Study OF Ultra-High Speed Heterojunction Bipolar Transistors with a Heavily Carbon-Doped Base
重碳掺杂基极超高速异质结双极晶体管的研究
基本信息
- 批准号:04555066
- 负责人:
- 金额:$ 11.65万
- 依托单位:
- 依托单位国家:日本
- 项目类别:Grant-in-Aid for Developmental Scientific Research (B)
- 财政年份:1992
- 资助国家:日本
- 起止时间:1992 至 1994
- 项目状态:已结题
- 来源:
- 关键词:
项目摘要
Heterojunction bipolar transistors (HBTs) have attracted much attention as high-speed devices. In this research, it was strongly proposed that for further improved device performance of HBTs, reduction of base resistance is greatly important. In other words, heavily doped base layr with the well-confined base dopant is one of key structural parameters for realizing high-speed HBTs.From these points, effects of reduced base resistance on static and dynamic characteristics of InGaP/GaAs HBTs with an ultra-high doped base were studied by solving the basic device equations and the hybrid-pi type equivalent circuit model. By increasing the base hole concentration to 1.5x10^<21>cm^<-3>, current gains were estimated to be over 10 by assuming the minority carrier lifetime gamma_n of 10-100ps, and current-gain cutoff frequency f_T of 110 GHz and maximum oscillation frequency f_<max> of 160 GHz were predicted. Switching characteristics were also studied by using a SPICE simulator, and propagatio … More n delay time t_<pd> of l ps/gate was achieved in that device structures.Based on this consideration, heavy impurity-doping technique is developed by using novel crystal growth technique : metalorganic molecular beam epitaxy (MOMBE) . Instead of conventional p-type dopants such as beryllium (Be) and zinc (Zn) for base layr in HBTs, carbon (C) is proposed as a novel base dopant because of excellent stability and capability of heavy doping. Heavily carbon-doped p-type GaAs and InGaAs were developed as base materials by MOMBE with trimethylgallium (TMG) , and carbon-doping characteristics and electrical, optical and structural properties were studied in detail. Furthermore, phosphide materials such as InGaP and InP are also proposed in this research as novel emitter materials of the HBTs because of the tendency of low surface recombination velocity, and MOMBE growth of these compounds is investigated with new metalorganic phosphorus precursor : tertiarybutylphosphine (TBP) .In the growth of high quality materials, the catalysis by means of heated tantalum (Ta) inside the cracking cell was important to effectively decompose the TBP as compared to simple pyrolysis. Controllability of Si-doping in In_<0.5>Ga_<0.5>P suitable for HBT application was also studied by using cracked Si_2H_6. In the growth of InP by MOMBE with TBP,it was revealed that carbon from the TBP is incorporated and acts as well-activated donor.By combining these MOMBE growth techniques, InP/InGaAs HBTs with carbon-doped n-type InP emitter and carbon-doped p-type InGaAs base are proposed and fabricated for the first time in the world. In common-emitter static characteristics, relatively large commonemitter breakdown voltage BV_<CEO>above 