Nanomanufacturing Process and Applications Based on Dynamic Nano-Inscribing

基于动态纳米刻划的纳米制造工艺及应用

• 批准号: 1000425
• 负责人: L. Jay Guo
• 金额: $ 28万
• 依托单位: Regents of the University of Michigan - Ann Arbor
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2010
• 资助国家: 美国
• 起止时间: 2010-06-01 至 2013-10-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1000425&HistoricalAwards=false
• 关键词: Nanomanufacturing; Process; Applications; Based; Dynamic

The research objective of this project is to investigate new nanofabrication techniques. The increasing demands for nanoscale structures in photonics, lighting, solar cells and bio-industries have stimulated many emerging technologies for nanoscale patterning. However most of the techniques cannot offer sufficient throughput and present high cost for these large area applications. This project is to investigate new nanofabrication techniques for directly creating continuous micro- to nano- patterns in a variety of metal or polymer materials with feature size down to sub-50 nm. The first one is termed dynamic nano-inscribing performed at high speed at ambient environment or with a very brief heating time on the order of tens microseconds, which can minimize potential damage to thermo-sensitive materials. The second technique is based on a recent finding of generation of periodic structures from nano- to microscale on a thin metal film coated polymer layer when inscribed by a flat cleaved edge. The research will develop theoretical understanding of the effects and explore applications of these techniques in the area of optoelectronics and nanophotonics.These techniques will aim at an unprecedented speed for nanopatterning. This research will be enhanced by the integration of the education and outreach component which includes the creation of a multidisciplinary (materials science, mechanical engineering, optical science, electrical engineering) scientific learning environment for students at a variety of levels and from several underrepresented groups (women, African-Americans, etc); and incorporation of research results into a course on nanofabrication. Of particular importance is the potential for the proposed technology to have commercial impact in the future.

该项目的研究目的是研究新的纳米制作技术。 对光子学，照明，太阳能电池和生物工厂中纳米级结构的需求不断增加，这激发了许多用于纳米级图案的新兴技术。但是，大多数技术无法提供足够的吞吐量，并为这些大面积应用提供了高昂的成本。该项目旨在研究新的纳米制造技术，以直接在各种金属或聚合物材料中直接创建具有特征大小至50 nm的连续微型纳米图案。第一个被称为在环境环境下高速执行的动态纳米命令，或在数十个微秒的订单上以非常短的加热时间进行，这可以最大程度地减少对热敏感材料的潜在损害。第二种技术是基于最近发现在薄金属膜涂层聚合物层上从纳米到微观的周期性结构的发现，当时是用平坦的裂片边缘刻有的。这项研究将对效果的理论理解，并探索这些技术在光电和纳米光学领域的应用。这些技术将以前所未有的速度来实现纳米图案的速度。教育和外展成分的整合将得到增强这项研究，其中包括创建多个级别的学生以及从几个代表性不足的群体（妇女，非裔美国人等）为学生提供多学科（材料科学，机械工程，光学工程，电气工程）的科学学习环境；并将研究结果纳入有关纳米化的课程。尤其重要的是，拟议技术在将来产生商业影响的潜力。