Research of Bio-nano Display using Ferritin Protein

利用铁蛋白进行生物纳米显示的研究

基本信息

批准号：
17360164
负责人：
URAOKA Yukiharu
金额：
$ 9.47万
依托单位：
Nara Institute of Science and Technology
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (B)
财政年份：
2005
资助国家：
日本
起止时间：
2005 至 2006
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-17360164/
关键词：
Ferritin Protein Thin Film Transistor Poly silicon film Metal Induced Crystalization Display System On Panel Nano Particle Ni catalyst シリコン薄膜結晶化ニッケル固相成長バイオミネラリゼーションシリサイド

项目摘要

Polycrystalline silicon (poly-Si) films fabricated on glass or plastic substrates have attracted much attention due to their applications in thin-film transistors (TFT) for flat-panel displays or future displays, such as a system-on-panel. In this study, we propose a new method utilizing biotechnology to obtain high-quality poly-Si thin films. As the nucleus of silicon crystallization, the Ni core of ferritin with a diameter of 7 nm was adsorbed on the surface of a-Si films by a bottom-up process. By adjusting the density of ferritin on the a-Si film, we controlled the Ni nucleus density and performed the solid-phase crystallization of the a-Si film.The a-Si film with a controlled crystal nucleus was heated up to 550℃in 10 min and then annealed for 25 h in N_2 ambient in an RTA furnace. Rapid heating suppresses the generation of a natural nucleus and poly-Si growth proceeds laterally from the controlled nucleus of NiSi_2. It is reported that the activation energies of Ni/a-Si → NiSi_2, … More a-Si → crystalline Si, and the generation of a natural nucleus are 1.45, 2.7, and 4.4eV, respectively. Therefore, it is estimated that the rapid heating and continuous annealing at 550℃ enhanced the reaction of NiSi_2 dominantly, thus the crystal growth of poly-Si proceeded.Furthermore, to examine grain size and crystalline orientation, EBSD analysis was performed. The "grains" were defined as the regions with the same crystallographic orientations and the same phases. Mapping images showed that definite grains were not observed at a density of 10^<11>cm^<-2>, therefore, the microcrystalline structure was dominant. For the film with a density of 10^<10>cm^<-2>, a mixture of grains and a microcrystalline structure was confirmed. However, for the film with a core density of 10^9cm^<-2>, definite grains were confirmed and their size was uniform. The orientations of the grains were random in all samples. The film without cores prepared as reference had no grains. The average grain sizes estimated from the size distribution, were 0.36 a m, 0.48 it m and 3.06 μm for the core densities of 10^<11>, 10^<10> and 10^9 cm^<-2>, respectively. Thus, grain size increased markedly with decreasing core density. Less

在玻璃或塑料底物上制造的多晶硅（Poly-SI）膜因其在薄膜晶体管（TFT）中用于平板显示器或将来的显示器（例如系统对板板）而引起了很多关注。在这项研究中，我们提出了一种利用生物技术来获得高质量的多SI薄膜的新方法。作为硅结晶的核，直径为7 nm的铁蛋白的Ni核通过自下而上的过程吸附在A-SI膜的表面上。通过调节A-SI膜上铁蛋白的密度，我们控制了Ni核密度并进行了A-SI膜的固相结晶。具有受控晶体核的A-SI膜在10分钟内加热至550°，然后在RTA Fellace的N_2 Ambient中25 h退火25 h。快速加热可抑制天然核的产生，而多-SI生长则是从NISI_2的受控核横向进行的。据报道，Ni/A-Si→Nisi_2的激活能分别为1.45、2.7和4.4EV，更多的A-Si→Crystalline Si分别为1.45、2.7和4.4EV。因此，据估计，在550处的快速加热和连续退火℃主要增强了NISI_2的反应，因此进行了多-SI的晶体生长。Furthermore进行了检查晶粒尺寸和结晶方向，EBSD分析进行了。 “谷物”定义为具有相同晶体学方向和相同相的区域。映射图像显示，在10^<11> cm^<-2>的密度下未观察到定义的晶粒，因此，微晶结构是主要的。对于密度为10^<10> cm^<-2>的膜，确认了晶粒和微晶结构的混合物。但是，对于核心密度为10^9cm^<-2>的膜，确认了定义的晶粒并且其大小均匀。在所有样品中，谷物的方向都是随机的。没有准备作为参考的核心的电影没有谷物。从尺寸分布中估计的平均晶粒尺寸为10^<11>，10^<10>和10^9 cm^<-2>的核心密度分别为0.36 a，0.48 IT和3.06μm。这，随着核心密度降低，晶粒尺寸显着增加。较少的