Study of Nanometer Accuracy Positioning in Consideration of Feed Element and Guide Elements

考虑进给元件和导向元件的纳米级精度定位研究

基本信息

批准号：
04302030
负责人：
OTSUKA Jiro
金额：
$ 6.34万
依托单位：
Shizuoka Institute of Science and Technology (1993)Tokyo Institute of Technology (1992)
依托单位国家：
日本
项目类别：
Grant-in-Aid for Co-operative Research (A)
财政年份：
1992
资助国家：
日本
起止时间：
1992 至 1993
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-04302030/
关键词：
Ultraprecision Positioning Nanometer accuracy Feed elements Guide elements 超精密位置決め

项目摘要

1. Feed Elements(1)Ball screws : Fundamental data, concerning the nut preload control, were abtained and applied to a practical machine (S.Fukada). (2)Friction drive : The reason became clear why the nonlinear elastic characteristic on the driving point varied along the table movement (J.Otsuka). By the simulation of the positioning appratus, the designing method was established (H.Shimizu).2. Guide elements(1)Rolling guides : The positioning charasteristics were made clear about several kinds of rolling guide (M.Izawa). When the railway had misalignment, the table tilting motion and friction change was analyzed (S.Shimizu).(2)Hydrostatic air bearing : The bearing with double restristors was newly developed and its experimental and theoretical results showed that it was very effective to obtain infinite stiffness (S.Togo and O.Saito). The bearing with sub-mum clearance was manufactured and its dynamic characteristics were studied (S.Yoshimoto).3. Parallel springsThe characteristics of … More displacement magnification mechanism attached to the parallel springs were made clear (Y.Yoshimura).4. SensingAs for the diffraction moire sensor, an optimal design using soft and hard methods was established for settling a precise angular position (Y.Uchida). By applying the sensor fusion to the lathe, effective results could be obtained to get good surface and contour (M.Shiraishi).5. Positioning below 100nm accuracyOn the foundation of the above results, the new several positioning apparatuses were developed and high performance for ultraprecision positioning could be achieved with the positioning accuracy below 0.1mum (100nm) ; The positioning characteristics of the aerodynamic drive motor was studied (Y.Uchida). The experiment showed that double integration of the table acceleration without position sensor during table movement was capable of rough positioning (S.Fukada). Precise tilting of the rotating table for the facing lathe be controlled within the sensor resolution (Y.Aoyama). The minute-displacement table to obtain several nm cutting depth and 10nm surface flatness to grind the brittle materials was manufactured for the ultraprecision surface grinder, which could give 5nm displacement resolution, infinite stiffness and frequency bandwidth of 80 Hz (K.Furutani and J.Otsuka). An open-loop type positioning system a ball screw and ball linear guide could gain 0.1mum positioning resolution (S.Shimizu). Less

1。驱动器：原因很清楚，沿桌子运动的驾驶点上的非线性弹性特征（J.Otsuka）。清晰地进行了几种滚动指南（M.Izawa）。为了获得无限的Stifff（S.Togo和O.Saito）。 Yoshimura）.4。）。定位100nm uracyon上述结果的基础，新的严重性定位仪，用于超级态度的高性能在桌子运动过程中，没有位置传感器的表加速度的双重整合能够进行粗糙的定位（s.fukada）。磨床可以提供5Nm的位移分辨率，无限刚度和频率带宽8 0 Hz（K.Furutani和J.Otsuka）。 Shimizu）