Rapid Nitriding of Aluminum Using Nitrogen Glow Plasma

使用氮辉光等离子体对铝进行快速渗氮

• 批准号: 09555226
• 负责人: AKASHI Kazuo
• 金额: $ 3.58万
• 依托单位: Science University of Tokyo
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 1997
• 资助国家: 日本
• 起止时间: 1997 至 1998
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-09555226/
• 关键词: Glow plasma; Aluminum nitride; Aluminum; Rapid preparation; Bulk; Nitriding; 窒素グロー放電プラズマ; 繊維状物質; 窒化率; 水素プラズマ前処理; 残留ガス分析; 酸化皮膜除去

The bulk of aluminum was rapidly nitrided using nitrogen r.f. glow plasma. The results were summarized below.A pellet formed from aluminum powder was rapidly nitrided at 1000ﾟC for 10min with a conversion of 94%. The optimum plate power of r.f. source was 1.85kW.Aluminum nitride fibers with 1mum in dia. were densely packed in the nitrided sample. This nitriding may be caused by activated nitrogen species N, N^+ and N_2^+, because such rapid and low-temperature nitriding has not been reported. Furthermore, the rapid and low-temperature nitridings were also achieved in the aluminums with other shapes ; grain(phi6.2mm*5.5mm), plate(0.5*10.0*10.0mm, cube(l0.0*l0.0*4.0mm) and grains with 2mm in dia.Pretreatment was done by Ar or H_2 plasma. The effect was not recognized in Ar or Ar/H_2 plasma. However, when H_2 plasma was used for the pretreatment of Al plate, the conversion of Al plate was increased to 97%.Furthermore, the nitriding process was studied by the interruption of the reaction. When the pellets prepared from atomized powder were used, the reaction process was clearly observed. In this case, the nitriding by the nitrogen glow plasma proceeds on the surface of the aluminum bulk. The aluminum at the boundary is evaporated by the reaction heat to react with the activated nitrogen, depositing A1N dendrites on the surface. The aluminum inside moves to the boundary to make a cave at the bottom of the sample.

使用氮气射频辉光等离子体对大部分铝进行快速氮化，结果总结如下。由铝粉形成的颗粒在 1000°C 下快速氮化 10 分钟，射频源的最佳板功率为 1.85。 kW.直径为1μm的氮化铝纤维密集地堆积在氮化样品中。通过活化氮物种N、N^+和N_2^+，这种快速低温氮化尚未见报道。此外，在其他晶粒(phi6. 2mm*5.5mm)、板状(0.5*10.0*10.0mm)、立方体(l0.0*l0.0*4.0mm)及2mm颗粒dia.采用Ar或H_2等离子体进行预处理时，在Ar或Ar/H_2等离子体中没有发现效果，但是当使用H_2等离子体对Al板进行预处理时，Al板的转化率提高到97%。 ，通过中断反应来研究氮化过程。当使用由雾化粉末制备的颗粒时，可以清楚地观察到反应过程，在这种情况下，氮等离子体辉光的氮化在表面上进行。铝块的边界处的铝被反应热蒸发，与活化的氮发生反应，在表面沉积出AlN枝晶，内部的铝移动到边界，在样品的底部形成一个洞穴。

项目成果

伊藤 滋、 明石和夫: "RAPID NITRIDING OF ALUMINUM UNDER NITROGEN GLOW PLASMA" Proc.International Symposium on Processing, Designing and Properties of Advanced Enginnering Materials. 703-708 (1997)

Shigeru Ito、Kazuo Akashi：“氮辉光等离子体下铝的快速氮化”Proc.国际先进工程材料加工、设计和性能研讨会（1997 年）。