High-power electrostatic levitation linear motor for ultra-clean and vacuum environment

适用于超净真空环境的大功率静电悬浮直线电机

• 批准号: 12355011
• 负责人: HIGUCHI Toshiro
• 金额: $ 27.49万
• 依托单位: The University of Tokyo
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (A)
• 财政年份: 2000
• 资助国家: 日本
• 起止时间: 2000 至 2002
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-12355011/
• 关键词: Electrostatic Motor; Linear Motor; Non-contact levitation; Electrostatic Levitation; Levitation Motor; Vacuum; Actuator; Electron Beam; クリーンルーム; シリコンウェハ; Electrostatic Motor; Linear Motor; Non-contact levitation; Electrostatic Levitation; Levitation Motor; Vacuum; Actuator; Electron Beam; クリーンルーム; シリコンウェハ

In this research, we have developed high-power electrostatic linear levitation motor for vacuum condition. Since electrostatic motor does not emit magnetic field it is suitable for EB applications, such as electron microscope and EB lithography system, which are some of the most important applications using vacuum condition.In the first step of the research, we have developed electrostatic linear motor stage specialized for vacuum use, with which characteristics of non-levitation electrostatic motor in vacuum condition was investigated. The developed stage generates almost the same thrust force in vacuum as in the normal condition. We have developed new electrostatic linear encoder which is embedded into the electrostatic motor. Using the developed linear encoder, we perform positioning control in vacuum condition.Next, we have studied electrostatic levitation motor, in which high-power electrostatic motor technology and electrostatic levitation technology are combined. We proposed several principles for levitation motor and revealed their characteristics theoretically. To verify the proposed principles, we have developed two-DOF prototype, which has one degree of freedom for thrust direction and one for levitating direction. The developed prototype demonstrated levitated driving motion in vacuum condition. The slider was levitated under the stator with a gap of 200μm and moved with a speed of 20mm/s in the thrust direction. Also, we performed positioning control with keeping levitated state. These results verify the proposed principles of electrostatic levitation motor.

在这项研究中，我们为真空状况开发了高功率静电线性悬浮电动机。由于静电电动机不发射磁场，因此适用于EB应用，例如电子显微镜和EB光刻系统，这些系统是使用真空条件的一些最重要的应用。在研究的第一步中，我们已经开发了用于真空使用的静电线性线性运动型，并研究了非静电静电运动在真空中的非静电静电运动的特征。发达的阶段在真空中产生的推力几乎与正常情况相同。我们开发了新的静电线性编码器，该编码器嵌入到静电电机中。使用开发的线性编码器，我们在真空条件下执行定位控制。隔离，我们已经研究了静电悬浮电机，其中将高功率的静电运动技术和静电悬浮技术组合在一起。我们提出了悬浮电动机的几种原则，并从理论上揭示了它们的特征。为了验证提出的原理，我们开发了两多型原型，该原型具有一个自由度的推力方向，一个悬浮方向。开发的原型显示在真空条件下悬浮的驾驶运动。将滑块悬浮在定子下方，缝隙为200μm，并以20mm/s的速度在推力方向上移动。此外，我们通过保持悬浮状态进行了定位控制。这些结果验证了静电悬浮电机的建议原理。