6 V was achieved, and small signal current gain h_<fe> of 20 and d.c.current gain h_<FE> of 11 were obtained at collector current density J_C of 0.15kA/cm^2 for a device with emitter area A_E of 80*80mum^2.Furthermore, InGaP/GaAs HBTs having an ultrahigh carbon-doped base with a hole concentration of the order of 10^<21>cm^<-3> are realized for the first time. By using that device structure, improved high-frequency performance is strongly expected because base resistance could be extremely decreased due to the ultra-high doping in the base. In fact, h_<fe> of 16 and h_<FE> of 12 were obtained for devices with a base thickness of 15 nm. In the reliability measurements, a significant degradation of current gain was not observed in the range investigated, indicating a perfect stability of carbon as a p-type dopant. In conclusions, successful realization of HBTs with unique original structures ; Inp/InGaAs HBTs with carbon-doped InP emitter and carbondoped InGaAs base and InGap/GaAs HBTs with an ultra-high carbon-doped base (p=1.5*10^<21>cm^<-3>) , was studied for the first time. Less
异射线两极发射器(HBT)吸引了作为高速设备的广泛关注。在这项研究中,强烈建议,为了进一步提高HBT的设备性能,降低基本电阻非常重要。换句话说,具有良好的基础掺杂剂是实现高速HBT的关键结构参数之一。从这些要点,通过求解基本设备等电期,通过求解了超高掺杂基础的Ingap/Gaas HBT的静态和动态特征的降低对基础/GAAS HBT的静态和动态特征的降低对静态和动态特征的影响。通过将基本孔浓度提高到1.5x10^<21> cm^<-3>,通过假设少数载流子寿命gamma_n为10-100ps,电流的增长估计超过10,而电流增益的截止频率为110 GHz和最大振荡频率f_ax> 160 GHz的最大振荡频率f_ max>。开关特性还通过使用香料模拟器进行了研究,并在该设备结构中实现了L ps/gote的延迟时间t_ <pd>更多的pasgaTio。基于此考虑,通过使用新颖的晶体生长技术开发了重型杂质兴奋剂技术:金属有机分子束束(MOMBER(MOMBE))。碳(c)不是传统的p型掺杂剂,例如贝莱群(BE)和锌(Zn),而是由于浓度的出色稳定性和能力,因此提出了碳(C)作为一种新型的基础掺杂剂。用三甲基甲基(TMG)的MOMBE开发了大量碳掺杂的P-type GAA和INGAA,并详细研究了碳掺杂特性以及电气,光学和结构特性。 Furthermore, phosphide materials such as InGaP and InP are also proposed in this research as novel emitter materials of the HBTs because of the tendency of low surface recombination velocity, and MOMBE growth of these compounds is investigated with new metalorganic phosphorus precursor: tertiarybutylphosphine (TBP) .In the growth of high quality materials, the catalyst by means of heated tantalum (Ta) inside the与简单的热解相比,开裂细胞对于有效分解TBP很重要。还使用破裂的SI_2H_6研究了适合HBT应用的IN_ <0.5> Ga_ <0.5> P中Si掺杂的可控性。在MOMBE与TBP的INP增长中,据透露,来自TBP的碳被合并并作为充分激活的供体。通过将这些MOMBE增长技术相结合,INP/INGAAS HBT与碳掺杂的N型N型N型INP INP INP和碳竞争P-type的P-type IngaAS基础是拟议的,并且是Frimed fragity和Frunce in Yearking in World in World in World inthe World in the World。在公共发射极的静态特征中,达到了6 V上方的相对大型公共发射器崩溃电压bv_ <ceo>,并且在收集器电流密度为0.15ka/cm^2的收集器电流密度j_c/cm^2的设备中,获得了11个h_e a_e/gay的设备,并获得了少量信号电流增益H_ <fe>,h_ <efe> 11获得了11个*80*80mers a__e a _ _ 80*fur的设备。首次实现具有10^<21> cm^<-3>孔浓度的超高碳掺杂底座。通过使用该设备结构,高频性能得到了强烈的预期,因为由于底座中的超高掺杂,基本电阻可能会极大地降低。实际上,对于基本厚度为15 nm的设备,获得了16和h_ <fe> 12的H_ <fe>。在可靠性测量值中,在研究范围内未观察到当前增益的显着降解,表明碳作为P型掺杂剂的完美稳定性。总而言之,成功实现具有独特原始结构的HBT; INP/INGAAS HBTS具有碳掺杂的INP发射极和碳掺杂的INGAAS底座和具有超高碳掺杂底座的INGAP/GAAS HBT(P = 1.5*10^<21> cm^<-3>),首次研究了。较少的
项目成果
期刊论文数量(36)
专著数量(0)
科研奖励数量(0)
会议论文数量(0)
专利数量(0)
K.Nagao: "Low Temperature Growth of Heavily Carbon-Doped GaAs by Metalorganic Molecular Beam Epitaxy with Elemental Gallium" Appl.Phys. (to be published). (1994)
