Development of MEMS (Microelectromechanical Systems) actuator and micromirror Technology

MEMS（微机电系统）执行器和微镜技术的开发

• 批准号: RGPIN-2017-06734
• 负责人: He, Siyuan
• 金额: $ 1.82万
• 依托单位: Ryerson University
• 依托单位国家: 加拿大
• 项目类别: Discovery Grants Program - Individual
• 财政年份: 2018
• 资助国家: 加拿大
• 起止时间: 2018-01-01 至 2019-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=653299
• 关键词: Development; MEMS; Microelectromechanical; Systems; actuator

MEMS actuators and micromirrors are characterized as small size and low cost, and have be widely used in automotive, biomedical, communication, display, and consumer electronics industries. The proposed research will focus on the development of novel MEMS actuators and micromirrors and their applications. The long term goal is to gain deeper understanding and generate new knowledge of MEMS actuators and micromirrors and their applications, which will be achieved through pursuing three objectives. In objective 1, an innovative MEMS surface micromachined actuator will be developed which will double the force/torque of that of the current design. A novel fabrication technology of bonding an SOI (Silicon on Insulator) layer to surface micromachined chip will be developed, by which the surface micromachined micromirror can have a high quality surface with high flatness, no releasing holes and an-stiction dimples. Combining the novel micro actuator and the SOI + PolyMUMPS bonding fabrication technology, a micromirror and a micromirror based automotive Head-up Display (HUD) will be developed, which will have much superior performance than the existing designs, i.e., 5 ~ 10X smaller and cheaper, and can significantly enhance driving safety and comfort. The proposal's objective 2 will investigate the FPCB (Flexible Printed Circuit Board) micromirror, which is a new field started by our group recently. The investigation will focus on the study of FPCB polyimide film's viscoelastic property caused effects and control methods of alleviating or overcoming the effects. In addition, a 2D FPCB micromirror will be developed to construct laser pattern pointer to greatly enhance the presentation laser pointers' performance. The objective 3 of the current proposal will develop a novel micromirror for endoscopic OCT (Optical Coherence Tomography) imaging system, which is highly desired to achieve in vivo and noninvasive inspection and diagnosis of internal luminal organs, or operate real-time image guided surgery. The novel micromirror will have wireless driven vertical scanning DOF (Degree of Freedom) and the second DOF driven by a tubular piezoelectric motor for full circumferential rotation. Thus it can overcome the limitation of the current OCT endoscope, i.e., not enough circumferential scanning, which is the main hurdle for OCT endoscope's wide clinic application.

MEMS执行器和微龙头的特征是尺寸较小，成本较低，并且已广泛用于汽车，生物医学，通信，展示和消费电子行业。拟议的研究将着重于新型MEMS执行器和微龙的开发及其应用。长期目标是获得更深入的理解，并对MEMS执行器和微龙族及其应用产生新的知识，这将通过追求三个目标来实现。在目标1中，将开发一个创新的MEMS表面微机械执行器，这将使当前设计的力/扭矩增加一倍。将开发一种将SOI（硅在绝缘子上）结合到表面微机械芯片上的新型制造技术，通过该技术，表面微机械微机可以具有高质量的表面，具有高度平坦，没有释放的孔和固定的凹痕。将开发新型的微执行器和SOI + Polymumps结合制造技术，微龙和基于微龙的汽车头部显示（HUD）（HUD），这将比现有设计具有优于现有设计的性能，即高5〜10X，并且可以大大提高驾驶安全和舒适性。该提案的目标2将研究FPCB（灵活的印刷电路板）Micromirror，这是我们小组最近开始的一个新领域。该研究将集中于对FPCB聚酰亚胺膜的粘弹性的研究，从而导致减轻或克服效果的效果和控制方法。此外，还将开发2D FPCB微龙，以构建激光模式指针，以极大地增强演示文稿激光指针的性能。当前建议的目标3将开发出一种新型的微型摩擦剂，用于内窥镜OCT（光学相干断层扫描）成像系统，该系统非常需要在体内和无创检查和诊断内腔内脏器官或进行实时图像指导性手术的情况下实现和诊断。新型的微龙将具有无线驱动的垂直扫描DOF（自由度）和由管状压电电动机驱动的第二个DOF，以进行全面的旋转。因此，它可以克服当前OCT内窥镜的局限性，即没有足够的周向扫描，这是OCT内窥镜广泛诊所应用的主要障碍。