Development of Recovery System for VOC Vapors by Ion-Induced Nucleation

离子诱导成核 VOC 蒸气回收系统的开发

• 批准号: 07555235
• 负责人: EMI Hitoshi
• 金额: $ 5.57万
• 依托单位: Kanazawa University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (A)
• 财政年份: 1995
• 资助国家: 日本
• 起止时间: 1995 至 1996
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-07555235/
• 关键词: Volatile organic compound (VOC); Carbon Tetrachloride; Ionization; Nucleation; Electrostatic separation; Corona discharge; Condensation growth; イオン核生成; 揮発性有機物質(VOC); α線源イオナイザー

In semiconductor manufacturing process, various kinds of volatile organic solvents are used for cleaning wafer surfaces and the recovery for these solvents from the atmosphere is of great concern. In the present work, we aimed at developing recovery system of CCl_4 vapor with the concentration of ppm level. CCl_4 vapor is ionized by corona discharge and grown to particles by ion-induced nucleation and then removed by electrostatic precipitation. We designed i) sonic jet ionizer, ii) ion-induced nucleation chamber, and iii) electrostatic precipitator, and studied the individual performances as well as the recovery system assembled with these appratuses. As a result, it was shown that i) the sonic jet ionizer is capable of generating high density ions, ii) CCl_4 ions grew to submicron particles by the condensation of water vapor, and iii) the grown particles can be completely removed by the electrostatic precipitator. Further, the recovery system assembled with these apparatuses was found to be effective for the removal of CCl_4 when it exists in air as a single component. Further work is required to elucidate the influence of other coexisting vapors on the removal efficiency of CCl_4.

在半导体制造过程中，需要使用各种挥发性有机溶剂来清洗晶圆表面，这些溶剂从大气中的回收受到广泛关注。在本工作中，我们的目标是开发浓度为ppm级的CCl_4蒸气回收系统。 CCl_4蒸气通过电晕放电电离并通过离子诱导成核生长成颗粒，然后通过静电沉淀去除。我们设计了i）声波射流电离器，ii）离子诱导成核室，和iii）静电除尘器，并研究了各自的性能以及与这些设备组装的回收系统。结果表明，i）声波射流离子发生器能够产生高密度离子，ii）CCl_4离子通过水蒸气凝结生长为亚微米颗粒，iii）静电可以完全去除生长的颗粒。除尘器。此外，发现当CCl_4作为单一组分存在于空气中时，与这些装置组装的回收系统对于去除CCl_4是有效的。需要进一步的工作来阐明其他共存蒸气对 CCl_4 去除效率的影响。

项目成果

足立元明,奥山喜久夫,他: "Experimenntal Evaluation of Ion-Induced Nucleation in Nanameter-Aerosol Formation by α-ray Radiolysis in SO_2/H_2O/N_2 Mixtures." Colloids and Surfaces. 109. 39-48 (1996)

Motoaki Adachi、Kikuo Okuyama 等人：“SO_2/H_2O/N_2 混合物中 α 射线辐射引起的纳米气溶胶成核的实验评估”109. 39-48 (1996)。

奥山喜久夫,足立元明,他: "Experimenntal Evaluation of Ion-Induced Nacleation in Nanameter-Sized Particle Formation from SO_2/N_2O/N_2 Mixtures by α-ray Radiolysi." Nucleation and Atomospheric Aerosols. 42-45 (1996)

Kikuo Okuyama、Motoaki Adachi 等人：“通过 α 射线成核和大气气溶胶从 SO_2/N_2O/N_2 混合物中离子诱导成核的实验评估”42-45 (1996)。

趙相俊,島田学,奥山喜久夫: "エアフィルタによるナノ粒子捕集の研究現状" 空気清浄. 33巻(掲載予定).

Sangjun Cho、Manabu Shimada、Kikuo Okuyama：“空气过滤器收集纳米粒子的研究现状”《空气净化器》第 33 卷（待出版）。

Yun, C.-M., Y.Otani and H.Emi: ""Development of Unipolar Ion Generator -Separation of Ions in Axial Direction of Flow"" Aerosol Science and Technology. Vol.26 (in press). (1997)

Yun, C.-M., Y.Otani 和 H.Emi：“单极离子发生器的开发-轴向流动方向的离子分离”，气溶胶科学与技术。

C.Yun,Y.Otani,H.Emi: "Development of Unipolar Ion Generator-Separation of Ions inAxial Direction of Flow." Aerosol Science and Technology.(in press). (1997)

C.Yun，Y.Otani，H.Emi：“单极离子发生器的开发-轴向流动方向的离子分离”。