High-power electrostatic levitation linear motor for ultra-clean and vacuum environment

适用于超净真空环境的大功率静电悬浮直线电机

• 批准号: 12355011
• 负责人: HIGUCHI Toshiro
• 金额: $ 27.49万
• 依托单位: The University of Tokyo
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (A)
• 财政年份: 2000
• 资助国家: 日本
• 起止时间: 2000 至 2002
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-12355011/
• 关键词: Electrostatic Motor; Linear Motor; Non-contact levitation; Electrostatic Levitation; Levitation Motor; Vacuum; Actuator; Electron Beam; クリーンルーム; シリコンウェハ

In this research, we have developed high-power electrostatic linear levitation motor for vacuum condition. Since electrostatic motor does not emit magnetic field it is suitable for EB applications, such as electron microscope and EB lithography system, which are some of the most important applications using vacuum condition.In the first step of the research, we have developed electrostatic linear motor stage specialized for vacuum use, with which characteristics of non-levitation electrostatic motor in vacuum condition was investigated. The developed stage generates almost the same thrust force in vacuum as in the normal condition. We have developed new electrostatic linear encoder which is embedded into the electrostatic motor. Using the developed linear encoder, we perform positioning control in vacuum condition.Next, we have studied electrostatic levitation motor, in which high-power electrostatic motor technology and electrostatic levitation technology are combined. We proposed several principles for levitation motor and revealed their characteristics theoretically. To verify the proposed principles, we have developed two-DOF prototype, which has one degree of freedom for thrust direction and one for levitating direction. The developed prototype demonstrated levitated driving motion in vacuum condition. The slider was levitated under the stator with a gap of 200μm and moved with a speed of 20mm/s in the thrust direction. Also, we performed positioning control with keeping levitated state. These results verify the proposed principles of electrostatic levitation motor.

在这项研究中，我们有用于真空场的高功率悬浮电机。在真空中进行了研究悬浮的技术是合并的。推力方向。

项目成果

Hidehiko YASUI, Akio YAMAMOTO, Toshiro HIGUCHI: "Electrostatic Levitation of 300-mm Silicon Water"Proc.ISIM 2000. 51-54 (2000)

Hidehiko YASUI、Akio YAMAMOTO、Toshiro HIGUCHI：“300 mm 硅水的静电悬浮”Proc.ISIM 2000. 51-54 (2000)

Hidehiko YASUI, Akio YAMAMOTO, Toshiro HIGUCHI: "Non-contact Levitation Control System for Electrostatic Motor"Proc.8th International Symposium on Magnetic Bearings. 175-180 (2002)

Hidehiko YASUI、Akio YAMAMOTO、Toshiro HIGUCHI：“静电电机非接触悬浮控制系统”Proc.8th 国际磁力轴承研讨会。

保井秀彦, 山本晃生, 樋口俊郎: "静電浮上モータの浮上制御方法の検討"2002年精密工学会春季大会学術講演会講演論文集 (発表予定). (未定). (2002)

Hidehiko Yasui、Akio Yamamoto、Toshiro Higuchi：“静电悬浮电机的悬浮控制方法的研究”2002 年精密工程学会春季会议论文集（待发表）（待发表）。

保井秀彦, 山本晃生, 樋口俊郎: "真空環境用静電リニアモータの開発"2O02年精密工学会春季大会学術講演会講演論文集 (発表予定). (未定). (2002)

安井英彦、山本昭夫、樋口敏郎：“真空环境下的静电直线电机的开发”2002 年精密工程学会春季会议学术讲座论文集（待发表）（待发表）。

A.YAMAMOTO, H.YASUI, N.SHIMIZU, T.HIGUCHI: "Development of Electrostatic Levitation Motor for Vacuum Condition"Proc. 2003 IEEE International Symposium on Industrial Electronics. (発表予定). (2003)

A.YAMAMOTO、H.YASUI、N.SHIMIZU、T.HIGUCHI：“真空条件下的静电悬浮电机的开发”Proc. 2003 年 IEEE 国际工业电子研讨会（即将发表）。