Development of environmentally robust and thermally stable Microelectromechanical Systems (MEMS) based accelerometer for automotive applications

开发适用于汽车应用的环境稳定且热稳定的微机电系统 (MEMS) 加速度计

• 批准号: 566730-2021
• 负责人: Ahamed, Mohammed
• 金额: $ 2.17万
• 依托单位: University of Windsor
• 依托单位国家: 加拿大
• 项目类别: Alliance Grants
• 财政年份: 2021
• 资助国家: 加拿大
• 起止时间: 2021-01-01 至 2022-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=722936
• 关键词: Development; environmentally; robust; thermally; stable

The goal of this partnership is to develop a cost effective, stable and shock immune micro accelerometers for automotive applications. Microelectromechanical systems (MEMS) based accelerometers are small sensors that can detect small inertial movements. They are widely used in automotive such as for stability control, air-bag deployment and crash detection. Automotive applications require accelerometers to work in quite harsh environment involving vibration, shock, temperature, and thermal cycling. Despite the surge in low-cost MEMS accelerometers, they still suffer from low temperature stability, noise and shock immunity. With the ever-increasing thrust for autonomy and electrification of vehicles the demand for precision, robust but cost-effective sensors is growing. MEMS accelerometers use a resonating silicon mass as the sensing element. The major issue with the silicon-based MEMS resonator is its inherent low thermal stability. Currently, there is no fixed design approach available to enhance the stability and shock immunity in cost-effective MEMS accelerometers. To overcome the above-mentioned limitations, this research aims to take a ground-breaking approach by utilizing robust mechanical materials combined with novel sensor design to achieve thermal and shock stability as well as lower the cost. This NSERC Alliance grant will be a first-time collaboration between the partner industries and the University of Windsor to develop a robust MEMS based accelerometer for temperature and shock stability. It is also expected to create a ripple effect in other similar automotive inertial sensors including gyroscopes and inertial measurement units. There will be major benefits to Canadians as it will directly assist the innovation of much-needed high-performance and cost-effective micro-sensor systems in the emerging area of autonomous navigation, and it is expected to increase Canada's competitiveness in this area. It will put Canada in a leadership role in the global arena in the high precision and stable acceleration sensor development.

该合作伙伴关系的目的是为汽车应用开发一种具有成本效益，稳定和休克免疫的微加速度计。基于微力学系统（MEMS）的加速度计是可以检测小惯性运动的小传感器。它们被广泛用于汽车中，例如用于稳定性控制，空中式部署和碰撞检测。汽车应用需要加速度计在涉及振动，冲击，温度和热循环的非常严峻的环境中工作。尽管低成本的MEMS加速度计激增，但它们仍然患有低温稳定性，噪声和电击免疫力。随着对车辆的自治和电气化的不断增加的推力，对精确，强大但具有成本效益的传感器的需求正在增长。 MEMS加速度计使用共鸣的硅质量作为传感元件。基于硅的MEMS谐振器的主要问题是其固有的低热稳定性。当前，尚无固定设计方法可增强成本效益的MEMS加速度计的稳定性和冲击免疫力。为了克服上述局限性，本研究的目的是通过利用强大的机械材料与新型传感器设计相结合，以实现热稳定性并降低成本，以采用开创性的方法。这项NSERC联盟赠款将是合作伙伴行业与温莎大学之间的首次合作，以开发出强大的基于MEMS的加速度计，以进行温度和冲击稳定。还可以预期，它将在其他类似的汽车惯性传感器（包括陀螺仪和惯性测量单元）中产生连锁反应。加拿大人将有重大好处，因为它将直接帮助在新兴导航领域中急需的高性能和具有成本效益的微传感器系统的创新，并有望提高加拿大在该领域的竞争力。这将使加拿大在全球舞台上发挥领导作用，在高精度和稳定的加速传感器开发中。