Development of Micormirror Laser Scanning Mechanism for Laser Marking/Engraving/Etching System

激光打标/雕刻/蚀刻系统微镜激光扫描机构的研制

• 批准号: 508887-2017
• 负责人: He, Siyuan
• 金额: $ 1.82万
• 依托单位: Ryerson University
• 依托单位国家: 加拿大
• 项目类别: Engage Grants Program
• 财政年份: 2017
• 资助国家: 加拿大
• 起止时间: 2017-01-01 至 2018-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=639984
• 关键词: Development; Micormirror; Laser; Scanning; Mechanism

Laser marking/engraving/etching (the term is represented by "laser marking" thereafter) uses a laser beamacross the surface of a material to alter the property (e.g., color), or remove the materials to a certain depththrough vaporization/melting, such as to form desired patterns. It has been widely used in fabrication andconsumer product industries. A laser marking system consists of the laser source (e.g., CO2 laser, fiber laser,Nd:YAG or Nd:YVO laser), the laser beam vector scanning mechanism and controlling software. The laserbeam scanning mechanism is traditionally comprised of two galvanometer mirrors or two servo/stepper motordriven mirrors. It also includes other components such as encoders, driving cards, heatsinks and a powersupplier. The total size is 3 ~ 4 liters. The cost is about USD 2500, which is ~ 50% of the total laser marking.Lumicision Inc. is a GTA company (located in Richmond Hill) and specializes in manufacturing lasermachining machines and providing laser marking service. After the company entered this market for a fewyears, they realized the traditional laser scanning mechanism in their laser marking machines is too bulky andtoo expensive. The company has been long looking for an alternative solution of much lower cost and smallersize to the traditional laser scanning mechanism in their laser marking machines.This application proposes a solution to address the above problem, i.e., using micromirrors to vector scan thelaser beam to replace the traditional laser scanning mechanism in the laser marking machine. The micromirrorhas much smaller/simpler structure and driving circuit than traditional galvanometer or servo/stepper motorsdriven mirrors because the micromirror's mass is very small, which requires every little power to drive withoutneeding any heatsink. The micromirror based laser beam scanning mechanism is about 0.05 liter or less, whichis ~ 50 times smaller than that of the traditional design. In addition, micromirrors are suitable for massfabrication, i.e., hundreds or thousands are fabricated on one wafer at the same time, which leads to very lowunit mirror price, e.g., 10s dollars. The cost including the micromirror and the driving/control circuit is one

激光打标/雕刻/蚀刻（该术语以后用“激光打标”表示）利用激光束穿过材料表面来改变材料的性质（例如颜色），或通过汽化/熔化将材料去除到一定深度，例如以形成所需的图案。它已广泛应用于制造和消费品行业。激光打标系统由激光源（如CO2激光器、光纤激光器、Nd:YAG或Nd:YVO激光器）、激光束矢量扫描机构和控制软件组成。激光束扫描机构传统上由两个检流计镜或两个伺服/步进电机驱动镜组成。它还包括其他组件，如编码器、驱动卡、散热器和电源。总容量为3~4升。成本约为2500美元，约占激光打标总量的50%。Lumicision Inc.是一家GTA公司（位于列治文山），专门制造激光加工机并提供激光打标服务。该公司进入这个市场几年后，他们意识到激光打标机中的传统激光扫描机制过于庞大且昂贵。该公司长期以来一直在寻找一种成本更低、尺寸更小的激光打标机中传统激光扫描机制的替代解决方案。本申请提出了一种解决上述问题的解决方案，即使用微镜矢量扫描激光束来代替激光打标机中传统的激光扫描机构。与传统的检流计或伺服/步进电机驱动的镜子相比，微镜具有更小/更简单的结构和驱动电路，因为微镜的质量非常小，需要很小的功率来驱动，而不需要任何散热器。基于微镜的激光束扫描机构重量约为 0.05 升或更小，比传统设计小约 50 倍。此外，微镜适合大规模制造，即在一块晶圆上同时制造数百或数千个微镜，这导致单位镜的价格非常低，例如10几美元。包括微镜和驱动/控制电路在内的成本是