Development of the System for Measuring Elastic Modulus of Ceramics Thin Films under the Various Atmospheres

各种气氛下陶瓷薄膜弹性模量测量系统的研制

基本信息

批准号：
63850166
负责人：
HANADA Teiichi
金额：
$ 6.27万
依托单位：
KYOTO UNIVERSITY
依托单位国家：
日本
项目类别：
Grant-in-Aid for Developmental Scientific Research
财政年份：
1988
资助国家：
日本
起止时间：
1988 至 1989
项目状态：
已结题

项目摘要

For the purpose of measuring elastic properties of ceramics thin films, the measuring system using the cantilever beam vibrating reed method was developed. Both Young's modulus and Poisson's ratio can be determined. The elastic moduli of the sputtered aluminum and amorphous SiO_2, films were measured by this system. The obtained values were good agreement with the elastic moduli of their bulky materials. The results show that the developed measuring system is a powerful means to determine the elastic constants of ceramic thin films. In addition, the elastic moduli of rf-sputtered amorphous films in the systems SiO_2-Al_2O_3 and AlPO_4-Al_2O_3 were measured. The coordination state of aluminum ions in the amorphous films were evaluated from the relationship between the bulk modulus and the mean atomic volume. The obtained results are good agreement with our results of the coordination state of aluminum ions determined by the data of the other physical properties.In order to measure the elastic modulus of thin films at high temperature, the new measuring system, which uses the vibrational resonance method, was developed. By this measuring system, Young's modulus and its temperature coefficient of a deposited aluminum film were measured. These values were good agreement with Young's modulus and its temperature coefficient of bulky aluminum metal. This result shows that the measuring system is an efficient means to determine Young's modulus of thin film at high temperature. Moreover, the temperature coefficient of Young's modulus of an amorphous AlPO_4 film, prepared by rf-sputtering method, was measured. The coefficient was positive value. The positive temperature coefficient of Young's modulus, "elastic anomaly", is characteristic of the amorphous materials with an open network structure, such as SiO_2 and GeO_2 glasses. This result shows that an amorphous ALPO_4 film has a three dimensional network structure made of AlO_4 and PO_4 tetrahedra.

为了测量陶瓷薄膜的弹性特性，开发了使用悬臂束振动芦苇方法的测量系统。 Young的模量和Poisson的比例都可以确定。该系统测量了溅射铝和无定形SIO_2的弹性模量。获得的值与其笨重材料的弹性模量很好。结果表明，开发的测量系统是确定陶瓷薄膜的弹性常数的强大手段。此外，测量了系统sio_2-al_2o_3和alpo_4-al_2o_3中RF输出的无定形膜的弹性模量。从大量模量与平均原子体积之间的关系中评估了无定形膜中铝离子的配位状态。获得的结果与我们的铝离子协调状态的结果非常吻合，该结果由其他物理特性的数据确定。为了在高温下测量薄膜的弹性模量，开发了使用振动谐振方法的新测量系统。通过该测量系统，测量了Young的模量及其沉积铝膜的温度系数。这些值与Young的模量及其笨重铝金属的温度系数非常吻合。该结果表明，测量系统是在高温下确定Young薄膜模量的有效手段。此外，测量了通过RF分解方法制备的无定形Alpo_4膜的Young模量的温度系数。系数为正值。 Young模量“弹性异常”的正温系数是具有开放网络结构的无定形材料的特征，例如SIO_2和GEO_2玻璃。该结果表明，无定形的Alpo_4膜具有由Alo_4和PO_4 Tetrahedra制成的三维网络结构。