Small Ultraprecision Positioning Device with Sub-nanometer Resolution Considering Thermal Deformation Drift

考虑热变形漂移的亚纳米分辨率小型超精密定位装置

• 批准号: 14350076
• 负责人: OTSUKA Jiro
• 金额: $ 9.47万
• 依托单位: Shizuoka Institute of Science and Technology
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 2002
• 资助国家: 日本
• 起止时间: 2002 至 2004
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-14350076/
• 关键词: Ultraprecision Positioning; Thermal Deformation; Visual Servo; Sub-nanometer Resolution; Low Heat Expansion Material; Nanotechnology; サブナノメートル

(1) Displacement sensors with resolution of 0.2, 0.5 and 1 nm were developed.(2) Very small ultraprecision positioning devices with resolution of 0.2, 0.5 and 1 nm were developed.(3) When the ultraprecision device is used for long time, the device deforms thermally by the heat from the motor. The vertical and horizontal thermal drifts on the device stage were measured. Four kinds of materials were used for the device stage, base and base support. As the result, the device made of stainless steel showed the largest thermal drift. The device made of low thermal expansion material didn't show smaller thermal drift than that we expected.(4) In order to eliminate the drift perfectly, a visual servo system was developed on the optical microscope. We could observe the observed object at the center of the visual field of the microscope.(5) Several kinds of the cormterplans to decrease the thermal drift of the ultraprecision device are shown as follows ; (1) To make the heat of the motor to flow to the base support. (2) To insert an adiabatic material between the motor and the base. (3) To cool the device by some kinds of methods.

（1）开发了分辨率为0.2、0.5和1 nm的位移传感器。（2）开发了分辨率为0.2、0.5和1 nm的非常小的超压缩定位设备。（3）长期使用超压缩设备时，该设备通过电动机的热量热变形。测量了设备阶段的垂直和水平热漂移。设备阶段，基础和基础支撑物使用了四种材料。结果，由不锈钢制成的装置显示出最大的热漂移。由低热膨胀材料制成的设备没有显示出比我们预期的较小的热漂移。（4）为了完美消除漂移，光学显微镜上开发了视觉伺服系统。我们可以在显微镜视野中心观察观察到的物体。（5）几种cormterplans降低了超压缩装置的热漂移，如下所示； （1）使电动机的热量流到基础支撑。 （2）在电动机和底座之间插入绝热材料。 （3）通过某些方法冷却设备。

项目成果

Development of Small Displacement Sensor and Small Ultraprecision Positioning Device with 1nm Resolution (in Japanese)

1nm分辨率小型位移传感器及小型超精密定位装置的开发（日文）

• 发表时间: 2003
• 期刊: J.Japan Society for Precision Engineers Vol.69,No.10
• 作者: J.Otsuka;S.Ichikawa;Y.Yamaguchi
• 通讯作者: Y.Yamaguchi

Developmento of Ultraprecision Positioning Device with 5nm Resolution

5nm分辨率超精密定位装置的研制

• 发表时间: 2005
• 期刊: Measurement of Science and Technology (IOP) 16(to be published)
• 作者: J.Otsuka;S.ichikawa;K.Suzuki
• 通讯作者: K.Suzuki

大塚二郎: "超の世界-超精密位置決め"自動車技術. 57, 6. 115-116 (2003)

大冢次郎：《超级世界-超精密定位》汽车技术 57, 6. 115-116 (2003)。

大塚二郎: "位置決め設計特集(3)ナノメートル位置決め機構設計の最前線"日経メカニカルD&M. 577. 128-138 (2002)

大冢二郎：《定位设计专刊(3)纳米定位机构设计的前沿》《日经机械D&M》577. 128-138 (2002)

Nanotechnology and Ultraprecision Technology (in Japanese)

纳米技术和超精密技术（日语）

• 发表时间: 2005
• 作者: Mutsumi TOUGE;Junji WATANABE;H.Soyama;大塚二郎;宇野義幸;J Otsuka
• 通讯作者: J Otsuka