Micro Machining of Glass with Ball End Mill

使用球头立铣刀对玻璃进行微加工

基本信息

批准号：
17360066
负责人：
MATSUMURA Takashi
金额：
$ 7.55万
依托单位：
Tokyo Denki University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (B)
财政年份：
2005
资助国家：
日本
起止时间：
2005 至 2006
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-17360066/
关键词：
End mill Glass Cutting Micro machining Cutting force Bio chip

项目摘要

The Lab on a chip such as micro TASs, which is the inspection plates for a small amount of samples, has become popular in the bio or chemical industries. Although chemical etching with hydrofluoric acid has been mainly applied to manufacturing of the chips so far, the processes requires the long time to complete manufacturing with hazardous operations. This study presents glass milling to machine the micro channels on the plates instead of etching. The results may be summarized as follows :(1)A 7-axis machine tool, which consists of the control unit of the tool inclination and the driving unit of the machine table, is developed to machine the micro grooves on the glass plates with keeping the tool inclination. The machining process can be controlled in two manners : the bitmap control and the programmed control. Because most of the cutting operations are performed to machine two-dimensional pattern, the bitmap control can be applied practically.(2)The milling process is applied to mach … More ining of the micro grooves 15-20μm deep and 150-175μm wide on the glass in a feed of the cutter. The ball end mill made of tungsten carbide is used to reduce the machining cost and suppress crack propagation with large edge roundness. A crack-fee surface can be finished in water at a rotational speed of 20000rpm and at a feed rate of 0.48mm/min with the ball end mill inclined at an angle of 45 deg as a set of the applicable cutting conditions. Some models are presented to discuss the effect of the cutter axis inclination on brittle fracture, the surface finish, the cutting temperature during cutting, and the tool wear. Finally a DNA micro array is manufactured to improve the identification of the DNA sequence as a practical application of the presented machining. The micro drains 15μm and 20μm deep with the micro asperities can be fabricated on the glass in milling with the ball end mills in the applicable cutting conditions.(3)A milling tool is developed to improve the production rate by the change of the number of the edges and the edge shape. The developed tool enables us to remove the glass without brittle fracture at 10 times higher feed rate than that of the conventional tool. Less

芯片上的实验室（例如用于少量样品的检查板）已在生物或化学行业中流行，尽管到目前为止，氢氟酸化学蚀刻主要应用于芯片的制造。该工艺需要很长时间才能完成制造，并且存在危险操作。本研究提出用玻璃铣削来加工板上的微通道，而不是蚀刻。结果可概括如下：(1) 7 轴机床，其中包括。工具的控制单元机床工作台的倾斜度和驱动装置是为了在保持刀具倾斜度的情况下在玻璃板上加工微凹槽而开发的，加工过程可以通过两种方式进行控制：位图控制和程序控制。进行二维图形加工，位图控制可实际应用。(2)采用铣削工艺加工15-20μm深的微槽，刀具进给中的玻璃上宽度为150-175μm，采用碳化钨制成的球头立铣刀，可降低加工成本并抑制裂纹扩展，边缘圆度大，可在水中精加工无裂纹表面。以转速20000rpm、进给量0.48mm/min、球头立铣刀斜度45°作为一组适用的切削条件。提出了一些模型来讨论刀轴倾斜对脆性断裂、表面光洁度、切削过程中的切削温度和刀具磨损的影响，最后制造了 DNA 微阵列，以提高 DNA 序列的识别能力。应用所提出的加工方法，可以在适当的切削条件下用球头立铣刀在玻璃上加工出15μm和20μm深的微凹凸微沟道。(3)开发了一种铣削刀具，以提高加工效率。通过改变边缘数量和边缘形状，我们能够以比传统工具高 10 倍的进给速度去除玻璃而不会发生脆性断裂。