MICRO-MACHINING OF CERAMICS USING ABRASIVE-JET TECHNOLOGY

使用喷砂技术对陶瓷进行微加工

• 批准号: 06452156
• 负责人: KURIYAGAWA Tsunemoto
• 金额: $ 4.86万
• 依托单位: TOHOKU UNIVERSITY
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for General Scientific Research (B)
• 财政年份: 1994
• 资助国家: 日本
• 起止时间: 1994 至 1995
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-06452156/
• 关键词: CERAMICS; MICRO-MACHINING; IN-PROCESS DRESSING; ABRASIVE-JET; インプロセス ドレッシング; アブレイシブ・ジェット; マイクロ・マシニング

This project deals with the fundamental characteristics and applications of a micro-abrasive jet machining (micro-AJM). The micro-AJM device, which is for micro-machining of ceramics, was developed. It has advantages that the pressure of carrier gas is 3-4 times higher than that of a normal device, and that the mixing of abrasives and carrier gas is uniform.First, the velocity of abrasive particles, which are accelerated with a gas stream, was measured with laser Doppler velocimeter. It is clear that the abrasive particles were accelerated to a velocity of between 100 and 200 m/s, which is approximately 60% of sound speed. Second, a distribution measuring method of attacking abrasive onto the workpiece was developed. Sheet laser light source and CCD camera unit were used. The principle of this method is based on the diffraction light intensity method and image processing technique is applied to get the distribution. It was clear that the abrasives were spread over larger area than the cross section of the nozzle. Information of the velocity and the abrasive distribution is useful in selecting the optimal AJM conditions and in the designing the nozzle shape.Machining tests of ceramics (AlN,SiC,Si_3N_4, glassy carbon, ZiO_2 and glass) were performed and the machining characteristics were revealed. Furthermore, for micro-AJM applications, micro-drilling, pattern machining, and in-process dressing were tried. Micro-AJM technology demonstrated the excellent performance in the micro-machining of brittle materials.

该项目涉及微磨料喷射加工（micro-AJM）的基本特征和应用。开发了用于陶瓷微细加工的微型AJM装置。其优点是载气压力比普通装置高3-4倍，磨料与载气混合均匀。首先，磨料颗粒的速度被气流加速，用激光多普勒测速仪测量。很明显，磨料颗粒的速度被加速到 100 到 200 m/s 之间，大约是声速的 60%。其次，开发了一种攻击工件上磨料的分布测量方法。使用片状激光光源和CCD相机单元。该方法的原理是基于衍射光强度法，并应用图像处理技术来获得分布。很明显，磨料分布在比喷嘴横截面更大的区域上。速度和磨料分布的信息有助于选择最佳AJM条件和设计喷嘴形状。进行了陶瓷（AlN、SiC、Si_3N_4、玻碳、ZiO_2和玻璃）的加工试验，揭示了加工特性。此外，对于微型 AJM 应用，还尝试了微型钻孔、图案加工和过程中修整。 Micro-AJM技术展现了脆性材料微加工的优异性能。

项目成果

厨川: "グラッシーカーボンのマイクロ穴あけ加工(マイクロ・アブレイシブ・ジェット・マシニングに関する研究)" (日本機械学会講演会発表予定).

Kuriyakawa：“玻璃碳的微钻孔（微磨料喷射加工的研究）”（计划在日本机械工程师学会会议上发表）。

OSAMU KINBATA: "MICRO-DRILLING OF GLASSY CARBON (STUDIES OF MICRO-ABRASIVE JET MACHINING)" PROC.OF ABTEC '95. 107-109 (1995)

Osamu kinbata：“玻璃碳微钻孔（微磨料喷射加工的研究）”PROC.OF ABTEC 95。

厨川常元: "マイクロ アブレイシブ ジェット マシニングによるレジンボンド極微粒ダイヤモンドホイールのインプロセスドレッシング" 砥粒加工学会誌. 40(掲載待ち). (1996)

Tsunemoto Kuriyakawa：“通过微磨料喷射加工对树脂结合剂超细金刚石砂轮进行修整”，磨料加工协会杂志 40（即将出版）。

TSUNEMOTO KURIYAGAWA: "IN-PROCESS DRESSING OF RESINOID-BONDED ULTRA-FINE GRIT DIAMOND WHEEL WITH MICRO-ABRASIVE JET TECHNOLOGY" PROC.OF INTERNATIONAL MANUFACTURING ENGINEERING. (IN PRINTING). (1996)

TSUNEMOTO KURIYAGAWA：“采用微磨料喷射技术对树脂结合剂超细粒度金刚石砂轮进行过程修整”Proc.OF 国际制造工程。

T.Kuriyagawa: "In -Process Dressing of Resinoid-Bonded Ultra-Fine Grit Diamond Wheel with Micro-Abrasive Jet Technology" Proc.of International Manufacturing Engineering. (掲載待ち). (1996)

T.Kuriyakawa：“采用微磨料射流技术的树脂结合剂超细粒度金刚石砂轮的过程修整”，《国际制造工程》（待出版）。