K.Nagao:“通过金属有机分子束外延与元素镓低温生长重碳掺杂 GaAs”Appl.Phys。
- DOI:
- 发表时间:
- 期刊:
- 影响因子:0
- 作者:
- 通讯作者:
R.T.Yoshioka: "Effect of the Ga-flux addition on MOMBE growth of carbon-doped p-type InGaAs and GaAs" 12th Record of Alloy Semiconductor Physics and Electronics Symposium. (1993)
R.T.Yoshioka:“添加Ga助熔剂对碳掺杂p型InGaAs和GaAs MOMBE生长的影响”第12届合金半导体物理与电子学研讨会记录。
- DOI:
- 发表时间:
- 期刊:
- 影响因子:0
- 作者:
- 通讯作者:
J.Shirakashi: "Enhanced carbon incorporation in InGaAs grown at low temperature by metalorganic molecular beam epitaxy (MOMBE)" Extended Abst.of Internationnal Conf.on SSDM. 705-706 (1992)
J.Shirakashi:“通过金属有机分子束外延 (MOMBE) 在低温下生长的 InGaAs 中增强碳结合”SSDM 国际会议扩展摘要。
- DOI:
- 发表时间:
- 期刊:
- 影响因子:0
- 作者:
- 通讯作者:
M.Shirahama: "Growth of carbon-doped GaAs by MBE using neopentane as a novel carbon source" 19th International Symposium on GaAs and related compounds. (1992)
M.Shirahama:“使用新戊烷作为新型碳源通过 MBE 生长碳掺杂的 GaAs”第 19 届 GaAs 及相关化合物国际研讨会。
- DOI:
- 发表时间:
- 期刊:
- 影响因子:0
- 作者:
- 通讯作者:
E.Tokumitsu: "Heavily Carbon-Doped P-Type InGaAs by MOMBE" J.Crystal Growth. 120. 301-305 (1992)
E.Tokumitsu:“MOMBE 的重碳掺杂 P 型 InGaAs”J.晶体生长。
- DOI:
- 发表时间:
- 期刊:
- 影响因子:0
- 作者:
- 通讯作者:
{{
item.title }}
{{ item.translation_title }}
- DOI:
{{ item.doi }} - 发表时间:
{{ item.publish_year }} - 期刊:
- 影响因子:{{ item.factor }}
- 作者:
{{ item.authors }} - 通讯作者:
{{ item.author }}
数据更新时间:{{ journalArticles.updateTime }}
{{ item.title }}
- 作者:
{{ item.author }}
数据更新时间:{{ monograph.updateTime }}
{{ item.title }}
- 作者:
{{ item.author }}
数据更新时间:{{ sciAawards.updateTime }}
{{ item.title }}
- 作者:
{{ item.author }}
数据更新时间:{{ conferencePapers.updateTime }}
{{ item.title }}
- 作者:
{{ item.author }}
数据更新时间:{{ patent.updateTime }}
KONAGAI Makoto其他文献
KONAGAI Makoto的其他文献
{{
item.title }}
{{ item.translation_title }}
- DOI:
{{ item.doi }} - 发表时间:
{{ item.publish_year }} - 期刊:
- 影响因子:{{ item.factor }}
- 作者:
{{ item.authors }} - 通讯作者:
{{ item.author }}
{{ truncateString('KONAGAI Makoto', 18)}}的其他基金
Development of High Efficiency Thin-Substrate Silicon Solar Cells with Controlled Nano-Interface
具有受控纳米界面的高效薄基板硅太阳能电池的开发
- 批准号:
22246001 - 财政年份:2010
- 资助金额:
$ 11.65万 - 项目类别:
Grant-in-Aid for Scientific Research (A)
Study of Novel Silicon Heterojunction Solar Cells with Controlled Fixed Charge
新型可控固定充电硅异质结太阳能电池的研究
- 批准号:
19206001 - 财政年份:2007
- 资助金额:
$ 11.65万 - 项目类别:
Grant-in-Aid for Scientific Research (A)
Position control of InAs quantum dots by using AFM oxidation method and application to single electron transistor
AFM氧化法InAs量子点位置控制及其在单电子晶体管中的应用
- 批准号:
13450124 - 财政年份:2001
- 资助金额:
$ 11.65万 - 项目类别:
Grant-in-Aid for Scientific Research (B)
Research of Epitaxial Growth and Electrical Analysis of Si-Ge-C Layer
Si-Ge-C层外延生长及电学分析研究
- 批准号:
10450114 - 财政年份:1998
- 资助金额:
$ 11.65万 - 项目类别:
Grant-in-Aid for Scientific Research (B)
Development of nanofabrication technology of metallic p-GaAs and its application to single hole transistors
金属p-GaAs纳米加工技术进展及其在单孔晶体管中的应用
- 批准号:
10555101 - 财政年份:1998
- 资助金额:
$ 11.65万 - 项目类别:
Grant-in-Aid for Scientific Research (B).
