Ultra-high Speed and Ultra-precision Positioning by Friction Drive

摩擦驱动超高速超精密定位

基本信息

批准号：
04402027
负责人：
OTSUKA Jiro
金额：
$ 10.56万
依托单位：
Shizuoka Institute of Science and Technology (1993)Tokyo Institute of Technology (1992)
依托单位国家：
日本
项目类别：
Grant-in-Aid for General Scientific Research (A)
财政年份：
1992
资助国家：
日本
起止时间：
1992 至 1993
项目状态：
已结题

项目摘要

The positioning apparatus is made which consists of the DC servometer, the drive wheel, the slider moved longitudinally by the friction force between the drive wheel and a slider, the table, its displacement measuring apparatus by laser and the controller. The following results can be obtained ;1. For 1mum step responses repeated 100 times by PI control, the mean of the positioning errors E at 0.5 s after the table start, e.is -1.7nm, and their standard deviation, sigma, is 3.2 nm.2. For 300 mm step responses, the modified velocity control is applied at the large displacement difference DELTAx between the target position x and table position y (DELTAx=x-y). Afterwards, at the small displacement of DELTAx, the table displacement feed-back control is applied. As a result of 100 times positioning trials, e=0.016 mum and sigma=0.17 mum at 2 s after the table start. The setting time, when the table comes into (〕SY.+-.〔)1 mum from the target position, is Ts=1.26s(mean).3. There is a nonlinear elastic relationship between the small torque of the motor, T, and resultant small table displacement, y. Furthermore, for much smaller torque and table displacement, its relationship shows a better linearity, and plays an important role for obtaining nm positioning accuracy.4. In comparison with the apparatus by the leadscrew drive, the driving force is larger for the apparatus by the friction drive. The noise and vibration during operation can not be measured.5. This friction drive is applied to the driving system for the newly-developed nm surface grinder.

定位设备由DC用户表，驱动轮，滑块组成，滑块通过驱动轮和滑块之间的摩擦力纵向移动，桌子，其位移测量激光器和控制器。可以获得以下结果； 1。对于1MUM步骤响应，通过PI控制重复100次，桌子启动后0.5 s的定位误差E的含义E.IS -1.7nm，其标准偏差Sigma为3.2 nm.2。对于300 mm步长响应，在目标位置X和表位置Y（deltax = X-Y）之间的大位移差异上应用了修改的速度控制。之后，在达尔塔克斯州的较小位移下，应用表位移后馈控制。由于定位试验的100倍，E = 0.016 MUM和Sigma = 0.17 MUM，在桌子开始后2 s。当桌子从目标位置进入（>sy。+ - 。〔）时的设置时间为TS = 1.26S（平均）.3。电动机的小扭矩和由此产生的小表位移之间存在非线性弹性关系，y。此外，对于较小的扭矩和表位移，其关系显示出更好的线性性，并且在获得NM定位精度方面起着重要作用。4。与Leadscrew Drive相比，摩擦驱动器的设备驱动力更大。无法测量操作过程中的噪声和振动5。这种摩擦驱动器应用于新开发的NM表面研磨机的驾驶系统。