DEVELOPMENT OF ECONOMICAL AIR FILTERS WITH HIGH COLLECTION PERFORMANCE.

开发具有高收集性能的经济型空气过滤器。

基本信息

批准号：
62470106
负责人：
EMI Hitoshi
金额：
$ 3.65万
依托单位：
Kanazawa University
依托单位国家：
日本
项目类别：
Grant-in-Aid for General Scientific Research (B)
财政年份：
1987
资助国家：
日本
起止时间：
1987 至 1989
项目状态：
已结题

项目摘要

With increasing demand for highly-purified space in high-tech industry, ULPA (Ultra low Penetration Air) filters have been used in clean rooms in place of the conventional HEPA (High Efficiency Particulate Air) filters. Further, in semiconductor industry, membrane filters which have collection efficiency much higher than the ULPA and HEPA are currently used to eliminate particulate matter from pressurized process gases.Under these present situations, the next requirement for these air filters is to reduce their pressure drop without sacrificing their high collection efficiency.In the present work, an index for filter performance, defined as the ratio of logarithm of particle penetration to pressure drop was introduced to evaluate collection performance of various air filters by taking account of both the filter collection efficiency and the pressure drop. On the basis of the filter performance index, the influence of filter structure of fibrous and membrane filters on the collection pe … More rformance was investigated. Furthermore, the collection performance of electret filter which utilizes electrostatic Charge to collect particles was evaluated in order to examine whether it can be used as an economical high collection performance air filter.As a result, it was found that the collection performance of fibrous air filter can be improved (1) by reducing the fiber diameter, (2) by increasing the fraction of fibers which lie parallel to airflow direction, and (3) by reducing the amount of binder. Concerning the membrane filters, we classified them into five groups according to their structure, and found that the membrane filters with fiber-like structure have a higher collection performance than those with pore-like structure. Further, the collection efficiency of membrane filters with a relatively high-packing density was predicted by a newly proposed model based on internal flow collection model. Concerning the collection performance of electret filters, we presented a theoretical model to calculate initial collection efficiency, and experimentally showed that the electret charge on the elect fiber is stable in humid air and that the collection efficiency for solid and atmospheric particles do not decrease with dust load. However, when the electret filter was used for organic mist particles, the charge was neutralized in a short time, leading to a significant decrease in the collection efficiency. Less

随着对高科技行业的需求不断增加，ULPA（超低渗透空气）过滤器已成为常规HEPA的PL ACE（高效率Partalate Air）过滤器，在半导体行业中，膜过滤器的收集功效很大。 HEPA目前用于从压力的过程中消除物质。通过考虑到过滤器效率和压力下降的各种空气过滤器。命令司胺是否被用作经济的高收集表演。结果，发现发射器的收集性能可以使纤维直径划分，（2）通过增加与气流方向平行的纤维的分数和（3）（3）（3 ）通过减少膜过滤器，我们根据其结构将它们分为五组。通过electerter滤波的效率进行了预测，实验表明，在潮湿和收集效率的效率和和和和大气中，侧面的电荷在灰尘范围内都不会降低电滤波器用于有机雾颗粒，该电荷在短时间内被中和，导致收集功效显着降低