Study of Nitrogen Doping of ZnSe by Catalysis of Transition Metals
过渡金属催化ZnSe氮掺杂研究
- 批准号:
06452109 - 财政年份:1994
- 资助金额:
$ 11.65万 - 项目类别:
Grant-in-Aid for General Scientific Research (B)
Control of the arrangement of native vacancies and optical in III-VI compound semiconductors
III-VI族化合物半导体中原生空位和光学排列的控制
- 批准号:
04452088 - 财政年份:1992
- 资助金额:
$ 11.65万 - 项目类别:
Grant-in-Aid for General Scientific Research (B)
Investigation of Heterojunction Bipolar Transistors Using Metallic P-Type Base Layer
使用金属 P 型基层的异质结双极晶体管的研究
- 批准号:
01460136 - 财政年份:1989
- 资助金额:
$ 11.65万 - 项目类别:
Grant-in-Aid for General Scientific Research (B)
Development of Low-Temperature Epitaxy of Silicon by Photo-Chemical Vapor Deposition
光化学气相沉积硅低温外延技术的进展
- 批准号:
62850053 - 财政年份:1987
- 资助金额:
$ 11.65万 - 项目类别:
Grant-in-Aid for Developmental Scientific Research
相似国自然基金
面向城市高异质性地表的植被碳汇遥感估算研究
- 批准号:42371322
- 批准年份:2023
- 资助金额:46 万元
- 项目类别:面上项目
有机添加物对旱区盐渍化农田水盐碳氮关键过程影响机制
- 批准号:52309070
- 批准年份:2023
- 资助金额:30 万元
- 项目类别:青年科学基金项目
磁性金属@碗状介孔碳复合材料的可控构建及其宽频吸波机制研究
- 批准号:52301192
- 批准年份:2023
- 资助金额:30 万元
- 项目类别:青年科学基金项目
真菌菌丝体对黄土高原草地土壤有机碳形成的作用机制
- 批准号:42307440
- 批准年份:2023
- 资助金额:30 万元
- 项目类别:青年科学基金项目
碳中和目标下能源“不可能三角”综合评价模型及其应用研究
- 批准号:72374122
- 批准年份:2023
- 资助金额:40 万元
- 项目类别:面上项目
相似海外基金
Understanding and Improving Electrochemical Carbon Dioxide Capture
了解和改进电化学二氧化碳捕获
- 批准号:
MR/Y034244/1 - 财政年份:2025
- 资助金额:
$ 11.65万 - 项目类别:
Fellowship
Bio-MATSUPER: Development of high-performance supercapacitors based on bio-based carbon materials
Bio-MATSUPER:开发基于生物基碳材料的高性能超级电容器
- 批准号:
EP/Z001013/1 - 财政年份:2025
- 资助金额:
$ 11.65万 - 项目类别:
Fellowship
Low Carbon Impact AI-Enabled Net Zero Advisory Solution
低碳影响人工智能支持的净零咨询解决方案
- 批准号:
10112272 - 财政年份:2024
- 资助金额:
$ 11.65万 - 项目类别:
SME Support
Open University (The) and Low Carbon Europe Limited KTP 23_24 R2.
开放大学 (The) 和低碳欧洲有限公司 KTP 23_24 R2。
- 批准号:
10077030 - 财政年份:2024
- 资助金额:
$ 11.65万 - 项目类别:
Knowledge Transfer Partnership
A sustainable, healthier and significantly lower carbon emitting UK produced cocoa-free chocolate
可持续、更健康且碳排放显着降低的英国生产的无可可巧克力
- 批准号:
10083944 - 财政年份:2024
- 资助金额:
$ 11.65万 - 项目类别:
Investment Accelerator