Micro Fabrication on Glass in The Abrasive Water Jet Process

磨料水射流工艺中的玻璃微加工

基本信息

批准号：
15560102
负责人：
MATSUMURA Takashi
金额：
$ 2.56万
依托单位：
Tokyo Denki University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (C)
财政年份：
2003
资助国家：
日本
起止时间：
2003 至 2004
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-15560102/
关键词：
Water jet Glass Micro fabrication Micro TAS Texturing Computational fluid dynamics ウォータジェット

项目摘要

A new manufacturing process with abrasive water jet is proposed to fabricate micro channels or dimples on glass. Masks having exposed areas cover the surface so that the covered areas cannot be machined. Because the width of the exposed areas is much smaller than the diameter of the jet nozzle, tapers are made in the cross section of the masks so that abrasive slurry can reach the exposed surface. Abrasive slurry is mixed with water supplied by a low-pressure pump in a water jet nozzle. When abrasive water flows onto the surface vertically between the taper-shaped masks, stagnation is made right under the nozzle. Because the flow velocity is low in stagnation, brittle fracture does not happen on the machined surface. The vertical flow also changes to the horizontal direction at a high velocity out of the stagnation. Abrasive particles, therefore, machine the surface in the horizontal direction at a high velocity. The jet nozzle moves back and forth for several times along the exposed area. A V-shaped groove, which is a depth of 2.5 μm and a width of 20 μm, can be machined on the surface of fused silica. A micro fabrication machine is made to fabricate micro grooves at the specified positions and angles. It is shown that the machine works well to make micro textures on the surface in some examples. Another machine tool is built up to fabricate micro patterns with masks that have the exposed pattern on the plates. Micro dimples are machined with the plate having micro holes. Three-dimensional structure can be machined in the dimples with controlling fluid field. The machining example proves that the machined shape can be predicted with computational fluid dynamics.

提出了一种新的带有磨料水喷射的制造工艺来制造微型通道或玻璃上的差异。裸露区域的口罩覆盖了表面，因此无法加工覆盖区域。由于裸露区域的宽度比喷嘴的直径小得多，因此在口罩的横截面中制作锥度，以便磨料的泥浆可以到达裸露的表面。磨砂浆与水喷嘴中的低压泵提供的水混合。当磨料水在胶带形面罩之间垂直流向表面时，停滞在喷嘴下方。由于流速速度停滞较低，因此在机械表面上不会发生脆性断裂。垂直流也从停滞的高速下向水平方向变化。因此，磨料颗粒以高速度在水平方向上加工了表面。喷射喷嘴来回移动几次V形凹槽，该凹槽的深度为2.5μm，宽度为20μm，可以在熔融二氧化硅的表面上加工。制作微制造机以在指定的位置和角度制造微凹槽。结果表明，在某些示例中，机器可以很好地在表面上制作微纹理。另一个机床是为了制造带有板上裸露图案的口罩的微型图案。微型酒窝用带有微孔的板加工。可以通过控制流体场的差异来加工三维结构。加工示例证明可以通过计算流体动力学预测加工形状。