DEVELOPMENT AND EVALUATION OF PRECISION ABRASIVE JET MACHINING DEVICE

精密磨料喷射加工装置的研制与评价

基本信息

批准号：
09555035
负责人：
KURIYAGAWA Tsunemoto
金额：
$ 7.17万
依托单位：
TOHOKU UNIVERSITY
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (B)
财政年份：
1997
资助国家：
日本
起止时间：
1997 至 1998
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-09555035/
关键词：
ABRASIVE JET MACHINING BLASTING POWDER SUPPLY SCHL IEREN METHOD FINE NOZZLE CERAMICS ETCHING PATTERNING AJM 粉体搬送装置シュリーレンノズル固気2相流

项目摘要

A new device of abrasive jet machining (MM) has been developed for precise etching and patterning of hard and brittle materials such as ceramics, glass and silicon. AJM process is similar to the sand blasting, and effectively removes hard and brittle materials. AIM uses fine abrasive powders and small nozzles whose inner diameter (ID) is below 1mm. As the abrasive jet stream from the nozzle is focused onto the workpiece, small holes or slots can be machined easily. As a conventional AIM device, however, can not control the amount of injecting abrasives precisely, it is difficult to apply to a precision machining. In machining small holes, furthermore, impacting abrasives are accumulated at the bottom of the hole, and prevent the direct impact onto the workpiece. As a result, machining efficiency decreases with the progress of machining. To solve these problems, we developed a new AIM device which is capable of intermittent injection of abrasives. Abrasive grains are supplied intermittently by the cycle of 10 ms using high speed solenoid valves, mixed with continuous stream of high pressure carrier gas, and finally blasted from the nozzle. The device can blast a small amount of abrasives (about 0.5 mg/one cycle). Grain density in the jet stream from the nozzle can be controlled by changing signal frequency for the solenoid valves, When the valve is off, there is no abrasives in the jet stream and the accumulated abrasives are blown off. In this report, machining characteristics of the new AJM device are investigated, and direct etching and patterning of glass without mask are demonstrated.

开发出一种新型磨料喷射加工（MM）设备，用于陶瓷、玻璃和硅等硬脆材料的精确蚀刻和图案化。 AJM工艺类似于喷砂，有效去除硬脆材料。 AIM使用细研磨粉和内径（ID）小于1mm的小喷嘴。由于来自喷嘴的磨料射流聚焦在工件上，因此可以轻松加工小孔或槽。然而，由于传统的AIM装置无法精确控制磨料的喷射量，因此难以应用于精密加工。此外，在加工小孔时，冲击磨料会积聚在孔的底部，阻碍对工件的直接冲击。结果，加工效率随着加工的进行而降低。为了解决这些问题，我们开发了一种新型AIM装置，它能够间歇性地注入磨料。使用高速电磁阀以10ms的周期间歇地供给磨粒，与连续的高压载气流混合，最后从喷嘴喷出。该装置可以喷砂少量磨料（约0.5毫克/一个周期）。通过改变电磁阀的信号频率可以控制从喷嘴喷出的喷射流中的颗粒密度，当电磁阀关闭时，喷射流中没有磨料，积聚的磨料被吹掉。在本报告中，研究了新型 AJM 设备的加工特性，并演示了无需掩模的玻璃直接蚀刻和图案化。