量因子的量子能微谐振器的运行仍然是一个敞开的问题。这项工作将发展并展示新的设计概念和制造方法，以最大程度地减少周围液体引起的粘性阻尼。将在水性液体水性中设计，制造和表征所提出的构造的谐振器3。提出的谐振器的更广泛的影响成功的开发将为实施高度敏感的无标签的生化传感器阵列铺平道路，并在生物学，医学和健康科学中有许多应用。拟议活动的预期成果会为PI的预期结果推动了PI的持续讲座和实验室培训和实验室培训型活动。 PI将在该项目下为本科生提供研究助理。丹佛大学将通过合作伙伴Inscholarship（PIN）计划为全科研究生提供财政支持。在选择本科研究助理时，优先级将使来自少数群体和代表性不足的学生开始