Rapid Nitriding of Aluminum Using Nitrogen Glow Plasma

使用氮辉光等离子体对铝进行快速渗氮

• 批准号: 09555226
• 负责人: AKASHI Kazuo
• 金额: $ 3.58万
• 依托单位: Science University of Tokyo
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 1997
• 资助国家: 日本
• 起止时间: 1997 至 1998
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-09555226/
• 关键词: Glow plasma; Aluminum nitride; Aluminum; Rapid preparation; Bulk; Nitriding; 窒素グロー放電プラズマ; 繊維状物質; 窒化率; 水素プラズマ前処理; 残留ガス分析; 酸化皮膜除去

The bulk of aluminum was rapidly nitrided using nitrogen r.f. glow plasma. The results were summarized below.A pellet formed from aluminum powder was rapidly nitrided at 1000ﾟC for 10min with a conversion of 94%. The optimum plate power of r.f. source was 1.85kW.Aluminum nitride fibers with 1mum in dia. were densely packed in the nitrided sample. This nitriding may be caused by activated nitrogen species N, N^+ and N_2^+, because such rapid and low-temperature nitriding has not been reported. Furthermore, the rapid and low-temperature nitridings were also achieved in the aluminums with other shapes ; grain(phi6.2mm*5.5mm), plate(0.5*10.0*10.0mm, cube(l0.0*l0.0*4.0mm) and grains with 2mm in dia.Pretreatment was done by Ar or H_2 plasma. The effect was not recognized in Ar or Ar/H_2 plasma. However, when H_2 plasma was used for the pretreatment of Al plate, the conversion of Al plate was increased to 97%.Furthermore, the nitriding process was studied by the interruption of the reaction. When the pellets prepared from atomized powder were used, the reaction process was clearly observed. In this case, the nitriding by the nitrogen glow plasma proceeds on the surface of the aluminum bulk. The aluminum at the boundary is evaporated by the reaction heat to react with the activated nitrogen, depositing A1N dendrites on the surface. The aluminum inside moves to the boundary to make a cave at the bottom of the sample.

使用氮R.F.迅速将铝的大部分氮化迅速硝化。发光血浆。结果总结了下面。由铝粉中形成的颗粒在1000°C下迅速硝基硝基，为10分钟，转化率为94％。 R.F.的最佳板功率源为1.85kW。被固定在硝酸样品中。这种硝化可能是由活化的氮种N，N^+和N_2^+引起的，因为尚未报道如此快速和低温的硝化作用。此外，在具有其他形状的铝中，还可以实现快速和低温的硝化。谷物（phi6.2mm*5.5mm），板（0.5*10.0*10.0毫米，立方体（l0.0*l0.0*4.0mm）和谷物，二日式为2毫米。预测是由AR或H_2等离子体完成的。但是，在AR或AR/H_2 plasma中使用了h_2 plasma的preteat preteat to n a ar/h_2 plasma的效果。 97％。当使用了从原子粉中制备的颗粒，在这种情况下清楚地观察到了反应的氮，在这种情况下，硝化过程是由氮气在铝块的表面上进行的。在表面上的树突。

项目成果

伊藤 滋、 明石和夫: "RAPID NITRIDING OF ALUMINUM UNDER NITROGEN GLOW PLASMA" Proc.International Symposium on Processing, Designing and Properties of Advanced Enginnering Materials. 703-708 (1997)

Shigeru Ito、Kazuo Akashi：“氮辉光等离子体下铝的快速氮化”Proc.国际先进工程材料加工、设计和性能研讨会（1997 年）。