Development of MEMS (Microelectromechanical Systems) actuation technology and micro actuator based MEMS devices

MEMS（微机电系统）致动技术和基于MEMS器件的微致动器的开发

• 批准号: 341872-2012
• 负责人: He, Siyuan
• 金额: $ 1.89万
• 依托单位: Ryerson University
• 依托单位国家: 加拿大
• 项目类别: Discovery Grants Program - Individual
• 财政年份: 2015
• 资助国家: 加拿大
• 起止时间: 2015-01-01 至 2016-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=572392
• 关键词: Development; MEMS; Microelectromechanical; Systems; actuation

The proposed research focuses on developing MEMS actuation technology and micro actuator based MEMS devices to solve industry problems: (i) Automotive HUD (Head-Up-Display) displays the driving information on the windshield or on the road through a virtual image, such that the driver can have longer eyes-on-road time to improve the driving safety. The current LCD HUD has not been widely used in general cars due to its high cost and performance limitations. This research will develop MEMS actuator of high performance to build MEMS laser vector scanning HUD with superior performance over existing technology including much higher brightness, much wider angle of view, significantly reduced size and cost. Due to its high performance and low cost, the MEMS HUD will significantly expand the application of HUD in cars, trucks and buses to improve the driving safety; (ii) Current VCM (Voice Coil Motor) autofocus for phone cameras cannot meet industry requirements due to its high power consumption, low accuracy and low response speed. With the increasing resolution and decreasing size of phone cameras, the handshake becomes a non-negligible factor affecting the image quality. The phone camera industry has been looking for OIS (Optical Image Stabilization) technology to compensate for the handshake. Currently no OIS has been implemented in commercial phone cameras due to the lack of actuator suitable for OIS. In this research, a novel MEMS actuator will be developed to realize both autofocus and OIS for phone cameras with high response speed, lower power and high accuracy; and (iii) This research will develop a novel MEMS actuator to build MEMS FT-IR (Fourier Transform Infrared) spectrometer which has the advantages of small size, high robustness and low cost over conventional designs. The MEMS F-IR spectrometer is a high precision chemical analyzer and suitable for onsite industry process control, environmental and security monitoring. In this research it will be used for the next generation automotive alcohol interlock.

拟议的研究重点是开发MEMS驱动技术和基于MEMS器件的微驱动器，以解决行业问题：（i）汽车HUD（平视显示器）通过虚拟图像在挡风玻璃或道路上显示驾驶信息，使得驾驶员可以有更长的注视路面时间，提高驾驶安全性。目前的LCD HUD由于其成本较高和性能限制，尚未在一般汽车上广泛应用。这项研究将开发高性能MEMS执行器，以构建MEMS激光矢量扫描HUD，其性能优于现有技术，包括更高的亮度、更宽的视角、显着减小的尺寸和成本。由于MEMS HUD具有高性能和低成本的特点，将显着扩大HUD在轿车、卡车和公共汽车上的应用，提高驾驶安全性； (ii) 目前手机摄像头的VCM（音圈电机）自动对焦由于功耗高、精度低、响应速度慢，无法满足行业要求。随着手机摄像头分辨率的提高和尺寸的减小，手抖成为影响图像质量不可忽视的因素。手机摄像头行业一直在寻找 OIS（光学图像稳定）技术来补偿手抖问题。目前，由于缺乏适合 OIS 的执行器，商用手机摄像头尚未实现 OIS。本研究将开发一种新型MEMS执行器，以实现手机摄像头的自动对焦和OIS，具有高响应速度、低功耗和高精度； (iii) 这项研究将开发一种新型MEMS执行器来构建MEMS FT-IR（傅里叶变换红外）光谱仪，与传统设计相比，该光谱仪具有尺寸小、鲁棒性高和成本低的优点。 MEMS F-IR光谱仪是一种高精度化学分析仪，适用于现场工业过程控制、环境和安全监测。在这项研究中，它将用于下一代汽车酒精联锁装置。