Study on Vision System for High Accurate Positioning and Process Control in Micro-Joining

微连接高精度定位与过程控制视觉系统研究

基本信息

批准号：
07455290
负责人：
FUJIMOTO Kozo
金额：
$ 0.58万
依托单位：
Osaka University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (B)
财政年份：
1995
资助国家：
日本
起止时间：
1995 至 1996
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-07455290/
关键词：
hight accurate positioning vision system separative viewing method variance of gray level binarizing pattern matching TAB (Tape Automated Bonding)loading control 超微細接合視覚計測高精度位置計測ステレオ視シングルポイントTAB接合

项目摘要

In tis study, the vision system for high accurate positioning and process control in the micro joining are discussed. The followings are results.1) High accurate visual sensing by imaging method with separated fields of vision.An separative wiewing method that is proposed in this research enables to take a image for the different two regions by a TV camera with a prism and makes possible a high accurate visual sensing.2) Pattern matching of micro joints using variance of gray level.We paid attention to the variance value which presents the distribution of gray level in a local region and clarified that the pattern matching by this variance value is the most effective for the change of the brightness caused by the surface roughness or the viewing condition.3) Automatic detection of micro joints by distinguished thresholding method.We proposed a new threshold selection method of the micro-joints images based on the statistical method and occurred probability distribution, and clarified that it is most effective that the automated extraction of micro-joint fields can be obtained the same result by this method when the change of the brightness caused.4) Low temperature and small deformation bonding by control of loading profile in single point TAB.The thermosonic bonding process used in the single point TAB technology is dominated by the plastic flow at the interface between a gold bump and TAB lead. In the initial contact process, the minimum loading force exists to obtain the contact, and the other hands, in the latter adhesion process, the contribution of the ultrasonic energy into the interface becomes larger under the lower loading force.

在TIS研究中，讨论了微精确定位和微型连接过程中的过程控制的视觉系统。以下是结果。1）通过具有分离视觉领域的成像方法高准确的视觉传感。本研究中提出的一种分离的浏览方法使得能够通过带有棱镜的电视摄像头来为不同的两个区域拍摄图像2）使用灰度差异将微接头的模式匹配。我们注意介绍局部区域中灰度分布的方差值，并阐明该方差值匹配的模式最大是有效地改变了表面粗糙度或观察条件引起的亮度。3）通过划界阈值方法自动检测微接头。我们提出了基于统计方法的微连接器图像的新阈值选择方法，并发生了概率分布，并阐明最有效的是，当造成的亮度变化时，可以通过该方法自动提取微接头场的自动提取。点选项卡。单点选项卡技术中使用的热键合过程主要由金凹痕和标签铅之间的界面处的塑料流动。在最初的接触过程中，存在最小载荷力以获得接触，而另一只手在后者的粘附过程中，在较低的载荷力下，超声波能量对界面的贡献变得更大。