Ultrasonic Microspectroscopy of Ultra-High-Quality Synthetic a-Quartz

超高品质合成 a-石英的超声波显微光谱

基本信息

批准号：
13555085
负责人：
KUSHIBIKI Jun-ichi
金额：
$ 8.9万
依托单位：
Tohoku University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (B)
财政年份：
2001
资助国家：
日本
起止时间：
2001 至 2002
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-13555085/
关键词：
Ultrasonic microspectroscopy LFB PW ultrasonic material characterization system Synthetic α-quartz Natural α-quartz BAW velocity LSAW velocity Acoustical physical constants Density LFB超音波材料解析システム漏洩弾性表面波誘電率

项目摘要

Ultrasonic microspectroscopy technology, using the line-focus-beam (LFB) and plane-wave (PW) ultrasonic material characterization (UMC) system, has been applied to establish evaluation techniques for synthetic α-quartz crystals for bulk acoustic wave (BAW) and surface acoustic wave (SAW) devices and to accurately measure the acoustical physical constants. The purpose of this study was to provide a new, worldwide guideline and standard for synthetic α-quartz in the industrial and scientific fields.1. Measurement accuracies of the LFB ultrasonic material characterization system and bulk ultrasonic spectroscopy system have been improved.2. Development of new methods for determining the acoustical physical constants of class-32 crystals and determination of the constants of synthetic and natural α-quartz:(1) A new BAW method to accurately determine all of the independent components of the acoustical physical constants for class-32 crystals was developed. This method requires to measure lon … More gitudinal and shear velocities, dielectric constants, and density, using X-, Y-, and Z-cut specimens and several rotated Y-cut specimens. The demonstration was conducted for SAW-grade synthetic α-quartz. The results provided the constants that give BAW velocities within an accuracy of ±0.2 m/s (±0.004%).(2) To compare the acoustic properties between natural and synthetic α-quartz, longitudinal and shear velocities, and LSAW velocities were measured using X-, Y-, and Z-cut specimens. All the velocity differences were within 1.00 m/s, and it was clarified that the acoustical physical constants of the natural quartz, were, very similar to those of synthetic quartz.(3) Another new method for determining all the constants for class-32 crystals by measuring LSAW velocities in addition to BAW velocities for there principal X-, K and Z-cut specimens using the LFB/PW UMC system was developed. This method was applied for natural α-quartz.(4) Precise values of the constants for natural quartz were also determined using the BAW method developed here.3. BAW velocities. LSAW velocities, density and lattice parameters were measured for the specimens prepared from several synthetic α-quartz crystal ingots with different growth conditions. Slight velocity differences were detected. The velocity changes related to the impurity concentration, especially OH content, were different for the propagation directions and propagation modes. Lattice constant a was constant, but c became larger as the OH content became higher. Less

超声显微光谱技术采用线聚焦束（LFB）和平面波（PW）超声材料表征（UMC）系统，已应用于建立体声波（BAW）和合成α-石英晶体的评估技术。本研究的目的是为工业和科学领域的合成α-石英提供新的、全球性的指南和标准。提高了LFB超声材料表征系统和体相超声光谱系统的精度。2．开发了测定32类晶体声学物理常数和测定合成和天然α-石英常数的新方法：（1）开发了一种新的 BAW 方法，可以准确确定 32 类晶体的声学物理常数的所有独立分量。该方法需要测量纵向速度和剪切速度。使用 X、Y 和 Z 切割样本以及几个旋转 Y 切割样本进行了演示，结果提供了给出 BAW 速度的常数。精度为 ±0.2 m/s (±0.004%)。(2) 为了比较天然和合成 α-石英之间的声学特性，使用测量了纵向和剪切速度以及 LSAW 速度X、Y 和 Z 切割样本的所有速度差均在 1.00 m/s 以内，并且表明天然石英的声学物理常数与合成石英非常相似。(3)另一种确定 32 类晶体所有常数的新方法，除了使用 LFB/PW 测量主要 X、K 和 Z 切割样本的 BAW 速度之外，还测量 LSAW 速度开发了UMC系统。该方法应用于天然α-石英。(4)也使用本文开发的BAW方法获得了天然石英常数的精确值。3. LSAW速度、测定的密度和晶格参数。对由不同生长条件的几种合成α-石英晶锭制备的样品进行了测量，发现与杂质浓度（特别是OH含量）相关的速度变化是不同的。晶格常数a是恒定的，但c随着OH含量的增加而变大。