FMRG: Cyber: Manufacturing USA: Cyber-Enabled, High-Throughput Manufacturing of Multi-Material, 3D Nanostructures

FMRG：网络：美国制造：网络支持的多材料、3D 纳米结构的高通量制造

基本信息

批准号：
2229036
负责人：
Michael Cullinan
金额：
$ 299.97万
依托单位：
University of Texas at Austin
依托单位国家：
美国
项目类别：
Continuing Grant
财政年份：
2022
资助国家：
美国
起止时间：
2022-10-01 至 2026-09-30
项目状态：
未结题

来源：
https://www.nsf.gov/awardsearch/showAward?AWD_ID=2229036&HistoricalAwards=false
关键词：
FMRG Cyber Manufacturing USA Enabled

项目摘要

High-speed, nanoscale 3D printing has the potential to transform manufacturing and enable the fabrication of many products that are currently infeasible to produce. Unfortunately, contemporary 3D printing techniques fall well short of the throughput, resolution, and yield requirements of many potential applications. This grant will support research to develop a novel nanoscale 3D printing technique that will revolutionize our ability to manufacture products such as water filtration membranes that require precise, multi-material 3D nanostructures. Compared with state-of-the-art micro/nanoscale 3D printing, we expect this work to increase the spatial resolution by over an order of magnitude and the throughput by five orders of magnitude by allowing volumetric nanostructures to be fabricated from multiple materials simultaneously. The new water filtration membranes enabled by this nanoscale 3D printing process will improve the tradeoff between selectivity and permeability in water filtration by an estimated factor of 10x while reducing membrane costs by a factor of 100x. These improvements will result in an overall cost reduction in ultrafiltration of up to 25%, potentially save billions of dollars per year. This project will also enhance workforce development by: (1) creating a new NanoEngineering certificate program to rapidly train workers for the semiconductor industry, (2) developing a new NanoEngineering Master’s program targeting students from underrepresented groups, (3) leveraging the Research Experiences for Teachers (RET) program to bring the “learning labs” to schools with large underrepresented-minority populations, and (4) working with industrial partners to create internships opportunities for students.In traditional approaches to nanoscale 3D printing, improvements in resolution, precision, and throughput often conflict. The nanoscale 3D printing process developed under this grant will end these tradeoffs by using sub-wavelength-patterned metamasks to create near-field multi-colored holographic patterns in new multi-wavelength photocurable resists to allow entire multi-material 3D structures to be patterned with sub-diffraction resolution in a single light exposure. Cyber-data analytics will be used to create feedback loops for both individual sub-processes and the overall mask and materials designs. Smart sampling of these 3D nanostructures using novel metrology tools will be combined with machine learning and physics-based models to create a hybrid framework to test the fundamental limits of nanoscale 3D printing. Expected outcomes of this work include: (1) new methods for creating near-field metamasks for multi-wavelength 3D nanopatterning, (2) new resist chemistries enabling multi-wavelength, multi-material patterning, (3) new understanding of the physics that limit resolution, throughput, material properties, and yield in nanoscale 3D printing, (4) new high-speed, data-enabled hybrid metrology approaches for measuring nanoscale 3D features in real time, and (5) new hybrid control techniques that use metrology data and physics-based models to intelligently enhance yield.This Future Manufacturing research is supported by the Divisions of Civil, Mechanical and Manufacturing Innovation (ENG/CMMI), Chemistry (MPS/CHE), and Engineering Education and Centers (ENG/EEC).This award reflects NSF's statutory mission and has been deemed worthy of support through evaluation using the Foundation's intellectual merit and broader impacts review criteria.

高速、纳米级 3D 打印有潜力改变制造业，并能够制造目前无法生产的许多产品。不幸的是，当代 3D 打印技术远远达不到许多潜在应用的吞吐量、分辨率和产量要求。这笔赠款将支持研究开发一种新型纳米级 3D 打印技术，该技术将彻底改变我们制造水过滤膜等产品的能力，这些产品需要精确的多材料 3D 纳米结构，与最先进的技术相比。微/纳米级 3D 打印，我们希望通过允许同时由多种材料制造体积纳米结构，将空间分辨率提高一个数量级以上，并将吞吐量提高五个数量级。 3D 打印工艺将使水过滤的选择性和渗透性之间的权衡提高约 10 倍，同时将膜成本降低 100 倍。这些改进将导致总体成本降低。超滤量减少高达 25%，每年可能节省数十亿美元。该项目还将通过以下方式加强劳动力发展：(1) 创建新的纳米工程证书计划，以快速培训半导体行业的工人，(2) 开发新的纳米工程证书计划。纳米工程硕士课程针对来自代表性不足群体的学生，(3) 利用教师研究经验 (RET) 计划将“学习实验室”带到拥有大量代表性不足的少数群体的学校，以及(4) 与工业合作伙伴合作，为学生创造实习机会。在传统的纳米级 3D 打印方法中，分辨率、精度和吞吐量经常发生冲突，本次资助下开发的纳米级 3D 打印工艺改进将通过使用子技术来结束这些权衡。波长图案元掩模可在新型多波长光固化抗蚀剂中创建近场多色全息图案，从而允许在单光下以亚衍射分辨率对整个多材料 3D 结构进行图案化网络数据分析将用于为各个子流程以及整体掩模和材料设计创建反馈循环，这些3D纳米结构的智能采样将使用新颖的计量工具与机器学习和基于物理的模型相结合来创建。测试纳米级 3D 打印基本极限的混合框架，这项工作的预期成果包括：(1) 为多波长 3D 纳米图案创建近场元掩膜的新方法，(2) 新的抗蚀剂化学物质。多波长、多材料图案化，(3) 对纳米级 3D 打印中限制分辨率、吞吐量、材料特性和产量的物理学的新认识，(4) 用于测量纳米级的新的高速、数据驱动的混合计量方法实时 3D 功能，以及 (5) 新的混合控制技术，使用计量数据和基于物理的模型来智能地提高产量。这项未来制造研究得到了土木、机械和制造创新部门 (ENG/CMMI) 的支持，化学 (MPS/CHE) 和工程教育和中心 (ENG/EEC)。该奖项反映了 NSF 的法定使命，并通过使用基金会的智力价值和更广泛的影响审查标准进行评估，被认为值得支持。

项目成果

期刊论文数量（4）

专著数量（0）

科研奖励数量（0）

会议论文数量（0）

专利数量（0）

FUNCTIONAL ANALYSIS OF A POLARISCOPE TOOL FOR THE EVALUATION OF STRAIN IN ROLL-TO-ROLL NANOFABRICATION

用于评估卷对卷纳米加工应变的偏光工具的功能分析

DOI：
发表时间：
2023
期刊：
37th Annual Meeting of the American Society for Precision Engineering
影响因子：
0
作者：
Groh, Barbara;Connolly, Liam;Cullinan, Michael
通讯作者：
Cullinan, Michael

Metrology of Periodic 3D Nanostructures using Spectroscopic Scatterometry

使用光谱散射测量法进行周期性 3D 纳米结构计量

DOI：
发表时间：
2023
期刊：
Ion and Photon Beam Technology and Nanofabrication
影响因子：
0
作者：
Lee, Sang Lee;Chien, Kun-Chieh;Groh, Barbara;Cullinan, Michael;Chang, Chih-Hao
通讯作者：
Chang, Chih-Hao

DESIGN CONCERNS FOR TIP-BASED MEASUREMENT TOWARDS PROCESS METROLOGY IN ROLL-TO-ROLL NANOMANUFACTURING

卷对卷纳米制造中基于尖端测量的工艺计量设计问题