BASIC STUDY OF ELECTRO REOLOGICAL FLUID ASSISTED ULTRA-PRECISION POLISHING FOR 3-DIMENSIONAL SMALL PARTS.

三维小零件电流体辅助超精密抛光的基础研究。

基本信息

批准号：
08455066
负责人：
KURIYAGAWA Tsunemoto
金额：
$ 5.63万
依托单位：
TOHOKU UNIVERSITY
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (B)
财政年份：
1996
资助国家：
日本
起止时间：
1996 至 1997
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-08455066/
关键词：
ELECTRO REOLOGICAL FLUID POLISHING MICRO-GRINDING ER EFFECT ULTRA-FINE ABRASIVE SMALL DIAMETER WHEEL FIELD-ASSISTED FINE FINISHING (FFF)ダイヤモンド砥粒研削

项目摘要

This project deals with the development of a new machining method for small 3-demensional parts such as micro-aspherical lens, die and mirror. It is trying to machine the small parts utilizing a micro-grinding and polishing processes. A diamond quill for the conventional machining process has a small diameter (0.1-1.0mm), however manufacturing of the quill is very difficult and a tool life becomes short. A new method, which is one of field-assisted fine finishing methods, is developed to solve these problems. It is named an electro-reological (ER) fluid assisted polishing. In this process, polishing slurry is mixture of fine abrasive (diamond, GC or WA) and ER fluid. A strong electric field (0-3kV/mm) is applied between a very sharp tool like a needle (positive electrode) and a ground electrode (negative electrode). Then, viscosity of the ER fluid is increased, and the abrasive particles are softly hold around the tip of the tool. In this experiment, abrasive particles gathering around the tool tip are observed through a CCD microscope. It is clear that the each abrasive particle is connected with one another in a line like a string of beads, and moving with the ER fluid toward the tool tip. The tool tip is performed as a very small wheel in grinding and polishing the small parts. The necessary instrumentation and control system of the ER fluid assisted polishing have been designed and built. The polishing machine has a 3-axis nano-positioning table and an ultra-precision air spindle. Using this polishing system, basic machining tests were carried out. The polishing rate was 20mum/15min. The ER fluid assisted polishing method that we developed demonstrated excellent polishing performance. This method is applicable for manufacturing not only micro-size optics for industrial micro devices, but also micro-aspheric lens for medical applications such as an endoscope, which will be widely used in the near future.

该项目介绍了针对小三维部分（例如微型镜片，模具和镜子）的新加工方法的开发。它正在尝试使用微型磨削和抛光过程来加工小零件。传统加工过程的钻石羽毛岩的直径很小（0.1-1.0mm），但是羽毛笔的制造非常困难，工具寿命变短。开发了一种新方法，它是现场辅助的精细修饰方法之一，以解决这些问题。它被命名为电流（ER）流体辅助抛光。在此过程中，抛光浆液是细磨料（钻石，GC或WA）和ER流体的混合物。在非常锋利的工具（如阳性电极）和接地电极（负电极）等非常锋利的工具之间应用强电场（0-3kV/mm）。然后，增加了ER流体的粘度，并且在工具的尖端周围轻轻地固定磨料颗粒。在此实验中，通过CCD显微镜观察到围绕刀具聚集的磨料颗粒。显然，每个磨料粒子都在一条线等线上相互连接，并用ER流体向工具尖端移动。该工具尖端作为非常小的车轮进行磨削和抛光小零件。 ER流体辅助抛光的必要仪器和控制系统已设计和构建。抛光机有3轴纳米位置桌和超精确的空气主轴。使用此抛光系统，进行了基本的加工测试。抛光率为20m/15分钟。我们开发的ER流体辅助抛光方法表现出出色的抛光性能。该方法不仅适用于为工业微设备制造微型光学元件，还适用于用于内窥镜等医学应用的微型界面镜头，该镜头将在不久的将来广泛使用。