Development of Micormirror Laser Scanning Mechanism for Laser Marking/Engraving/Etching System

激光打标/雕刻/蚀刻系统微镜激光扫描机构的研制

• 批准号: 508887-2017
• 负责人: He, Siyuan
• 金额: $ 1.82万
• 依托单位: Ryerson University
• 依托单位国家: 加拿大
• 项目类别: Engage Grants Program
• 财政年份: 2017
• 资助国家: 加拿大
• 起止时间: 2017-01-01 至 2018-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=639984
• 关键词: Development; Micormirror; Laser; Scanning; Mechanism

Laser marking/engraving/etching (the term is represented by "laser marking" thereafter) uses a laser beamacross the surface of a material to alter the property (e.g., color), or remove the materials to a certain depththrough vaporization/melting, such as to form desired patterns. It has been widely used in fabrication andconsumer product industries. A laser marking system consists of the laser source (e.g., CO2 laser, fiber laser,Nd:YAG or Nd:YVO laser), the laser beam vector scanning mechanism and controlling software. The laserbeam scanning mechanism is traditionally comprised of two galvanometer mirrors or two servo/stepper motordriven mirrors. It also includes other components such as encoders, driving cards, heatsinks and a powersupplier. The total size is 3 ~ 4 liters. The cost is about USD 2500, which is ~ 50% of the total laser marking.Lumicision Inc. is a GTA company (located in Richmond Hill) and specializes in manufacturing lasermachining machines and providing laser marking service. After the company entered this market for a fewyears, they realized the traditional laser scanning mechanism in their laser marking machines is too bulky andtoo expensive. The company has been long looking for an alternative solution of much lower cost and smallersize to the traditional laser scanning mechanism in their laser marking machines.This application proposes a solution to address the above problem, i.e., using micromirrors to vector scan thelaser beam to replace the traditional laser scanning mechanism in the laser marking machine. The micromirrorhas much smaller/simpler structure and driving circuit than traditional galvanometer or servo/stepper motorsdriven mirrors because the micromirror's mass is very small, which requires every little power to drive withoutneeding any heatsink. The micromirror based laser beam scanning mechanism is about 0.05 liter or less, whichis ~ 50 times smaller than that of the traditional design. In addition, micromirrors are suitable for massfabrication, i.e., hundreds or thousands are fabricated on one wafer at the same time, which leads to very lowunit mirror price, e.g., 10s dollars. The cost including the micromirror and the driving/control circuit is one

激光标记/雕刻/蚀刻（此后用“激光标记”表示）使用激光束材料的表面来改变特性（例如颜色），或将材料删除到一定的深度蒸发/熔化中，例如所需的形式的模式。它已被广泛用于制造和消费者产品行业。激光标记系统由激光源（例如CO2 Laser，Fiber Laser，ND：YAG或ND：YVO LASER），激光束向量向量扫描机构和控制软件组成。传统上，Laserbeam扫描机构由两个电瓦计镜或两个伺服/步进式电动镜组成。它还包括其他组件，例如编码器，驾驶卡，散热器和功率。总尺寸为3〜4升。费用约为2500美元，占激光标记总数的约50％。LumicisionInc.是一家GTA公司（位于里士满山），专门从事制造Lasermachining机器并提供激光标记服务。在公司进入该市场以换几年后，他们意识到激光标记机中传统的激光扫描机制太笨重且昂贵。该公司长期以来一直在寻找一种较低的成本解决方案，并在其激光标记机中对传统的激光扫描机制进行较小的化合物。本申请提出了一种解决方案，以解决上述问题，即使用微级别用于矢量扫描Thelaser Beam来替换传统的激光扫描机制，以替换激光器标记机中的传统激光扫描机制。与传统的电流仪或伺服/步进电动机镜相比，Micromirrorhas小得多/更简单的结构和驾驶电路，因为Micromirror的质量非常小，这需要每种小动力才能驱动而无需任何供热链接。基于微粒的激光束扫描机构约为0.05升或更少，比传统设计小约50倍。此外，微rr剂适用于按摩，即同时在一个晶圆上制造数百或数千个，这导致非常低的镜面价格，例如10s美元。包括微龙和驾驶/控制电路在内的成本是一个