MRI: Track 1 Acquisition of a Deep Reactive Ion Etching System for Enhanced Semiconductor Processing Capability

MRI：轨道 1 采购深度反应离子蚀刻系统以增强半导体加工能力

• 批准号: 2320476
• 负责人: Bei Fan
• 金额: $ 96.35万
• 依托单位: Michigan State University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2023
• 资助国家: 美国
• 起止时间: 2023-09-01 至 2026-08-31
• 项目状态: 未结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=2320476&HistoricalAwards=false
• 关键词: MRI; Track; Acquisition; Deep; Reactive

AbstractMichigan State University (MSU) has maintained a strong tradition and continuing trend in conducting fast-growing cutting-edge multidisciplinary research areas critical to the success of Chips and Science Act 2022 and Critical and Emerging Technologies, like semiconductors, microelectronics, energy, sensors, biomedical technologies, quantum technologies etc. This project seeks to request an Oxford PlasmaPro 100 Estrelas Deep Reactive Ion Etching (DRIE) system - targeting precision, rapid, flexible, high-aspect-ratio deep silicon etching to create diverse micro/nanostructures to accelerate these cutting-edge research areas at MSU and in Midwest Michigan. The Estrelas DRIE instrument is a unique cutting-edge deep silicon etching system that offers exceptional flexibility and throughput to fabricate various micro/nanostructures on semiconductors with fast speed (etch rate 28 µm/min), and high aspect ratio ( 70:1). The instrument will be housed at the Electrical and Computer Engineering Research Cleanroom (ERC), a multidisciplinary shared research facility available to both MSU and external users. With the Estrelas DRIE, MSU will become a regional hub for providing advanced and flexible semiconductor processing support to users from MSU as well as other institutes and local companies in Midwest Michigan. The instrument will immediately benefit a diverse team of investigators and their cross-disciplinary research projects from 4 different departments and 2 colleges at MSU and other institutions including Fraunhofer USA Center Midwest, University of Nevada Las Vegas, and University of Buffalo. The associated research is expected to produce numerous patents to be translated into practical use. Besides research benefits, the Estrelas DRIE will serve as an educational tool for training interdisciplinary researchers and engineers in semiconductor, micro/nanoengineering, biotechnologies, energy, physics, environmental science, etc. The requested Estrelas DRIE will stimulate the development of MSU’s rapidly growing research areas, including semiconductors, microelectronics, energy, sensors, biomedical technologies, quantum technologies etc. The capabilities of the requested Estrelas DRIE will open many new avenues of research in the following major areas: (1) Wide bandgap semiconductors: diamond semiconductor nanomembrane transfer to create diamond-on-GaN power devices; (2) Renewable energy harvesting and storage: understanding of mechanical degradation of next-generation high-capacity electrodes; novel engineered surface development for enhanced electricity generation when liquid flows over surfaces; (3) Sensors, MEMS and Systems: VO2 thin film coated MEMS spectrophotometer to re-direct a light beam to different places; low-cost and highly sensitive fiber-optic temperature sensors; (4) Biomedical technologies: neural miniaturized implants for seamless communication with the brain and the nervous systems; high-bandwidth silicon-based neuroprobes to assess a large number of neurons; wearable microfluidic systems to monitor personal exposure to airborne; intelligent micro robots integrated with multifunctional microdevices; (5) Quantum technologies: diamond nanopillars to enhance photon extraction efficiencies as the carriers for quantum information; diamond membrane for quantum applications. The requested Estrelas DRIE is an essential enabling tool that will not only address the critical need of a diverse group of researchers to expedite their current/future research, but also promote multidisciplinary collaborations between engineers and scientists within the department, across MSU, and beyond the institution. Additionally, the requested Estrelas DRIE instrument will expand the existing micro/nanomanufacturing capabilities at MSU and serve the needs of broad micro/nanoscale science, engineering, and technology. By accelerating these state-of-the-art research areas, the instrument will also serve as an important tool to create scientific training and artistic works to attract students, especially from the underrepresented groups, to pursue STEM education and research.This award reflects NSF's statutory mission and has been deemed worthy of support through evaluation using the Foundation's intellectual merit and broader impacts review criteria.

AbstractMichigan州立大学（MSU）在进行快速增长的尖端多学科研究领域，保持着牢固的传统和持续的趋势蚀刻（DRIE）系统 - 靶向精度，快速，灵活，高光谱的深层硅蚀刻，以创建潜水的微/纳米结构，以加速MSU和中西部密歇根州的这些尖端研究领域。 Estrellas Drie仪器是一种独特的尖端深硅蚀刻系统，具有出色的柔韧性和吞吐量，可在快速速度（蚀刻速度28 µm/min）和高纵横比（70：​​1）上制造各种微型/纳米结构（蚀刻速率28 µm/min）。该仪器将安置在电气和计算机工程研究清洁室（ERC），这是MSU和外部用户的多学科共享研究设施。借助Estrellas Drie，MSU将成为一个区域枢纽，用于为MSU以及密歇根州中西部的其他机构和本地公司提供高级和灵活的半导体处理支持。该工具将立即受益于一个不同的调查人员团队及其来自MSU的4个不同系和2所学院的跨学科研究项目以及包括Fraunhofer USA Center Midwest，内华达州拉斯维加斯大学和布法罗大学的其他机构。相关的研究预计将产生许多专利，将其转化为实际用途。 Besides research benefits, the Estrolas DRIE will serve as an educational tool for training interdisciplinary researchers and engineers in semiconductors, micro/nanoengineering, biotechnologies, energy, physics, environmental science, etc. The requested Estrellas DRIE will stimulate the development of MSU’s rapidly growing research areas, including semiconductors, microelectronics, energy, sensors, biomedical technologies, quantum技术等。所需的Estrellas Drie的功能将在以下主要领域开放许多新的研究途径：（1）宽带隙半导体：钻石半导体纳米膜转移以创建钻石启动钻石启动设备； （2）可再生能源收集和存储：了解下一代高容量电气的机械定义；当液体在表面上流动时，新型工程表面发育可增强发电； （3）传感器，内存和系统：VO2薄膜涂层的MEMS分光光度计，将光束转移到不同的位置；低成本和高度敏感的纤维温度传感器； （4）生物医学技术：与大脑和神经系统无缝交流的神经元微型插座；高带宽基于硅的神经探针，以评估大量神经元；可穿戴的微流体系统，以监测个人接触机载；智能微型机器人与多功能微型版本集成在一起； （5）量子技术：钻石纳米乳头，以增强光子提取能力作为量子信息的载体；用于量子应用的钻石膜。要求的Estrellas Drie是一种必不可少的促成工具，不仅将解决潜水员研究人员的迫切需要，以加快其当前/未来的研究，而且还促进了该部门，MSU范围内以及机构以外的工程师与科学家之间的跨学科合作。此外，所需的Estrellas Drie仪器将扩大MSU的现有微型/纳米制造能力，并满足广泛的微型/纳米级科学，工程和技术的需求。通过加入这些最先进的研究领域，该乐器还将成为创建科学培训和艺术作品的重要工具，以吸引学生，尤其是来自人为人数不足的群体的学生，以购买STEM教育和研究。该奖项反映了NSF的法定任务，并通过评估该基金会的知识分子功能和广泛的影响来审查NSF的法定任务，并被视为值得通过评估的支持。