Design of high precision MEMS gyroscope compatible with wafer level packaging process (Micralyne "MicraSilQ")

兼容晶圆级封装工艺的高精度MEMS陀螺仪设计（Micralyne“MicraSilQ”）

• 批准号: 531949-2018
• 负责人: Ahamed, Mohammed
• 金额: $ 1.82万
• 依托单位: University of Windsor
• 依托单位国家: 加拿大
• 项目类别: Engage Grants Program
• 财政年份: 2018
• 资助国家: 加拿大
• 起止时间: 2018-01-01 至 2019-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=643551
• 关键词: Design; precision; MEMS; gyroscope; compatible

A gyroscope is a sensor that can measure the rate of rotation of an object. MEMS (Microelectromechanical**Systems) based gyroscopes are miniature sensors that are fabricated using semiconductor based**microfabrication. MEMS gyroscopes offer a wide range of advantages, including smaller size, lighter weight,**lower cost, and lower excitation power. MEMS gyroscopes use a small oscillating mass as the core sensing**element that responses to angular motion. The oscillating mass needs to be vibrating under vacuum to**maximize its sensitivity and minimize drift. The vacuum isolation is necessary to: (i) minimize vibration**energy loss due to air damping and (ii) maintain integrity of the fragile mechanical component from dust or**contamination. Various vacuum packaging methods are available including sealing individual chip by chip**basis and wafer-level sealing. Individual device per device vacuum packaging is costly and fails to provide**mass manufacturing therefore wafer-scale packaging is preferred. Recently, Micralyne developed a wafer-scale**vacuum packaging method (MicraSilQTM) platform that offers an all-in-one solution integrating wafer-level**fabrication and hermetic vacuum packaging. It is a proven, cost-effective solution for applications requiring**high accuracy, low-noise mechanical sensing for acceleration and shock measurements. Using this process,**Micralyne showed high performance accelerometers. However, this platform is also ideal for MEMS**gyroscopes. Micralyne is interested to develop a gyroscope design compatible with MicraSilQ. Currently, there**is no MEMS gyroscope design approach available that can be suitable with MicraSilQ for high precision**gyroscopes. This Engage grant will develop a MEMS gyroscope design for MicraSilQ platform by using**analytical and numerical modelling techniques. There is a huge demand for high precision MEMS gyroscopes**in aerospace, consumer electronics, biomedical, defense, and autonomous applications. This NSERC Engage**will be the first collaborative effort between Micralyne Inc. and Dr. Jalal Ahamed of University of Windsor to**develop MEMS gyroscopes compatible with the wafer-scale vacuum packaged MicraSilQ platform.

陀螺仪是一种可以测量物体旋转速度的传感器。基于 MEMS（微机电**系统）的陀螺仪是使用基于半导体**微加工技术制造的微型传感器。 MEMS 陀螺仪具有广泛的优势，包括尺寸更小、重量更轻、**成本更低以及激励功率更低。 MEMS 陀螺仪使用小型振荡质量作为响应角运动的核心传感元件。振荡质量需要在真空下振动以**最大化其灵敏度并最小化漂移。真空隔离对于以下目的是必要的：(i) 最大限度地减少由于空气阻尼造成的振动**能量损失，以及 (ii) 保持易碎机械部件的完整性，免受灰尘或**污染。有多种真空封装方法可供选择，包括逐个芯片密封和晶圆级密封。每个器件的单个器件真空封装成本高昂，并且无法提供大规模制造，因此晶圆级封装是首选。最近，Micralyne开发了一种晶圆级**真空封装方法（MicraSilQTM）平台，提供集成晶圆级**制造和气密真空封装的一体化解决方案。它是一种经过验证的、经济高效的解决方案，适用于需要**高精度、低噪声机械传感来进行加速度和冲击测量的应用。利用这一过程，**Micralyne 展示了高性能加速度计。然而，该平台也非常适合 MEMS** 陀螺仪。 Micralyne 有兴趣开发与 MicraSilQ 兼容的陀螺仪设计。目前，还没有可用的 MEMS 陀螺仪设计方法适合 MicraSilQ 实现高精度**陀螺仪。这项 Engage 赠款将使用**分析和数值建模技术为 MicraSilQ 平台开发 MEMS 陀螺仪设计。航空航天、消费电子、生物医学、国防和自主应用对高精度 MEMS 陀螺仪有着巨大的需求。此次 NSERC Engage** 将是 Micralyne Inc. 和温莎大学 Jalal Ahamed 博士之间的首次合作，以**开发与晶圆级真空封装 MicraSilQ 平台兼容的 MEMS 陀螺仪。