FMRG: Cyber: Manufacturing USA: Cyber-Enabled, High-Throughput Manufacturing of Multi-Material, 3D Nanostructures

FMRG：网络：美国制造：网络支持的多材料、3D 纳米结构的高通量制造

• 批准号: 2229036
• 负责人: Michael Cullinan
• 金额: $ 299.97万
• 依托单位: University of Texas at Austin
• 依托单位国家: 美国
• 项目类别: Continuing Grant
• 财政年份: 2022
• 资助国家: 美国
• 起止时间: 2022-10-01 至 2026-09-30
• 项目状态: 未结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=2229036&HistoricalAwards=false
• 关键词: FMRG; Cyber; Manufacturing; USA; Enabled; FMRG; Cyber; Manufacturing; USA; Enabled

High-speed, nanoscale 3D printing has the potential to transform manufacturing and enable the fabrication of many products that are currently infeasible to produce. Unfortunately, contemporary 3D printing techniques fall well short of the throughput, resolution, and yield requirements of many potential applications. This grant will support research to develop a novel nanoscale 3D printing technique that will revolutionize our ability to manufacture products such as water filtration membranes that require precise, multi-material 3D nanostructures. Compared with state-of-the-art micro/nanoscale 3D printing, we expect this work to increase the spatial resolution by over an order of magnitude and the throughput by five orders of magnitude by allowing volumetric nanostructures to be fabricated from multiple materials simultaneously. The new water filtration membranes enabled by this nanoscale 3D printing process will improve the tradeoff between selectivity and permeability in water filtration by an estimated factor of 10x while reducing membrane costs by a factor of 100x. These improvements will result in an overall cost reduction in ultrafiltration of up to 25%, potentially save billions of dollars per year. This project will also enhance workforce development by: (1) creating a new NanoEngineering certificate program to rapidly train workers for the semiconductor industry, (2) developing a new NanoEngineering Master’s program targeting students from underrepresented groups, (3) leveraging the Research Experiences for Teachers (RET) program to bring the “learning labs” to schools with large underrepresented-minority populations, and (4) working with industrial partners to create internships opportunities for students.In traditional approaches to nanoscale 3D printing, improvements in resolution, precision, and throughput often conflict. The nanoscale 3D printing process developed under this grant will end these tradeoffs by using sub-wavelength-patterned metamasks to create near-field multi-colored holographic patterns in new multi-wavelength photocurable resists to allow entire multi-material 3D structures to be patterned with sub-diffraction resolution in a single light exposure. Cyber-data analytics will be used to create feedback loops for both individual sub-processes and the overall mask and materials designs. Smart sampling of these 3D nanostructures using novel metrology tools will be combined with machine learning and physics-based models to create a hybrid framework to test the fundamental limits of nanoscale 3D printing. Expected outcomes of this work include: (1) new methods for creating near-field metamasks for multi-wavelength 3D nanopatterning, (2) new resist chemistries enabling multi-wavelength, multi-material patterning, (3) new understanding of the physics that limit resolution, throughput, material properties, and yield in nanoscale 3D printing, (4) new high-speed, data-enabled hybrid metrology approaches for measuring nanoscale 3D features in real time, and (5) new hybrid control techniques that use metrology data and physics-based models to intelligently enhance yield.This Future Manufacturing research is supported by the Divisions of Civil, Mechanical and Manufacturing Innovation (ENG/CMMI), Chemistry (MPS/CHE), and Engineering Education and Centers (ENG/EEC).This award reflects NSF's statutory mission and has been deemed worthy of support through evaluation using the Foundation's intellectual merit and broader impacts review criteria.

高速，纳米级3D打印有可能改变制造业并启用许多目前可生产的产品的结构。不幸的是，当代3D打印技术远远没有达到许多潜在应用的吞吐量，分辨率和收益率要求。该赠款将支持开发一种新型纳米级印刷技术的研究，该技术将彻底改变我们制造产品的能力，例如需要精确的多种物质3D纳米结构的水过滤机制。与最先进的微型/纳米级打印相比，我们预计这项工作将通过允许简单地用多种材料制造体积的纳米结构来增加空间分辨率的数量级和五个数量级的吞吐量。这种纳米级3D打印过程实现的新水过滤机制将提高选择性和渗透率之间的权衡，估计的因子为10倍，同时将膜成本降低100倍。这些改进将导致超过滤的总体成本降低高达25％，可能每年节省数十亿美元。该项目还将通过以下方式通过：（1）创建一个新的纳米工程证书计划，以迅速培训工人为半导体行业培训工人，（2）开发一个针对来自代表性不足群体的学生的新型纳米工程硕士课程，（3）将研究经验与教师的研究经验（WEST）与“学习型群”（Worter Indressiral）带来“与学习的阶段”，并带来了“学习型号”，并与“学习”的群体和4个群体相关的人（4）。合作伙伴为学生创造实习机会。在传统的纳米级打印方法中，分辨率，精度和吞吐量的改进经常发生冲突。该赠款下开发的纳米级3D打印过程将通过使用次波长 - 图案图案的元张元来结束这些权衡，以创建新的多波长光电疗法的近场多色全息图案，以允许整个多种材料3D结构在单光线曝光中通过副局部分辨率进行patter液。网络数据分析将用于为单个子过程以及整体面具和材料设计创建反馈循环。使用新颖的计量工具对这些3D纳米结构的智能采样将与机器学习和基于物理的模型相结合，以创建一个混合框架，以测试Nanoscale 3D打印的基本限制。这项工作的预期结果包括：（1）为多波长3D纳米图案创建近场元掩体的新方法，（2）新的抵抗化学物质，实现多波长，多材料模式，（3）对物理学的新理解，这些物理学的新理解，这些物理学的分辨率，分辨率，吞吐量，材料，材料的材料和屈服于Nanscale 3D的新效果，（4）新的印刷图，（4）数据 - （4）新的印刷图，（4）数据。实时测量纳米级3D特征，以及（5）使用计量学数据和基于物理学的模型智能提高产量的新型混合控制技术。未来的制造业研究得到了民用，机械和制造创新（ENG/CMMI）的划分（MPS/CHE）（MPS/CHE），以及统计和统计局（ENG/EEC）。通过使用基金会的知识分子和更广泛影响的评论标准来通过评估来支持。