Optimal Control of the Czochralski Crystallization Process

直拉结晶过程的优化控制

• 批准号: 9400775
• 负责人: Warren Seider
• 金额: $ 29万
• 依托单位: University of Pennsylvania
• 依托单位国家: 美国
• 项目类别: Continuing grant
• 财政年份: 1994
• 资助国家: 美国
• 起止时间: 1994-09-01 至 1998-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9400775&HistoricalAwards=false
• 关键词: Optimal; Control; Czochralski; Crystallization; Process

9400775 Seider The award is for better control of the Czochralski crystallization process so that larger diameter wafers of silicon and other compound semiconductors can be grown with fewer defects. The effort will concentrate on development of better reduced-order models which take into account resistances across boundary layers. Sensors will also be developed to measure temperatures at the crucible wall and to measure atomic oxygen concentrations in the crystal. Finally, model-predictive controllers will be developed to achieve better control of the crystal growth process. Experiments will be conducted at the site of the industrial partner to validate the researched refinements in modeling, sensor development, and controller development. Improved control of the Czochralski crystallization process is expected to lead to the ability to grow larger diameter crystals of silicon and other compound semiconductor materials with fewer defects, which would be of value to the semiconductor industry. Furthermore, the sensor developments are expected to result in better understanding of the crystal growth process. The reduced order model development work is expected to be of value in modeling a variety of materials processing applications involving melt processing for purposes of control.

9400775 SEIDER该奖项是为了更好地控制Czochralski结晶过程，因此可以将较大的硅和其他复合半导体的直径晶圆而产生较少的缺陷。 这项工作将集中在开发更好的降级模型上，这些模型考虑到跨边界层的电阻。 还将开发传感器以测量坩埚壁上的温度并测量晶体中的原子氧浓度。 最后，将开发模型预测的控制器，以更好地控制晶体生长过程。 实验将在工业合作伙伴的地点进行，以验证建模，传感器开发和控制器开发中研究的改进。 预计对Czochralski结晶过程的控制有望提高硅和其他复合半导体材料的较大直径晶体具有较少缺陷的能力，这对半导体行业具有价值。 此外，预期传感器的开发将更好地了解晶体生长过程。 预计减少的订单模型开发工作对于为控制目的建模涉及熔体处理的各种材料处理应用程序具有价值。