Surface acoustic wave gyroscope

声表面波陀螺仪

基本信息

批准号：
07555424
负责人：
HIGUCHI Toshiro
金额：
$ 2.75万
依托单位：
UNIVERSITY OF TOKYO
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (A)
财政年份：
1995
资助国家：
日本
起止时间：
1995 至 1997
项目状态：
已结题

项目摘要

A surface acoustic wave gyroscope using an operation frequency of 15 MHz, a wave mode of Rayleigh wave and a piezoelectric substrate of LiNbO3 128ﾟ Y-cut was designed. Electrodes of an interdigital transducer (IDT : called "generator IDT") and two reflectors are aligned for generating a standing wave on the surface. Two IDTs (called "sensor IDTs") and two reflectors for receiving a secondary wave are aligned perpendicularly into the electrodes which generate the primary standing wave. Perturbation electrodes are arranged between the IDTs. A principle of this gyroscope is receiving the secondary wave excited by the perturbation electrodes with rotation of the substrate. An output voltage of few tens of mV with rotation rate 2pi rad/s was estimated by using equivalent circuit models. This sensor with electrodes of aluminum and chromium and the size of 25mm x 45mm was fabricated by using photo-process.On sensor IDT,a different anti-resonance frequency from a resonance frequency of generator IDT and low Q factor was found from measuring admittance characteristic versus frequency. Therefor, output voltage will be decreased to less than one hundred muV.And waves scattered by the perturbation electrodes were observed. These scattered waves were detected by the sensor IDTs. Some perturbation electrode with different vibration condition from our design were found by vibration measuring. Further, the primary standing wave was not formed clearly. Thus, a vibrating table was used to detect the output of the gyroscope, for the output voltage was too low. The output of sensor IDT was amplified with locking in the frequency of table vibration. But, unfortunately, the output voltage could not detected yet.

设计了一种工作频率为15 MHz、波型为瑞利波、LiNbO3 128ﾟ Y 形切割压电基板的表面声波陀螺仪。叉指换能器（IDT：称为“发生器IDT”）的电极和两个反射器。对齐以在表面上产生驻波。两个IDT（称为“传感器IDT”）和两个用于接收二次波的反射器对齐。垂直于产生初级驻波的电极布置在IDT之间，该陀螺仪的原理是随着基底的旋转接收由扰动电极激发的次级波，并随着旋转而输出几十mV的电压。通过使用等效电路模型估算速率 2pi rad/s。该传感器采用铝和铬电极，尺寸为 25mm x 45mm，采用光刻工艺制造。 IDT，通过测量导纳特性与频率的关系发现了与发生器IDT的谐振频率不同的反谐振频率和低Q因数，因此输出电压将降低到小于100μV。并且扰动电极散射的波。通过振动测量发现，传感器IDT检测到了一些具有不同振动条件的扰动电极，并且未形成清晰的初级驻波。的陀螺仪，因为输出电压太低，通过锁定工作台振动频率来放大传感器IDT的输出，但不幸的是，还无法检测到输出电压。