Surface acoustic wave gyroscope

声表面波陀螺仪

基本信息

批准号：
07555424
负责人：
HIGUCHI Toshiro
金额：
$ 2.75万
依托单位：
UNIVERSITY OF TOKYO
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (A)
财政年份：
1995
资助国家：
日本
起止时间：
1995 至 1997
项目状态：
已结题

项目摘要

A surface acoustic wave gyroscope using an operation frequency of 15 MHz, a wave mode of Rayleigh wave and a piezoelectric substrate of LiNbO3 128ﾟ Y-cut was designed. Electrodes of an interdigital transducer (IDT : called "generator IDT") and two reflectors are aligned for generating a standing wave on the surface. Two IDTs (called "sensor IDTs") and two reflectors for receiving a secondary wave are aligned perpendicularly into the electrodes which generate the primary standing wave. Perturbation electrodes are arranged between the IDTs. A principle of this gyroscope is receiving the secondary wave excited by the perturbation electrodes with rotation of the substrate. An output voltage of few tens of mV with rotation rate 2pi rad/s was estimated by using equivalent circuit models. This sensor with electrodes of aluminum and chromium and the size of 25mm x 45mm was fabricated by using photo-process.On sensor IDT,a different anti-resonance frequency from a resonance frequency of generator IDT and low Q factor was found from measuring admittance characteristic versus frequency. Therefor, output voltage will be decreased to less than one hundred muV.And waves scattered by the perturbation electrodes were observed. These scattered waves were detected by the sensor IDTs. Some perturbation electrode with different vibration condition from our design were found by vibration measuring. Further, the primary standing wave was not formed clearly. Thus, a vibrating table was used to detect the output of the gyroscope, for the output voltage was too low. The output of sensor IDT was amplified with locking in the frequency of table vibration. But, unfortunately, the output voltage could not detected yet.

设计的表面声波陀螺仪使用15 MHz的操作频率，瑞利波的波模式和Linbo3 128 Y-CUT的压电底物。跨数字换能器的电极（IDT：称为“发电机IDT”）和两个反射器在表面上产生驻波。将两个IDT（称为“传感器IDT”）和两个接收次波的反射器垂直排列到产生主要常驻波的电极中。扰动电极在IDT之间排列。该陀螺仪的原理正在接收二次波，该辅助波通过扰动电极与底物旋转。使用等效电路模型估算了几十MV的输出电压。使用photo-process.ON传感器IDT制造了具有铝和铬电极以及25mm x 45mm的大小的传感器，从测量到发电机IDT的共振频率和低Q因子的传感器IDT中，通过测量入院特征与频率发现了不同的抗谐振频率。因此，观察到由扰动电极散布的波的输出电压将降至少于一百个。这些散射的波是通过传感器IDT检测到的。通过振动测量发现了与我们设计不同振动条件不同的一些扰动电极。此外，主要的常驻波没有清楚地形成。那是使用振动表来检测陀螺仪的输出，因为输出电压太低。传感器IDT的输出在表振动的频率下通过锁定进行扩增。但是，不幸的是，无法检测到输出电压。