Development of Ultrasonic Microspectroscopy for Characterization of Layered and Damaged Surfaces on Single Crystal Substrates

用于表征单晶基底上的层状和损伤表面的超声波显微光谱学的发展

基本信息

批准号：
10555099
负责人：
KUSHIBIKI Jun-ichi
金额：
$ 8.19万
依托单位：
TOHOKU UNIVERSITY
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (B)
财政年份：
1998
资助国家：
日本
起止时间：
1998 至 1999
项目状态：
已结题

项目摘要

Ultrasonic microspectroscopy technology, using the line-focus-beam (LFB) and plane-wave ultrasonic material characterization system, has been applied to analyze material surface properties introduced by slicing, lapping, and polishing to prepare wafer substrates from single crystal ingots or with very thin layers on the substrates formed by proton-exchanged and ion-implanted methods.1. The reliable LFB system with high accuracy in the velocity measurement of leaky surface-acoustic-waves (LSAWs) on the water-loaded specimen surfaces has been established, operating up to 900 MHz using several LFB ultrasonic devices.2. A method of evaluating material surfaces damaged or roughened by measuring longitudinal-wave reflection coefficients as a function of frequency when the waves are incident normally to the specimen surface through a water couplant has been developed.3. A system of the X-ray diffractometer using the Bond method, combined with a temperature controller to realize highly stabilized measurement environment throughout the whole system, has been developed. The system has been demonstrated with a resolution of better than 【minus-plus】0.0001°, increasing the capability of analyzing single crystal surfaces damaged.4. The following experimental simulations have been conducted using the above-mentioned systems and methods :(1) The LFB system in the measurements of the frequency characteristics of LSAW velocities has been applied to characterize two groups of specimens to demonstrate the high sensitivity and usefulness : five specimens of proton-exchanged layers on Z-cut LiTaOィイD23ィエD2 crystal substrates with the depth of 3-100 nm ; and four specimens ion-implanted layers on (100) Si substrates fabricated with the ion concentrations of 10ィイD113ィエD1-10ィイD116ィエD1 cmィイD11-2ィエD1.(2) The X-ray system has been applied to evaluate the surfaces of several specimens with different levels of roughness to demonstrate the high sensitivity and usefulness.

超声显微光谱技术采用线聚焦束（LFB）和平面波超声材料表征系统，已应用于分析切片、研磨和抛光所引入的材料表面特性，以从单晶锭或非常好的材料制备晶圆衬底。采用质子交换和离子注入的方法在基底上形成薄层。 1．可靠的LFB系统，泄漏速度测量精度高。已经建立了在含水样品表面上的表面声波 (LSAW)，使用多个 LFB 超声波设备运行频率高达 900 MHz。 2．一种通过测量纵波反射系数作为评估材料表面损坏或粗糙度的方法。开发了一种采用邦德法的X射线衍射仪系统，结合温度控制器，实现了全程高度稳定的测量环境。该系统已被证明具有优于【负+】0.0001°的分辨率，提高了分析损坏的单晶表面的能力。4。提到的系统和方法：（1）LSAW速度频率特性测量中的LFB系统已被应用于表征两组样本，以证明其高灵敏度和实用性：五个质子交换层样本深度为3-100 nm的Z切LiTaO2D23D2晶体基板；以及离子浓度为10D113D1-10 D116 D1 cm D11-2 D1的（100）Si基板上的四个离子注入层样品。（2）射线系统已用于评估具有不同特性的多个样品的表面粗糙度水平以证明高灵敏度和实用性。