Development of MEMS (Microelectromechanical Systems) actuator and micromirror Technology

MEMS（微机电系统）执行器和微镜技术的开发

• 批准号: RGPIN-2017-06734
• 负责人: He, Siyuan
• 金额: $ 1.82万
• 依托单位: Ryerson University
• 依托单位国家: 加拿大
• 项目类别: Discovery Grants Program - Individual
• 财政年份: 2018
• 资助国家: 加拿大
• 起止时间: 2018-01-01 至 2019-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=653299
• 关键词: Development; MEMS; Microelectromechanical; Systems; actuator

MEMS actuators and micromirrors are characterized as small size and low cost, and have be widely used in automotive, biomedical, communication, display, and consumer electronics industries. The proposed research will focus on the development of novel MEMS actuators and micromirrors and their applications. The long term goal is to gain deeper understanding and generate new knowledge of MEMS actuators and micromirrors and their applications, which will be achieved through pursuing three objectives. In objective 1, an innovative MEMS surface micromachined actuator will be developed which will double the force/torque of that of the current design. A novel fabrication technology of bonding an SOI (Silicon on Insulator) layer to surface micromachined chip will be developed, by which the surface micromachined micromirror can have a high quality surface with high flatness, no releasing holes and an-stiction dimples. Combining the novel micro actuator and the SOI + PolyMUMPS bonding fabrication technology, a micromirror and a micromirror based automotive Head-up Display (HUD) will be developed, which will have much superior performance than the existing designs, i.e., 5 ~ 10X smaller and cheaper, and can significantly enhance driving safety and comfort. The proposal's objective 2 will investigate the FPCB (Flexible Printed Circuit Board) micromirror, which is a new field started by our group recently. The investigation will focus on the study of FPCB polyimide film's viscoelastic property caused effects and control methods of alleviating or overcoming the effects. In addition, a 2D FPCB micromirror will be developed to construct laser pattern pointer to greatly enhance the presentation laser pointers' performance. The objective 3 of the current proposal will develop a novel micromirror for endoscopic OCT (Optical Coherence Tomography) imaging system, which is highly desired to achieve in vivo and noninvasive inspection and diagnosis of internal luminal organs, or operate real-time image guided surgery. The novel micromirror will have wireless driven vertical scanning DOF (Degree of Freedom) and the second DOF driven by a tubular piezoelectric motor for full circumferential rotation. Thus it can overcome the limitation of the current OCT endoscope, i.e., not enough circumferential scanning, which is the main hurdle for OCT endoscope's wide clinic application.

MEMS执行器和微镜具有体积小、成本低的特点，已广泛应用于汽车、生物医学、通信、显示和消费电子行业。拟议的研究将重点关注新型 MEMS 执行器和微镜及其应用的开发。长期目标是加深对 MEMS 执行器和微镜及其应用的了解并产生新的知识，这将通过追求三个目标来实现。在目标 1 中，将开发一种创新的 MEMS 表面微机械致动器，该致动器将使当前设计的力/扭矩增加一倍。将开发一种将SOI（绝缘体上硅）层键合到表面微加工芯片的新型制造技术，通过该技术，表面微加工微镜可以获得高平整度、无释放孔和抗粘连凹坑的高质量表面。结合新型微致动器和SOI + PolyMUMPS键合制造技术，将开发出微镜和基于微镜的汽车平视显示器（HUD），其性能将比现有设计优越得多，即尺寸缩小5~10倍，尺寸缩小5~10倍。价格便宜，并且可以显着提高驾驶安全性和舒适性。该提案的目标2将研究FPCB（柔性印刷电路板）微镜，这是我们课题组最近启动的一个新领域。本次调查将重点研究FPCB聚酰亚胺薄膜的粘弹性所造成的影响以及减轻或克服该影响的控制方法。此外，还将开发2D FPCB微镜来构建激光图案笔，以大大提高演示激光笔的性能。当前提案的目标3将开发一种用于内窥镜OCT（光学相干断层扫描）成像系统的新型微镜，非常需要实现体内腔内器官的无创检查和诊断，或进行实时图像引导手术。这种新型微镜将具有无线驱动的垂直扫描自由度（DOF）和由管状压电电机驱动的第二自由度，用于全圆周旋转。从而克服了现有OCT内窥镜周向扫描不够的局限性，这是OCT内窥镜广泛临床应用的主要障碍。