Multi-modal Haptic Stimulations Using Micromachined Ultrasound Processors

使用微机械超声处理器的多模式触觉刺激

• 批准号: 2128311
• 负责人: Liwei Lin
• 金额: $ 39.83万
• 依托单位: University of California-Berkeley
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2021
• 资助国家: 美国
• 起止时间: 2021-09-01 至 2024-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=2128311&HistoricalAwards=false
• 关键词: Multi; modal; Haptic; Stimulations; Using

Emerging wearable electronics having a variety of functions are desirable in seamless human-machine interface applications, including sensors to detect environmental signals and actuators to generate mechanical sensations. Today, numerous sensing systems have been developed for human-machine interfaces to sense signals such as physiological parameters relevant to human health conditions, including electro-cardio signal, pulse wave, blood pressure, and body motion. On the other hand, the progress of wearable mechanical stimulators remains very challenging. For example, traditional actuating systems have used large linear resonators, eccentric rotating masses, and voice coils to generate mechanical stimulations. As a result, these systems are bulky and often stationary with very limited applications. There are several “wearable” prototype stimulators in various research stages such as tactile devices on the fingertips to recreate interaction forces for virtual reality applications, but these systems are still bulky. Several soft and thin actuators have been reported to address the size issue based on piezoelectric polymers to make flexible, thin, and light-weight actuators. However, they require very high driving voltage (hundreds of volts) and they don’t have good spatial resolution for multi-modal stimulations to mimic complex sensations. The proposed project provides unique opportunities by using the acoustic pressure of piezoelectric micromachined ultrasonic transducers (PMUTs) to build small-form factor, wearable, touchless haptic feedback systems via the micromachining process for low-cost manufacturing. The synergy of research and education interaction and integration between manufacturing, material sciences and physical transduction principles will be an engine for the multidisciplinary fusion in research and education expertise for the next-generation scientists and engineers.The desirable features of wearable haptic devices include: (1) low driving voltage and high output force and/or deformation; (2) thin and small form-factor constructions; and (3) multi-modal stimulations with high spatial and temporal resolutions. This project proposes three innovative approaches to address these challenges: (1) a piezoelectric micromachined ultrasonic transducers (PMUTs) array to generate high ultrasonic radiation force for touchless stimulations irrelevant of skin surface profiles; (2) high temporal and spatial resolutions by a single PMUT chip with multiple actuator units; and (3) varying modals of haptic tactile sensations by amplitude and frequency modulations on individual actuators. As such, this micromachined ultrasound processor could enable exceptional functions and usages in a variety of current and future systems, including cell phones, augmented reality (AR), virtual reality (VR), robotics, … etc., by providing alternative/additional haptic stimulations that are not possible from the current haptic feedback devices.This award reflects NSF's statutory mission and has been deemed worthy of support through evaluation using the Foundation's intellectual merit and broader impacts review criteria.

在无缝的人机界面应用中，希望具有多种功能的新兴可穿戴电子设备，包括检测环境信号和执行器以产生机械感觉的传感器。如今，已经为人机界面开发了许多传感器系统，以感知信号，例如与人类健康状况有关的物理参数，包括电信号，脉搏波，血压和身体运动。另一方面，可穿戴机械刺激器的进度仍然非常挑战。例如，传统的致动系统使用了大型线性谐振器，偏心旋转质量和语音线圈来产生机械刺激。结果，这些系统是笨重的，通常是固定的，应用非常有限。在各个研究阶段，有几个“可穿戴”的原型刺激器，例如指尖上的触觉设备，以重新创建虚拟现实应用的相互作用力，但是这些系统仍然笨重。据报道，有几个软且薄的执行器可以根据压电聚合物解决尺寸问题，以使其柔性，薄和轻巧的执行器。但是，它们需要非常高的驾驶电压（数百伏），并且对于模拟复杂感觉的多模式刺激没有良好的空间分辨率。拟议的项目通过使用压电微机械超声传感器（PMUTS）的声压来建立小型因子，可穿戴，无触摸的触觉反馈系统通过低成本制造的微机械工艺来建立小型的因子，从而提供了独特的机会。研究和教育互动的协同作用以及制造业，物质科学和物理转移原则之间的融合将成为下一代科学家和工程师研究和教育专业知识中多学科融合的引擎（2）薄和小的因子构造； （3）具有高空间和临时分辨率的多模式模拟。该项目提出了解决这些挑战的三种创新方法：（1）一种压电微机械超声传感器（PMUTS）阵列，以产生高超声辐射力，以实现与皮肤表面曲线无关的无触摸模拟； （2）单个PMUT芯片具有多个执行器单元的高时间和空间分辨率； （3）通过放大器和频率调制对单个执行器的触觉触觉感觉的不同模态。因此，这个微加工的超声处理器可以在各种当前和未来的系统中启用特殊功能和用法，包括手机，增强现实（AR），虚拟现实（VR），机器人技术，机器人技术等，通过提供替代/额外的触觉刺激，通过提供当前的Infactiel Internitial Internutial Internial Internial Internial deem deem deem deem te eym deem deem deem deem to and the Internatial deem deem deem deem deem deem deem to ns ter ns terimal of deem a inver ter nsf of deem de em te and deem。优点和更广泛的影响审查标准。

项目成果

AUTO-POSITIONING AND HAPTIC STIMULATIONS VIA A 35 MM SQUARE PMUT ARRAY

通过 35 毫米方形 PMUT 阵列进行自动定位和触觉刺激

• 发表时间: 2023
• 期刊: 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS
• 作者: Yue, W.;Peng, Y.;Liu, H.;Xia, F.;Sui, F.;Umezawa, S.;Ikeuchi, S.;Aida, Y.;and Lin, L.
• 通讯作者: and Lin, L.

HIGH-SPL PMUT ARRAY FOR MID-AIR HAPTIC INTERFACE

用于空中触觉界面的高声压 PMUT 阵列

• 发表时间: 2023
• 期刊: Actuators and Microsystems-Transducers 2023
• 作者: Xia, F.;Peng, Y.;Yue, W.;Chen, C.-M.;Pala, S.;Arakawa, R. and
• 通讯作者: Arakawa, R. and