Super Clean Non-Contact Conveying System Utilizing Electrostatic Force

利用静电力的超洁净非接触式输送系统

基本信息

批准号：
10555078
负责人：
HIGUCHI Toshiro
金额：
$ 8.45万
依托单位：
The University of Tokyo
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (B)
财政年份：
1998
资助国家：
日本
起止时间：
1998 至 1999
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-10555078/
关键词：
Non-Contact Handling Conveying Thin Plate Glass Electrostatic Force Air Bearing Clean Environment 非接触浮上

项目摘要

To reduce the contamination of product surfaces by duet particle in manufacturing process of Liquid Crystal Display (LCD) or semiconductors, the development of non-contact conveying system for glass plate or silicon wafer is essentia1. Furthermore, in proportion to the large-sizing tendency of LCD, the conventional transportation system utilizing vacuum chuck fixing on the end-effecter of robot arm gives a pretty deflection on the glass base-plate. Because of the two reasons mentioned above, the development of a new conveying system for thin glass plate is required.In this research, an electrostatic suspension chuck for thin plate has been successfully developed. For the purpose to levitate a thin plate, which should be considered as a flexible object, the operating force on each small area of the thin plate during levitation has to be controlled. The electrode employed for generating electrostatic levitation force was divided to pieces, and the applied voltage to each electrode unit w … More as controlled based on the output of the corresponding gap sensor. A prototype mechanism was confirmed to levitate a thin aluminum plate of 278mm x 78mm x 0.05mm in size, with a gap of around 0.5mm steadily beneath the electrode plate. The vertical vibration amplitude was about ±5μm, which was the resolution of the gap sensor. Another prototype mechanism wag also constructed to levitate a soda-lime glass plate of 385hm x 130mm x 0.7mm in size. Despite of the glass's high surface resistivity, which would deteriorate the stability of levitation, we succeeded in the levitation of the mentioned glass plate.In this research, we also successfully developed a new non-contact conveying system for thin glass plate, utilizing combination of air bearing and electrostatic propelling. An appropriate structure for electrode was proposed, and its effectiveness was confirmed through the force measuring and conveying experiment. A soda-lime glass plate of 52mm x 52mm x 0.7mm in size wag conveyed at a speed of 150mm/s with a lateral vibration less than ±0.5mm, when the gap width was 130μm. Less

为了减少液晶显示器（LCD）或半导体制造过程中双颗粒对产品表面的污染，开发玻璃板或硅片的非接触式输送系统是必要的。此外，与大尺寸化趋势成正比。对于液晶显示器，传统的利用真空吸盘固定在机械臂末端执行器上的输送系统会在玻璃基板上产生相当大的偏转，由于上述两个原因，开发了一种新型的薄板输送系统。本研究成功开发了一种用于薄板的静电悬浮吸盘，用于悬浮薄板，该薄板应被视为柔性物体，作用在薄板的每个小区域上的操作力。悬浮过程中的薄板必须受到控制，用于产生静电悬浮力的电极被分成几块，并根据相应间隙传感器的输出来控制施加到每个电极单元的电压。悬浮一块薄铝板尺寸为 278mm x 78mm x 0.05mm，电极板下方有约 0.5mm 的间隙，垂直振动幅度约为 ±5μm，这是另一个用于悬浮苏打水的原型机构摇臂的分辨率。 - 尺寸为 385hm x 130mm x 0.7mm 的石灰玻璃板尽管玻璃的表面电阻率很高，这会降低悬浮的稳定性，但我们还是成功了。在这项研究中，我们还成功开发了一种新型的薄玻璃板非接触式输送系统，利用空气轴承和静电推进的组合，提出了一种合适的电极结构，并验证了其有效性。通过测力和输送实验证实，尺寸为 52mm x 52mm x 0.7mm 的钠钙玻璃板以 150mm/s 的速度输送，横向振动小于 100mm/s。 ±0.5mm，当间隙宽度为130μm时。