Preparation of Amorphous Thin Films with High Elasticity

高弹性非晶薄膜的制备

基本信息

批准号：
03650623
负责人：
HANADA Teiichi
金额：
$ 1.22万
依托单位：
KYOTO UNIVERSITY
依托单位国家：
日本
项目类别：
Grant-in-Aid for General Scientific Research (C)
财政年份：
1991
资助国家：
日本
起止时间：
1991 至 1992
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-03650623/
关键词：
Amorphous Thin Film Rf-Sputtering Young's Modulus Amorphous Alumina-Titania Film High Elasticity Amorphous AlN Film 非晶質AlN膜 Al_2O_3ーTiO_2系膜

项目摘要

Among various properties of solid materials, elastic properties such as Young's modulus, bulk modulus, shear modulus and Poisson's ratio are of considerable interest from both scientific and technical aspects. It is known that the glasses containing the constituents with high bond strength and/or having high coordinated state of network forming cations could achieve high elastic moduli. However, since it is not easy to make the glasses with high coordinated state of cations by ordinary melting-quenching procedure, other glass making processes such as sputtering, CVD and sol-gel methods have to be explored. In this project, radio-frequency sputtering method was applied to make amorphous thin films in the systems Al_203-AlN and Al_2O_3-TiO_2. The elastic moduli commonly increase as nitrogen is introduced into a glass. However, in the Al_2O_3-AlN system, the elastic moduli decreased as AlN was added to amorphous Al_2O_3. This result can be successful to be explained by decrease of the higher coordinated aluminum ions. On the other hand, the high coordinated state of cations could be achieved in rf-sputtered amorphous films in the system Al_2O_3-TiO_2, and their elastic moduli were measured. The amorphous film of 16Al_2O_3.84TiO_2 showed the maximum value of Young's modulus, 175GPa, in this system, which is higher than any other glass ever known.

在固体材料的各种特性中，诸如Young的模量，散装模量，剪切模量和Poisson的比例等弹性特性都引起了科学和技术方面的极大兴趣。众所周知，含有高键强度和/或具有高配位网络形成阳离子状态的成分的玻璃可以实现高弹性模量。但是，由于通过普通熔化程序制作具有高配位阳离子的眼镜并不容易，因此必须探索其他玻璃制作过程，例如溅射，CVD和SOL-GEL方法。在此项目中，应用射频溅射方法用于在系统AL_203-ALN和Al_2O_3-TIO_2中制作无定形薄膜。弹性模量通常会随着氮引入玻璃而增加。但是，在AL_2O_3-ALN系统中，弹性模量随着ALN的添加到无定形的Al_2O_3时降低。通过较高协调的铝离子减少，可以成功解释该结果。另一方面，在系统AL_2O_3-TIO_2中的RF输出的无定形膜中可以实现高配位阳离子状态，并测量其弹性模量。在该系统中，16AL_2O_3.84TIO_2的无定形膜显示了Young的模量175GPA的最大值，该模量比任何其他已知的玻璃都高。