DEVELOPMENT OF ULTRA-PRECISION MACHINING SYSTEM FOR ASPHERIC MIRROR BASED ON ARC ENVELOPE GRINDING METHOD

基于电弧包络磨削方法的非球面镜超精密加工系统的开发

基本信息

批准号：
07555355
负责人：
KURIYAGAWA Tsunemoto
金额：
$ 0.9万
依托单位：
TOHOKU UNIVERSITY
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (A)
财政年份：
1995
资助国家：
日本
起止时间：
1995 至 1996
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-07555355/
关键词：
CERAMICS MIRROR GRINDING ASPHERIC MIRROR ARC ENVELOPE GRINDING METHOD TRUING DRESSING 円弧包絡法

项目摘要

This project deals with the development of an ultra-precise grinding system based on a new grinding technique called the "Arc Envelope Grinding Method (AEGM)". AEGM,which is used for grinding aspheric ceramic mirrors, increases both wheel life and grinding performance, and significantly decreases total production costs. The necessary instrumentation and control system of our new instrument that utilizes AEGM have been designed and built. The tool path was calculated on a supercomputer, and the CNC program generation and tool path compensation were performed on a PC linked to the same supercomputer. Next, arc truing accuracy, wheel design, surface roughness and form accuracy of the ground workpiece were investigated.We developed a precision truing and dressing device, called an "Arc Truer". The truer is for an on-machine truing of a round cross-sectional profile. An examination of truing accuracy of the Arc Truer revealed that profile and radius errors were within (]SY.+-。[)0.5 mum and (]SY.+-。[)0.08mm, respectively. To obtain better form accuracy, furthermore, we investigated an on-machine form-measuring instrument with resolution of less than 10 nm. Next, we tried the AEGM grinding tests with the trued wheel. Using this grinding system, aspheric mirrors of glass and silicon carbide, 100 mm in diameter, were successfully ground. The form error after the first grinding (without any compensation) was less than 1.8 mum, and the roughness was R<@D2max@>D2=82nm (R<@D2a@>D2=10nm). The AEGM-based system which we developed demonstrated excellent grinding performance of aspheric ceramic mirrors. This system is applicable for manufacturing not only large-scale optics for outer-space applications, but also micro-size optics for micro devices, which will be widely used in the near future.

该项目致力于开发一种基于称为“弧形包络磨削方法（AEGM）”的新型磨削技术的超精密磨削系统，该技术用于磨削非球面陶瓷镜，可提高砂轮寿命和磨削性能。并显着降低了总生产成本。我们利用 AEGM 设计并构建了新仪器所需的仪器和控制系统，并在超级计算机上计算刀具路径，并进行 CNC 程序生成和刀具路径补偿。接下来，我们对磨削工件的圆弧修整精度、砂轮设计、表面粗糙度和形状精度进行了研究。我们开发了一种精密修整和修整设备，称为“Arc Truer”。用于在机器上修整圆形横截面轮廓对 Arc Trueer 的修整精度进行检查后发现，轮廓和半径误差在 (]SY.+-.[)0.5 微米以内。 (]SY.+-。为了获得更好的形状精度，我们研究了分辨率小于10 nm的机上形状测量仪，然后使用该磨削系统尝试了AEGM磨削测试。成功磨削了直径100mm的玻璃和碳化硅非球面镜，首次磨削后形状误差（不加任何补偿）小于1.8μm，粗糙度为我们开发的基于AEGM的系统R<@D2max@>D2=82nm（R<@D2a@>D2=10nm），该系统不仅适用于制造大型光学器件。不仅适用于外太空应用，还适用于微型设备的微型光学器件，这将在不久的将来得到广泛应用。