High Sensitivity MEMS based Resonant Gyroscopes

基于 MEMS 的高灵敏度谐振陀螺仪

• 批准号: 513806-2017
• 负责人: Ahamed, Mohammed
• 金额: $ 1.78万
• 依托单位: University of Windsor
• 依托单位国家: 加拿大
• 项目类别: Engage Grants Program
• 财政年份: 2017
• 资助国家: 加拿大
• 起止时间: 2017-01-01 至 2018-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=639989
• 关键词: Sensitivity; MEMS; based; Resonant; Gyroscopes

MEMS (Microelectromechanical Systems) based resonating inertial sensing elements such as gyroscopes arewidely used in many consumer, industrial, automotive and biomedical applications. A resonator is anoscillating mass that acts as the sensing element in vibratory gyroscopes. The resonator needs to be inoscillation during device operation. Energy lost due to damping (internal/external) can degrade resonator'soscillation thus performance. Minimizing damping during oscillation is therefore crucial for achieving highersensitivity. Different types of energy losses influence damping including anchor loss, squeeze-film effect, andThermo-Elastic Damping (TED). In particular, the current problem relates to design considerations to reducedamping, and specifically, TED. One performance parameter that quantifies resonators damping is calledQuality factor (Q), which provides a measure of the efficiency of a resonator in retaining energy duringoscillations. Inertial sensors used in high performance motion sensing applications require maximizing its Q byminimizing energy loss. A firm understanding of the Q loss mechanisms is therefore key for maximizing Q(reaching 1 Million). Recently, Nxtsens Microsystems has developed prototypes with Q on the order of 100k.Nxtsens is now aiming for high sensitivity devices that require Q reaching 1 Million for high performanceresonant gyroscopes. In order to design such devices different loss mechanisms on their design have to beanalyzed and optimized. This NSERC Engage project will be the first collaborative effort between Nxtsens andDr. Jalal Ahamed of the University of Windsor to develop optimization methods that will systematicallyprovide improved geometries for resonant gyroscopes with high Q. The approach will provide Nxtsens withvaluable knowledge and feedback showing a path to modify their design to reach high end applications. Itwould also provide greater scientific insights to the academic and industry community by showing relationshipsbetween design and material parameters that effect performance in resonant gyroscopes. It would facilitatefurther development of MEMS based high precision resonant gyroscopes.

MEMS（微电力系统）基于共鸣的惯性感应元素（例如陀螺仪）在许多消费者，工业，汽车和生物医学应用中都使用。谐振器是振动陀螺仪中的传感元件的响应质量。在设备操作期间，谐振器需要进行互玻璃。由于阻尼（内部/外部）损失的能量会降低谐振器的振荡，从而表现。因此，在振荡过程中最大程度地减少阻尼对于达到高敏性至关重要。不同类型的能量损失会影响阻尼，包括锚固损失，挤压膜效应和热弹性阻尼（TED）。特别是，当前的问题与设计注意事项有关，涉及减少水平，尤其是TED。量化谐振器阻尼的一个性能参数称为质量因子（Q），它提供了谐振器在保留能量期间的能量效率的度量。在高性能运动传感应用中使用的惯性传感器需要最大限度地使其Q临时能量损失。因此，对Q损失机制的坚定了解是最大化Q（达到100万）的关键。最近，NXTSENS MICEROSYSTEMS开发了原型，其Q在100K的顺序上。NXTSENS现在是针对高灵敏度设备的高灵敏度设备，这些设备需要Q达到100万次，以达到100万次高性能的陀螺仪。为了设计此类设备，其设计上的不同损耗机制必须进行味道和优化。这个NSERC参与项目将是NXTSENS和DR之间的首次合作。贾拉尔（Jalal）对温莎大学（University of Windsor）开发优化方法，该方法将系统地提高具有高Q的谐振陀螺仪的几何形状。该方法将为NXTSENS提供可观的知识和反馈，以显示修改其设计以达到高端应用的途径。它还可以通过在设计和物质参数之间展示影响共鸣陀螺仪的性能之间的关系，从而为学术和行业社区提供更多的科学见解。它将促进基于MEMS的高精度谐振陀螺仪的发展。